BENWENJIESHAOLEMUQIANSHICHANGJIAOWEICHANGJIANDEJIZHONGYALICHUANGANQIDEFENGZHUANGXINGSHI，DUIQIZHONGBUXIUGANGGELIBOWENMOPIANFENGZHUANGJIEGOUHEMOXINGJINXINGXINGLEXIANGXIDEJIESHAOHEFENXI，ZONGJIELEBUXIUGANGGECHONGYOULIMOPIANFENGZHUANGJIEGOUZHONG，BOWENMOPIAN、GUIJIAO、MINGANXINPIANXUANXINGYAOQIU，BINGDUIFENGZHUANGHANJIEGONGYIZUOLEXIANGXIDEYANJIU。

一、封装的基本要求及典型封装形式

YIBANLAISHUO，YALICHUANGANQIDEFENGZHUANGYINGYIJUCHUANGANQICELIANGYUANLI、XINPIANDEJIEGOU、YIJIBEICELIANGDUIXIANGHEYINGYONGHUANJINGDEBUTONG，QUEDINGQIFENGZHUANGDEYAOQIU。ZAIWUQIZHUANGBEIDENGJUNSHIYINGYONGLINGYUZHONG，DUICHUANGANQIFENGZHUANGDEYAOQIUHENGAO，ZAIMINPINYINGYONGLINGYU，DUIFENGZHUANGDEYAOQIUKESHIDANGDEFANGKUAN。YUJIASUDU、XIEZHENQIHETUOLUOYIDENGQITACHUANGANQIXIANGBI，YALICHUANGANQIYONGYUYALICELIANGSHI，QIYALIXINPIANTONGCHANGBIXUZHIJIEBAOLUZAIBEICELIANGDELIUTIZHONG，ZHEIJIUYAOQIUCAIYONGJINENGBAOHUXINPIAN，YOUNENGCHUANDIYALIDEFANGFADUIYALICHUANGANQIJINXINGFENGZHUANG，YINCI，QIFENGZHUANGYAOQIUHENANDUXIANGDANGJIAOGAO。ZONGDELAISHUO，YALICHUANGANQIDEFENGZHUANGYINGGAIMANZUYIXIAJIFANGMIANDEYAOQIU：

1）JIXIESHANGYINGGAISHIJIANGUDE，KEYIKANGZHENDONG，KANGCHONGJI；

2）YINGDANGBIMIANREYINGLIDUIXINPIANDEYINGXIANG；

3）DIANQISHANGYAOQIUXINPIANYUHUANJINGHUODADISHIJUEYUANDE；

4）DIANCISHANGYAOQIUSHIPINGBIDE；

5）YONGQIMIDEFANGSHIGELIFUSHIQITIHUOLIUTI，HUOTONGGUOFEIQIMIGELIFANGSHIGELISHUIQI；

6）DIJIAGE，FENGZHUANGXINGSHIYUBIAOZHUNZHIZAOGONGYIJIANRONG。TU1SHIYALICHUANGANQISHICHANGSHANGCHANGYONGDEJIZHONGFENGZHUANGXINGSHI。TU（a）SHITOFENGZHUANGWAIXING，（b）SHIQIMICHONGYOUDEBUXIUGANGFENGZHUANG，（c）SHIXIAOWAIXINGSULIAOFENGZHUANG（SOP），ZHEISANZHONGFENGZHUANGXINGSHIWEIYALIMINGANTOU，（d）SHIBUXIUGANGFENGZHUANGDEYALICHUANGANQICHANPINYALIBIANSONGQI。

