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扩散硅压力传感器的不锈钢隔离膜片充油封装研究

发布时间:2018-8-14      发布人:泽天传感      点击:

BENWENJIESHAOLEMUQIANSHICHANGJIAOWEICHANGJIANDEJIZHONGYALICHUANGANQIDEFENGZHUANGXINGSHI,DUIQIZHONGBUXIUGANGGELIBOWENMOPIANFENGZHUANGJIEGOUHEMOXINGJINXINGXINGLEXIANGXIDEJIESHAOHEFENXI,ZONGJIELEBUXIUGANGGECHONGYOULIMOPIANFENGZHUANGJIEGOUZHONG,BOWENMOPIAN、GUIJIAO、MINGANXINPIANXUANXINGYAOQIU,BINGDUIFENGZHUANGHANJIEGONGYIZUOLEXIANGXIDEYANJIU。

一、封装的基本要求及典型封装形式

YIBANLAISHUO,YALICHUANGANQIDEFENGZHUANGYINGYIJUCHUANGANQICELIANGYUANLI、XINPIANDEJIEGOU、YIJIBEICELIANGDUIXIANGHEYINGYONGHUANJINGDEBUTONG,QUEDINGQIFENGZHUANGDEYAOQIU。ZAIWUQIZHUANGBEIDENGJUNSHIYINGYONGLINGYUZHONG,DUICHUANGANQIFENGZHUANGDEYAOQIUHENGAO,ZAIMINPINYINGYONGLINGYU,DUIFENGZHUANGDEYAOQIUKESHIDANGDEFANGKUAN。YUJIASUDU、XIEZHENQIHETUOLUOYIDENGQITACHUANGANQIXIANGBI,YALICHUANGANQIYONGYUYALICELIANGSHI,QIYALIXINPIANTONGCHANGBIXUZHIJIEBAOLUZAIBEICELIANGDELIUTIZHONG,ZHEIJIUYAOQIUCAIYONGJINENGBAOHUXINPIAN,YOUNENGCHUANDIYALIDEFANGFADUIYALICHUANGANQIJINXINGFENGZHUANG,YINCI,QIFENGZHUANGYAOQIUHENANDUXIANGDANGJIAOGAO。ZONGDELAISHUO,YALICHUANGANQIDEFENGZHUANGYINGGAIMANZUYIXIAJIFANGMIANDEYAOQIU:

1)JIXIESHANGYINGGAISHIJIANGUDE,KEYIKANGZHENDONG,KANGCHONGJI;

2)YINGDANGBIMIANREYINGLIDUIXINPIANDEYINGXIANG;

3)DIANQISHANGYAOQIUXINPIANYUHUANJINGHUODADISHIJUEYUANDE;

4)DIANCISHANGYAOQIUSHIPINGBIDE;

5)YONGQIMIDEFANGSHIGELIFUSHIQITIHUOLIUTI,HUOTONGGUOFEIQIMIGELIFANGSHIGELISHUIQI;

6)DIJIAGE,FENGZHUANGXINGSHIYUBIAOZHUNZHIZAOGONGYIJIANRONG。TU1SHIYALICHUANGANQISHICHANGSHANGCHANGYONGDEJIZHONGFENGZHUANGXINGSHI。TU(a)SHITOFENGZHUANGWAIXING,(b)SHIQIMICHONGYOUDEBUXIUGANGFENGZHUANG,(c)SHIXIAOWAIXINGSULIAOFENGZHUANG(SOP),ZHEISANZHONGFENGZHUANGXINGSHIWEIYALIMINGANTOU,(d)SHIBUXIUGANGFENGZHUANGDEYALICHUANGANQICHANPINYALIBIANSONGQI。

               

(a)                                                    (b)

               

(c)                                                   (d)

