一、溅射膜压力温度集成变送器项目研制背景、意义

CHUANGANJISHUSHIXINJISHUGEMINGHEXINXIJISHUDEZHONGYAOJISHUJICHU，SHIXINXIJISHUZHONGCAIJI、CHULI、CHUANBOSANDAGUANJIANJISHUZHIYI，SHEJIGUOMINJINGJI、GUOFANGKEYAN、BUDUIWUQIZHUANGBEIYANZHIHEBAOZHANGDEGEGELINGYU，GEFADAGUOJIADOUJIANGCHUANGANJISHUSHIWEIXIANDAIGAOJISHUFAZHANDEGUANJIAN，JIANGTAZUOWEIBENSHIJIZHONGDIANJISHUJIAYIFAZHAN。CHUANGANQIZAIJUNSHISHANGDEZUOYONGDEDAOSHIJIEGEGUODEZHONGSHI，XUQIUZHUNIANSHANGSHENG，YIMEIGUOWEILI，JUNSHISHANGYONGLAICEWENDU、YALIDENGWUZHONGZHUYAOCHUANGANQINIANPINGJUNZENGZHANGLVDA12%，YUEZHANCHUANGANQISHICHANGZONGEDE15%，1995NIANCHANZHI12.5YIMEIYUAN。QIZHONGWENDUCHUANGANQIYUYALICHUANGANQIDEYONGLIANGZUIDUO。

WENDUYUYALISHICHUANGANQIZHONGYINGYONGZUIGUANGFANDELIANGZHONG，ZAIHANGTIAN、HANGKONG、DAODAN、GELEIWUQIZHUANGBEIZHONGDOUXUYAODUIJIEZHIDEWENDUYUYALIJINXINGCELIANGYUKONGZHI。YIBANCESHIXITONGSHITONGGUOWENDUCHUANGANQIYUYALICHUANGANQILIANGGECHUANGANQIDUIZHEILIANGZHONGCANSHUTONGSHIJINXINGCELIANG。SUIZHEKEXUEJISHUDEFAZHAN，JICHENGHUA、ZHINENGHUASHICELIANGYIBIAOFAZHANDEQUSHI，CHUANGANQIJISHUYEZAIJICHENG、ZHINENGYUSHUZIHUASHANGDALIFAZHAN。YOUYUDUITONGDIANJIEZHIWENDUYUYALITONGSHICELIANGDECHANGHEXIANGDANGDUO，JIANGYALIYUWENDUCELIANGJINXINGJICHENG，YOUTONGYICHUANGANQISHIXIAN，JIANHUAANZHUANGYUDIAOSHI，JUYOUGUANGFANDEJUNSHIYINGYONGQIANJING。

GUOWAINENGTONGSHICELIANGWENDUYALIDECHUANGANQI，BUFENCHANPINDEWENDUSHITONGGUODIANLUZHONGJICHENGXINPIANDUIHUANJINGWENDUDEYIGECELIANG，ZHEIZHONGCELIANGFANGSHIBUNENGZHUNQUEFANYINGYINYADUANJIEZHIDEWENDU，ZHISHIJIYALICHUANGANQITIGONGYIGEWENDUBUCHANGCANKAO；BUFENZAIYALICHUANGANQINEIZHIYIGEREDIANOUHUOBODIANZUWENDUCHUANGANQI，DANSHOUFENGZHUANGDEYINGXIANG，ZUIGAOLIANGCHENGZHINENGZUODAO25MPaZUOYOU，MEIGUOGONGSIDEWENDUYALIJICHENGCHUANGANQICHANPINWAICAIYONGDESHIBODIANZUWENDUCHUANGANQI，SHUCHUBIAOZHUNDIANZUZHI。

XINWENDUYALIJICHENGCHUANGANQIDEYANJIUZHUYAOSHIJIANGCEYAYUCEWENDEMINGANJIANZAITONGYIGUIBEISHANGJICHENG，LIYONGYAZUSHIHUODIANRONGSHICELIANGYALI，CAIYONGBANDAOTIERJIGUANCELIANGWENDU，ZHEIHAICHUYUYANZHIJIEDUAN。GUONEIXIANYOUDEYALI、WENDUJICHENGDECHUANGANQICAIYONGREDIANOU、REDIANZUCEWEN，CAIYONGYAZUHUOYINGBIANCELIANGYALI，TONGGUOLIANGGEJIEKOULIANJIE，SHUCHUXINHAOZAIJIECHULIDIANLU，CHULIDIANLUYUCELIANGDIANFENKAI，ZHEIZHONGFANGSHIDEJICHENGDUBUGAO，JIEGOUBUJINCOU。