（a）                                                    （b）

（c）                                                   （d）

TU1、YALICHUANGANQIDEJIZHONGDIANXINGFENGZHUANGXINGSHI

二、TO 封装结构

YALICHUANGANQITOFENGZHUANGSHIYIZHONGDICHENGBENDEFENGZHUANGXINGSHI，SHUFEIQIMIFENGZHUANG，ZHUYAOYONGYUJIANCEFEIFUSHIQITIHEYUGANZAOKONGQIJIEZHIJIANRONGDEQITI。QIYINGYONGLINGYUBAOKUOQICHEYIBIAO、YIYAOWEISHENG、QITIKONGZHIXITONG、KONGDIAO、ZHILENGSHEBEI、HUANJINGJIANCEHEYIQIYIBIAODENG。TOFENGZHUANGSHUYUCHUANGANQIDEYICIFENGZHUANG，ZAISHIYONGSHIXUGENJUQIYINGYONGHUANJINGDUICHUANGANQIJINXINGERCIFENGZHUANG，YIMANZUXINGNENGHEKEKAOXINGYAOQIU。RUTU2SUOSHIWEITOFENGZHUANGDEYALICHUANGANQIJIEGOUTU。TUZHONGSUOSHIDEYALICHUANGANQISHIJUEYAXINPIAN。TOFENGZHUANGDEGONGYIBAOKUOXINPIANYUBOLIDEJINGDIANJIANHE、TIEPIAN、YINXIANJIANHE、FENGMAOJITUJIAOBAOHU。

TU2 TOFENGZHUANGYALICHUANGANQIJIEGOU

三、不锈钢隔离波纹膜片封装

RUTU3SUOSHIWEIBUXIUGANGGEMOPIANFENGZHUANGDEGUIYAZUYALICHUANGANQIJIEGOUTU，ZHEIZHONGFENGZHUANGJIEGOUWEIQIMIFENGZHUANG。GAIYALICHUANGANQIGUANGFANDIYINGYONGYUHANGTIAN、HANGKONG、GONGYEZIDONGHUAKONGZHI、QICHEDENGLINGYU。TADEGUTAIYINGBIANMOPIANTEXING、BUXIUGANGGEMOJIEGOUHEJIHAODEDONGTAIXINGNENGKEMANZUXINHAODUIYALICHUANGANQIDEGAOWENDING、GAOKEKAO、DIGONGHAO、DONGTAICESHIDENGDEYAOQIU。TABUDANKEYIJINXINGPUTONGDEQITIJIYETIDEYALICELIANG，ERQIEKEYIYONGYUFUSHIXINGDEQITIJIYETIRUSUAN、JIANJIGEZHONGYETITUIJINJIDENGDEYALICELIANG。TADEJIEGOUTEDIANFEICHANGYOULIYUFAZHANCHENGXILIEHUADE、TONGYONGXINGDECHUANGANQI。

TU3、GANGGELIMOPIANFENGZHUANGYALICHUANGANQIJIEGOU

ZHEIZHONGGELIMOYALICHUANGANQITOUYOUJINSHUJIZUO、GUANQIAO、GUIYOU、CHUANGANQIYALIXINPIANJIBUXIUGANGMOPIANZUCHENG。QIZHUYAODEZHIZAOGONGYIWEI：GUIXINPIANXUANYONGJINGDIANJIANHEGONGYIFENGJIEERCHENG，FENGJIEHAODEXINPIANYONGJIAOJIEGONGYITIEZAIGUANQIAOJIZUOSHANG，XINPIANSHANGDEHANPANYUGUANZUOSHANGDEYINJIAOSHIYONGAuSIYINXIANLIANJIEQILAIDE。BUXIUGANGGEMOYUQIAOTICAIYONGRONGHANGONGYIJINXINGHANJIE，HANJIEGONGYICHANGYONGJIGUANGHANJIE、YAHUHAN、WEISHUDENGLIZIHANJIEHUODIANZISHUHANJIEDENG。GUIYOUGUANCHONGGONGYIYIBANCAIYONGZHENKONGGUANCHONGJISHU，KEJIBENXIAOCHUCANYUQITIDUIGELICEYAXITONGDEYINGXIANG，TIGAOCHUANGANQIDEJINGDUJIWENDINGXING。GUIYAZUYALICHUANGANQIBENSHENYOUYIGEGUYOUDETEXING，JIUSHIWENDUXISHUJIAODA，YINCIXUYAODUIQIJINXINGWENDUWUCHABUCHANG。CHANGYONGDEWENBUFANGSHISHIZAIYINGBIANDIANQIAOSHANGFUJIADIANZUWANGLUO，TONGGUOCESHIJIJISUANQIGAODIWENTEXING，QUEDINGWANGLUOZUZHI，YIDADAOWENDUBUCHANGDEMUDE。ZHEIZHONGCHUANGANQIDECELIANGYUANLISHIWAIJIEYALITONGGUOGUIYOUCHUANDIDAOMINGANXINPIANSHANG，ZAIYOUMINGANXINPIANCECHUYALI。RANER，ZAIKAOLVGUIYOUDEREPENGZHANGDEQINGKUANGSHI，TIANCHONGZAIQIANGTIZHONGDEGUIYOULIANGYINGJINKENENGDESHAO，FOUZE，GUIYOUZAIBUTONGWENDUXIADETIJIPENGZHANGJIANGHUIDUICELIANGYALIDAILAIJIAODADEWUCHA，ERQIEHENRONGYIYINQICHUANGANQIDEWENDUPIAOYI。