TU1、YALICHUANGANQIDEJIZHONGDIANXINGFENGZHUANGXINGSHI

二、TO 封装结构

YALICHUANGANQITOFENGZHUANGSHIYIZHONGDICHENGBENDEFENGZHUANGXINGSHI,SHUFEIQIMIFENGZHUANG,ZHUYAOYONGYUJIANCEFEIFUSHIQITIHEYUGANZAOKONGQIJIEZHIJIANRONGDEQITI。QIYINGYONGLINGYUBAOKUOQICHEYIBIAO、YIYAOWEISHENG、QITIKONGZHIXITONG、KONGDIAO、ZHILENGSHEBEI、HUANJINGJIANCEHEYIQIYIBIAODENG。TOFENGZHUANGSHUYUCHUANGANQIDEYICIFENGZHUANG,ZAISHIYONGSHIXUGENJUQIYINGYONGHUANJINGDUICHUANGANQIJINXINGERCIFENGZHUANG,YIMANZUXINGNENGHEKEKAOXINGYAOQIU。RUTU2SUOSHIWEITOFENGZHUANGDEYALICHUANGANQIJIEGOUTU。TUZHONGSUOSHIDEYALICHUANGANQISHIJUEYAXINPIAN。TOFENGZHUANGDEGONGYIBAOKUOXINPIANYUBOLIDEJINGDIANJIANHE、TIEPIAN、YINXIANJIANHE、FENGMAOJITUJIAOBAOHU。

TU2 TOFENGZHUANGYALICHUANGANQIJIEGOU

三、不锈钢隔离波纹膜片封装

RUTU3SUOSHIWEIBUXIUGANGGEMOPIANFENGZHUANGDEGUIYAZUYALICHUANGANQIJIEGOUTU,ZHEIZHONGFENGZHUANGJIEGOUWEIQIMIFENGZHUANG。GAIYALICHUANGANQIGUANGFANDIYINGYONGYUHANGTIAN、HANGKONG、GONGYEZIDONGHUAKONGZHI、QICHEDENGLINGYU。TADEGUTAIYINGBIANMOPIANTEXING、BUXIUGANGGEMOJIEGOUHEJIHAODEDONGTAIXINGNENGKEMANZUXINHAODUIYALICHUANGANQIDEGAOWENDING、GAOKEKAO、DIGONGHAO、DONGTAICESHIDENGDEYAOQIU。TABUDANKEYIJINXINGPUTONGDEQITIJIYETIDEYALICELIANG,ERQIEKEYIYONGYUFUSHIXINGDEQITIJIYETIRUSUAN、JIANJIGEZHONGYETITUIJINJIDENGDEYALICELIANG。TADEJIEGOUTEDIANFEICHANGYOULIYUFAZHANCHENGXILIEHUADE、TONGYONGXINGDECHUANGANQI。

TU3、GANGGELIMOPIANFENGZHUANGYALICHUANGANQIJIEGOU

ZHEIZHONGGELIMOYALICHUANGANQITOUYOUJINSHUJIZUO、GUANQIAO、GUIYOU、CHUANGANQIYALIXINPIANJIBUXIUGANGMOPIANZUCHENG。QIZHUYAODEZHIZAOGONGYIWEI:GUIXINPIANXUANYONGJINGDIANJIANHEGONGYIFENGJIEERCHENG,FENGJIEHAODEXINPIANYONGJIAOJIEGONGYITIEZAIGUANQIAOJIZUOSHANG,XINPIANSHANGDEHANPANYUGUANZUOSHANGDEYINJIAOSHIYONGAuSIYINXIANLIANJIEQILAIDE。BUXIUGANGGEMOYUQIAOTICAIYONGRONGHANGONGYIJINXINGHANJIE,HANJIEGONGYICHANGYONGJIGUANGHANJIE、YAHUHAN、WEISHUDENGLIZIHANJIEHUODIANZISHUHANJIEDENG。GUIYOUGUANCHONGGONGYIYIBANCAIYONGZHENKONGGUANCHONGJISHU,KEJIBENXIAOCHUCANYUQITIDUIGELICEYAXITONGDEYINGXIANG,TIGAOCHUANGANQIDEJINGDUJIWENDINGXING。GUIYAZUYALICHUANGANQIBENSHENYOUYIGEGUYOUDETEXING,JIUSHIWENDUXISHUJIAODA,YINCIXUYAODUIQIJINXINGWENDUWUCHABUCHANG。CHANGYONGDEWENBUFANGSHISHIZAIYINGBIANDIANQIAOSHANGFUJIADIANZUWANGLUO,TONGGUOCESHIJIJISUANQIGAODIWENTEXING,QUEDINGWANGLUOZUZHI,YIDADAOWENDUBUCHANGDEMUDE。ZHEIZHONGCHUANGANQIDECELIANGYUANLISHIWAIJIEYALITONGGUOGUIYOUCHUANDIDAOMINGANXINPIANSHANG,ZAIYOUMINGANXINPIANCECHUYALI。RANER,ZAIKAOLVGUIYOUDEREPENGZHANGDEQINGKUANGSHI,TIANCHONGZAIQIANGTIZHONGDEGUIYOULIANGYINGJINKENENGDESHAO,FOUZE,GUIYOUZAIBUTONGWENDUXIADETIJIPENGZHANGJIANGHUIDUICELIANGYALIDAILAIJIAODADEWUCHA,ERQIEHENRONGYIYINQICHUANGANQIDEWENDUPIAOYI。