DUIYUYANKUDEZHANCHANGHUANJING，JUNYONGCHUANGANQIDEKANGHUANJINGXINGNENGYAOQIUGAO，DUIGONGZUODEKEKAOXINGYAOQIUGAO，YAOQIUWEIJIEGOU，YAOQIUXINHAOBIAOZHUNHUAYIYUCAIJI、KONGZHIYUCHULI。ZAIGAOZHENDONG、CHONGJI、FENCHEN、SUANJIANDENGELIEHUANJINGXIA，REDIANOU、REDIANZUJIERCIYIBIAOZAICELIANGJINGDUYUCELIANGKEKAOXINGSHANGDOUJIANGSHOUDAOYINGXIANG。

BANDAOTICHUANGANQI，JUYOUTIJIXIAO、ZHONGLIANGQING、GONGYICHENGBENJIAODIDENGTEDIAN，ZAIWUQIZHUANGBEIZHONGYINGYONGGUANGFAN，GUONEIYOUYINJINXINPIANDESHENGCHANCHANG，ZIXINGYANZHIDEGONGYISHUIPINGJIAODI，WUFAPILIANGSHENGCHAN。BANDAOTICHUANGANQIDUIWENDUJIAOMINGAN，BUNAIFUSHI，DADUOSHUCELIANGCHANGSUOYINGYONGDECHANPINMIFENGQIANGHECHONGYOUQIANG，YINCIKANGZHENDONG、CHONGJIHENAIGAO、DIWENXINGNENGYOUXIAN。

ZAI20SHIJI80NIANDAIZHIHOU，DEGUO、ELUOSIDENGGUOYEXIANGJIKAIFACHULIYONGCIKONGJIANSHEDENGFANGFAZHIZAODEJIANSHEMOCHUANGANQI，TADEYOULIANGXINGNENGTUXIANCHULAI，DEDAOLESHIJIYINGYONG。MUQIAN，GAILEICHUANGANQIZHUYAOYONGYUJUNSHI、HEGONGYE、YOUJINGDENGELIEHUANJINGXIADEYALICESHI。LIRUMEIGUOYONGYUABOLUOFEICHUAN、VikingHUOXINGTANCEQI（CECGONGSICHAN1000-02XING）,ELUOSIYONGYULIANMENGHAOFEICHUANHEBAOFENGXUE-NENGYUANHAOHANGTIANFEIJI（BENSAYANJIUSUOCHANBT-212XING）,FAGUOYONGYUADIYANAⅣHAOHEⅤHAOYUNZAIHUOJIAN（FagorGONGSICHAN27 NXING），JINVikingHUOXINGTANCEQIJIUSHIYONGLECHUANGANQI8000ZHI，QIZHONGWENDUHEYALICELIANGDIANZUIDUO。

YOUYUJIANSHEMOCHUANGANQIDEDANXINGMINGANCAILIAOYOUNAIFUSHIBUXIUGANGZHICHENG，KEZHIJIEYUFUSHIXINGJIEZHIJIECHU。JIANSHEMOCHUANGANQIDEMINGANDIANZUSHIHEJINCAILIAO，SHOUWENDUDEYINGXIANGJIXIAO，ZAI-100℃～+250℃FANWEINEIDEWENDUPIAOYIXIAOYU50ppm/℃。TONGGUOXIANJINDELIZISHUDUMOJISHU，ZHIBEIDEJIANSHEMOREDIANZU，NENGZAIZHONG、DIWENQUZHUNQUECELIANG。TONGGUOLIZIJIANSHEYULIZIKESHI，JIANGREDIANZUYUYINGBIANDIANZUZHIBEIZAITONGYIXINPIANSHANG，JINXINGWENDU、YALIDECELIANG，KEYISHIXIANCHUANGANQIDEGAODUJICHENG。ZHEIZHONGYITIHUACHUANGANQITONGGUOYIGEJIEKOUCELIANGLIANGZHONGCANSHU，XINHAOHUBUGANRAO，SHUCHUBIAOZHUNDEXINHAO，WUXUWAIJIEYIBIAO，CELIANGJINGDUGAO，XINGNENGYOUYUE，SHIJUNYONGWENDUYALICHUANGANQIDEFAZHANFANGXIANG。ZIZHUKAIFAHESHENGCHANGAOJINGDUDEJIANSHEMOWENDUYALIJICHENGCHUANGANQI，BAOZHENGJUNSHISHANGDEKEKAOYINGYONG，DAPOGUOWAIJISHUDEFENGSUO，JUYOUZHONGYAOJUNSHIYIYI。