四、影响压力传感器性能关键因素分析

1、BUXIUGANGGELIMOPIAN

BUXIUGANGGELIMOPIANDESHEJIYUGUIMOPIANDESHEJIYIYANG，YAOQIUZAICELIANGYALIFANWEINEI，QIBIANXINGCHUZAIXIANDANXINGFANWEINEI。WEILETIGAOMOPIANDEBIANXINGLIANG，YOUNENGGOUZENGJIAQIXIANXINGFANWEI，RENMENTONGCHANGJIANGBUXIUGANGMOPIANSHEJICHENGBOWENZHUANG。BOZHUANGDEBOMOZAITONGYANGDEZAIHEXIAJINENGCHANSHENGJIAODADEBIANXING，YOUNENGZENGJIAXIANXINGFANWEI。ZHEIZHONGBOMODENAODUyYUYALIPDEGUANXIBIAODASHIWEI[2]：

QIZHONG

SHIZHONGqSHIBOMOBOXINGTEZHENGYINZI，DUIZHENGXIANBOXINGQIqWEI：

SHIZHONG，h＝MOPIANDEHOUDU，R＝MOPIANDEBANJING，s＝BOXINGHUZHANG；H＝BOXINGSHENDU；L＝BOXINGKONGJIANZHOUQI。DUIPINGDEBOMOq＝1，BOXINGDEJINGQUECHENGDUDUIqJIHUMEIYOUYINGXIANG，YINCIJUXINGBOXINGYIBANKEYONGXIANBOJINSI。TU4JICHULEBOWENPIANYANGPIN。

TU4 BOWENPIANYANGPIN

2、GELIBOWENMOPIANDEDANXINGMOXING

为了分析压力通过隔离薄膜的传递规律，我们对这种封装形式的传感器作如下假设，即假设硅油是不可压缩的，不锈钢膜片可看成周边固支的圆形薄膜，则压力通过硅油传递到硅薄膜将不引起任何附加损耗。简化模型如图5所示。因此，当外界作用在传感器上的压力为P时，压力通过不锈钢膜片再由硅油传递到硅压力芯片上，若不锈钢膜片的弹性反作用力为P_g硅的弹性反作用力为P_Si，则有：

TU5 GELIBOMOYALICHUANGANQIDANXINGJIANHUAMOXING

CIMOXINGZONGGANGDUXISHUWEI：1/k=1/K1+1/k2+1/k3，QIZHONGKWEIZONGGANGDUXISHU，K1、K2、K3FENBIEWEIXIUGANGMOPIANGANGDUXISHU、BOMODEGANGDUXISHU、GUIJIAODEGANGDUXISHU。XIANRANRUYAOYALIGENGHAODECHUANDIDAOXINPIANSHANG，XUANYONGDEBUXIUGANGMOPIANGANGDUXISHU、GUIBOMODEGANGDUXISHUQIYUEXIAOYUEHAO，JIBUXIUGANGGELIBOMODEBANJINGYUEDA、BOMOHOUDUYUEBO，YALIYUERONGYITONGGUOGUIYOUCHUANDIDAOGUIXINPIANSHANG，YALIDECHUANDISUNSHIYEYUEXIAO(TONGYANGYALICHANSHENGDERAODUYUEDA)。