四、影响压力传感器性能关键因素分析

1、BUXIUGANGGELIMOPIAN

BUXIUGANGGELIMOPIANDESHEJIYUGUIMOPIANDESHEJIYIYANG,YAOQIUZAICELIANGYALIFANWEINEI,QIBIANXINGCHUZAIXIANDANXINGFANWEINEI。WEILETIGAOMOPIANDEBIANXINGLIANG,YOUNENGGOUZENGJIAQIXIANXINGFANWEI,RENMENTONGCHANGJIANGBUXIUGANGMOPIANSHEJICHENGBOWENZHUANG。BOZHUANGDEBOMOZAITONGYANGDEZAIHEXIAJINENGCHANSHENGJIAODADEBIANXING,YOUNENGZENGJIAXIANXINGFANWEI。ZHEIZHONGBOMODENAODUyYUYALIPDEGUANXIBIAODASHIWEI[2]:

QIZHONG

SHIZHONGqSHIBOMOBOXINGTEZHENGYINZI,DUIZHENGXIANBOXINGQIqWEI:

SHIZHONG,h=MOPIANDEHOUDU,R=MOPIANDEBANJING,s=BOXINGHUZHANG;H=BOXINGSHENDU;L=BOXINGKONGJIANZHOUQI。DUIPINGDEBOMOq=1,BOXINGDEJINGQUECHENGDUDUIqJIHUMEIYOUYINGXIANG,YINCIJUXINGBOXINGYIBANKEYONGXIANBOJINSI。TU4JICHULEBOWENPIANYANGPIN。

TU4 BOWENPIANYANGPIN

2、GELIBOWENMOPIANDEDANXINGMOXING

为了分析压力通过隔离薄膜的传递规律,我们对这种封装形式的传感器作如下假设,即假设硅油是不可压缩的,不锈钢膜片可看成周边固支的圆形薄膜,则压力通过硅油传递到硅薄膜将不引起任何附加损耗。简化模型如图5所示。因此,当外界作用在传感器上的压力为P时,压力通过不锈钢膜片再由硅油传递到硅压力芯片上,若不锈钢膜片的弹性反作用力为Pg硅的弹性反作用力为PSi,则有:

TU5 GELIBOMOYALICHUANGANQIDANXINGJIANHUAMOXING

CIMOXINGZONGGANGDUXISHUWEI:1/k=1/K1+1/k2+1/k3,QIZHONGKWEIZONGGANGDUXISHU,K1、K2、K3FENBIEWEIXIUGANGMOPIANGANGDUXISHU、BOMODEGANGDUXISHU、GUIJIAODEGANGDUXISHU。XIANRANRUYAOYALIGENGHAODECHUANDIDAOXINPIANSHANG,XUANYONGDEBUXIUGANGMOPIANGANGDUXISHU、GUIBOMODEGANGDUXISHUQIYUEXIAOYUEHAO,JIBUXIUGANGGELIBOMODEBANJINGYUEDA、BOMOHOUDUYUEBO,YALIYUERONGYITONGGUOGUIYOUCHUANDIDAOGUIXINPIANSHANG,YALIDECHUANDISUNSHIYEYUEXIAO(TONGYANGYALICHANSHENGDERAODUYUEDA)。