二、项目研制的主要内容

(YI)YANJIUMUBIAO    BENXIANGMUDEYANJIUMUBIAOSHI:TONGGUODUILIZISHUJIANSHEDUMO、LIZISHUJIANSHEKESHIDENGGONGYIJINXINGYANJIU，JIANGJIANSHEMOYINGBIANDIANZUYUREDIANZUZAITONGYIMINGANXINPIANSHANGJINXINGJICHENG，YANZHIYIZHONGXINXINGDEJIANSHEMOYALIWENDUJICHENGCHUANGANQI，TONGSHIZHUNQUECELIANGJIEZHIDEWENDUYUYALI。XINXINGJIANSHEMOWENDUYALIJICHENGCHUANGANQIJUYOUXIANGYINGKUAI、CELIANGJINGDUGAO、WENDINGXINGHAO、KANGZHENDONG、CHONGJINENGLIQIANGDENGYOUDIAN，MANZUHANGKONG、HANGTIAN、JUNSHIZHUANGBEI、ZHANCHANGHUANJINGDENGFANGMIANDEYINGYONG。

(ER)JISHUZHIBIAO   JIANSHEMOWENDUYALIYITIHUABIANSONGQIZHUYAOSHIXIANYIXIAJISHUZHIBIAO；  CELIANGYALIFANWEI：    0～60MPa；  CELIANGWENDUFANWEI：   -50℃～150℃；  WENDUCELIANGJINGDU：    0.1℃；  YALICELIANGJINGDU：     0.1JI。

(SAN)YANJIUNEIRONG    ZHIZUOFUHEJIDINGXINGNENGDEJUNYONGJIANSHEMOWENDUYALIJICHENGCHUANGANQI，ZHONGDIANZAIGONGYIYANJIU，BENXIANGMUZHUYAOYANJIUNEIRONGRUXIA：

1．MINGANYUANJIANBANTUDESHEJI

YAOGENJUDUIWENDUYUYALIDEBUTONGCELIANGYAOQIU，XUANYONGBUTONGCAILIAO，LIYONGBUTONGDEYUANLILAISHIXIANWENDUYUYALIZAITONGYIXINPIANSHANGDEJICHENGCESHI。YINGBIANDIANZUYAOHUODEGAODEYINGBIANXISHU、DIDEWENDUMINGANXING，ERREDIANZUYAOYOUGAODEWENDULINGMINDUDANDUIYALIBUMINGAN，ZHEIXUYAOJIEHECHENGMODEGONGYICANSHUJINXINGGONGYISHIYAN，ZAITONGYIMINGANXINPIANSHANGZUOCHUHELIDEBANTUSHEJI。

2．LIZISHUJIANSHEDUMODEGONGYIYANJIU

ZHIZUOXINXINGDEJIANSHEMOWENDUYALIJICHENGBIANSONGQI，JIANSHEMODEZHILIANGZHIGUANZHONGYAO。CAIYONGXIANJINDELIZISHUDUMOJISHU，KEYIHUODEXINGNENGYOUYUEDEJUEYUANMOYUDIANZUMO。ZAIGONGYIYANJIUZHONG，YAOTONGGUOGONGYISHIYAN，ZHAODAOJIANDUGEZHONGJIANSHEMODEZUIJIAGONGYICANSHU，BAOZHENGJIANSHEMOWENDUYALIJICHENGBIANSONGQIDEJUEYUANXINGNENGYUWENDINGXINGNENGMANZUXIANGMUYAOQIU。