3、GUIYOUDEWENDUTEXINGDUIYALICHUANGANQIXINGNENGDEYINGXIANG

任何液体的体积随温度变化将发生变化，硅油也不例外。硅油的热膨胀系数为（0.7～0.9）×10-²/℃，当传感器在－30～80℃温区工作时，全温区内封装壳体内硅油的体积变化量为8％～9％。当假设硅油为理想的不可压缩物质时，这一变化量是有规律的并可由隔离膜片在弹性范围内，在定标时进行修正。但如果硅油和工件净化不充分，硅油和传感器内混有空气、水分等可压缩易挥发的物质，那么硅油在全程温度工作范围内将无规律变化，而这一变化量在全密封的传感器室内形成的力就会作用在芯片上，使传感器的输出特性随环境温度而发生无规律的变化，这样传感器的温度特性和长期稳定性非常差，因此，在封装时要对硅油进行加热真空净化处理，并在真空环境下将硅油冲入压力传感器封装腔体里，净化加热温度为120℃，时间在半小时以上。此外，在焊接过程中，会引起硅油的分解或改变硅油的性能，这－问题在封装工艺的过程中应尽量避免。

五、封焊工艺研究

由于军事、工业用压力传感器的的使用温度范围一般在-40℃-125℃内，如果焊接时，高温时间过长，可能会造成敏感芯片损坏和硅油在高温下分解，所以要求焊接过程短，局部加热，焊缝位置符合气密检测标准（注：焊接需要在硅油中进行）。针对以上特点我们采用的是储能焊接工艺，焊接结构及焊接过程示意图如图6与图7所示：

(6）HANJIEJIEGOU                                                               (7)HANJIEGUOCHENGSHIYITU

WOMENFENBIEYONGDIANRONGCHUNENGHANHEZHONGPINZHILIUNIBIANSHICHUNENGHANDUICHUANGANQIYANGJIANJINXINGLEFENGHAN。DIANRONGCHUNENGHANDIANLIUJIAODA，HANHOUBIAOMIANWENDUGAOYUZHONGPINZHILIUNIBIANSHI，QIEQIGONGJIANBIAOMIANHANJIEXIAOGUOYOUMINGXIANYAHEN；ZHONGPINZHILIUNIBIANSHICHUNENGHAN（TU8）HANJIESHIJIANHENENGLIANGKEYIDIAOJIE，NENGGOUERCIFANGDIAN，HANJIEHOUBIAOMIANWENDU，QIXIANGJIAOYUJIAODIDIANRONGCHUNENGHANDEYALIJIAOXIAO，HANJIEHOUDEGONGJIANBIAOMIANYAHENBUMINGXIAN。

TU8 HANJIEXIANCHANG(ZHONGPINZHILIUNIBIANSHI)

CONGWOMENFENGZHUANGHAODEYALICHUANGANQIDECESHIQINGKUANGLAIKAN，LIANGZHONGHANJIEGUOCHENGDUICHUANGANQIDEMINGANXINPIANJIBENMEIYOUSUNSHANG，DOUNENGMANZUCHUANGANQIDEXINGNENGYAOQIU。TONGGUOCHUANGANQIDEFENGHANGUOCHENGYANJIUHEDUIFENGZHUANGHAODECHUANGANQICESHIQINGKUANGLAIKAN，KEYIDECHUYIXIAJIELUN：

1、CHUNENGHANKEYIZAIGUIYOUZHONGHANJIE；   

2、HANJIEGUOCHENGDIANLIU、WENDUBINGWEIDUIMINGANXINPIANZAOCHENGYINGXIANG；

3、焊接的密封能够达到气密检测要求，储能焊接能够满足扩散硅传感器不锈钢隔离膜片封装要求。 本文源自泽天传感，福彩快三，转载请注明出处！