3、GUIYOUDEWENDUTEXINGDUIYALICHUANGANQIXINGNENGDEYINGXIANG

任何液体的体积随温度变化将发生变化,硅油也不例外。硅油的热膨胀系数为(0.7~0.9)×10-2/℃,当传感器在-30~80℃温区工作时,全温区内封装壳体内硅油的体积变化量为8%~9%。当假设硅油为理想的不可压缩物质时,这一变化量是有规律的并可由隔离膜片在弹性范围内,在定标时进行修正。但如果硅油和工件净化不充分,硅油和传感器内混有空气、水分等可压缩易挥发的物质,那么硅油在全程温度工作范围内将无规律变化,而这一变化量在全密封的传感器室内形成的力就会作用在芯片上,使传感器的输出特性随环境温度而发生无规律的变化,这样传感器的温度特性和长期稳定性非常差,因此,在封装时要对硅油进行加热真空净化处理,并在真空环境下将硅油冲入压力传感器封装腔体里,净化加热温度为120℃,时间在半小时以上。此外,在焊接过程中,会引起硅油的分解或改变硅油的性能,这-问题在封装工艺的过程中应尽量避免。

五、封焊工艺研究

由于军事、工业用压力传感器的的使用温度范围一般在-40℃-125℃内,如果焊接时,高温时间过长,可能会造成敏感芯片损坏和硅油在高温下分解,所以要求焊接过程短,局部加热,焊缝位置符合气密检测标准(注:焊接需要在硅油中进行)。针对以上特点我们采用的是储能焊接工艺,焊接结构及焊接过程示意图如图6与图7所示:

            

(6)HANJIEJIEGOU                                                               (7)HANJIEGUOCHENGSHIYITU

WOMENFENBIEYONGDIANRONGCHUNENGHANHEZHONGPINZHILIUNIBIANSHICHUNENGHANDUICHUANGANQIYANGJIANJINXINGLEFENGHAN。DIANRONGCHUNENGHANDIANLIUJIAODA,HANHOUBIAOMIANWENDUGAOYUZHONGPINZHILIUNIBIANSHI,QIEQIGONGJIANBIAOMIANHANJIEXIAOGUOYOUMINGXIANYAHEN;ZHONGPINZHILIUNIBIANSHICHUNENGHAN(TU8)HANJIESHIJIANHENENGLIANGKEYIDIAOJIE,NENGGOUERCIFANGDIAN,HANJIEHOUBIAOMIANWENDU,QIXIANGJIAOYUJIAODIDIANRONGCHUNENGHANDEYALIJIAOXIAO,HANJIEHOUDEGONGJIANBIAOMIANYAHENBUMINGXIAN。

TU8 HANJIEXIANCHANG(ZHONGPINZHILIUNIBIANSHI)

CONGWOMENFENGZHUANGHAODEYALICHUANGANQIDECESHIQINGKUANGLAIKAN,LIANGZHONGHANJIEGUOCHENGDUICHUANGANQIDEMINGANXINPIANJIBENMEIYOUSUNSHANG,DOUNENGMANZUCHUANGANQIDEXINGNENGYAOQIU。TONGGUOCHUANGANQIDEFENGHANGUOCHENGYANJIUHEDUIFENGZHUANGHAODECHUANGANQICESHIQINGKUANGLAIKAN,KEYIDECHUYIXIAJIELUN:

1、CHUNENGHANKEYIZAIGUIYOUZHONGHANJIE;   

2、HANJIEGUOCHENGDIANLIU、WENDUBINGWEIDUIMINGANXINPIANZAOCHENGYINGXIANG;

3、焊接的密封能够达到气密检测要求,储能焊接能够满足扩散硅传感器不锈钢隔离膜片封装要求。 本文源自泽天传感,福彩快三,转载请注明出处!