3．LIZISHUKESHIDEGONGYIYANJIU

ZAIJIDICAILIAOSHANGJIANGJIANDUREDIANZUMOYUHEJINDIANZUMOLIANGZHONGBUTONGCAIZHIDEJIANSHEMO，TONGGUOKESHIGONGYIXINGCHENGLIANGZHONGZHATIAODIANZU。CAIYONGXIANJINDELIZISHUJIANSHEKESHIJISHU，BIMIANSHIFAKESHIDEGUYOUQUEXIAN，BAOZHENGJIANSHEMODIANZUDEJUNYUNXING，CONGERBAOZHENGDIANZUMOQIAOLUDEPIPEI。

4．JIANSHEMODIANZUDEWENDINGXINGCHULIGONGYIYANJIU

YAOHUODEGAOKEKAO、GAOJINGDUDECHANPIN，DIANZUDEWENDINGXINGHEKEKAOXINGSHIJICHU。CHULEDUMO、KESHIGONGYIWAI，DUIDIANZUMODEHOUQIWENDINGXINGCHULIYESHIGUANJIAN。TONGGUOCAIQUYIXILIEDEWENDINGXINGCHULICUOSHI，RURECHULI、MOBIAOMIANBAOHUCHULI、LAOHUACHULIDENG，SHIJIANSHEMODIANZUDEWENDUXISHUGENGJIAWENDINGBINGYOUGAODEXIANXINGDU，SHIMODIANZUCAILIAODEZUZHIZAICEWENFANWEINEIJUYOUGAOWENDINGXING。

5．CHUANGANQIDEBUCHANGGONGYIYUXINHAODIAOLI

TONGYICHUANGANQICELIANGWENDUYUYALI，XUYAODUILIANGLUXINHAOJINXINGBUCHANGYUFANGDA。ZAIXIANYOUDEYALICHUANGANQIDEJICHUSHANG，BUCHANGYUXINHAODIAOLIJISHUYICHENGSHU，ZHIYAOZHENDUIWENDUCELIANGDETEDIAN，ZHONGXINSHEJIDIANLUDUIWENDUCHUANGANQIXINHAOJINXINGBUCHANGYUFANGDA。ZAIDIANLUDESHEJIGUOCHENGZHONG，ZHUYAOKAOLVDESHIJIANSHAOHUANJINGWENDUDUICELIANGDEYINGXIANG，BAOZHENGJIEZHIWENDUCELIANGDEZHUNQUEXING。ZHEIXUYAOJIEHEJIEGOUSHEJI、BANTUSHEJIJINXING。

三、项目研制方案、技术难度、解决途径

(YI)ZONGTISHEJIFANGAN

1、JIANSHEMOYALIWENDUYITIHUABIANSONGQIGONGZUOYUANLISHEJI：WENDUYALIYITIHUABIANSONGQISHIZAITONGYIXINPIANSHANGSHIXIANYALIYUWENDUDETONGSHICELIANG，SHUCHULIANGGEBIAOZHUNXINHAO。YALICELIANGYUANLISHICAIYONGXIANJINDELIZISHUJIANSHEDUMOJISHU，ZAIYUANXINGPINGMOPIANDEYINGBIANQUJIANSHESIGEJIANSHEMOHEJINDIANZU，LIANJIECHENGWheastoneQUANQIAOYINGBIANDIANLU，TONGGUOMOPIANDEXINGBIANJIANGYALIZHUANHUANCHENGHEJINMODIANZUZUZHIDEBIANHUA，CONGERSHUCHUYIGEYUSUOSHOUYALIZHICHENGXIANXINGDEBIAOZHUNDIANXINHAO。WENDUCELIANGYUANLISHITONGGUOLIZISHUJIANSHEDUMOJISHUZAIPINGMOPIANDEFEIYINGBIANQUJIANSHEYIGEBIAOZHUNDEREDIANZU，JIANGSUOCEYETI、QITIDEWENDUTONGGUOPINGMOPIANDECHUANDAOZHUANHUANWEIREDIANZUZUZHIDEBIANHUA，TONGGUOXINHAODIAOLISHUCHUYIGEYUWENDUCHENGXIANXINGDEBIAOZHUNDIANXINHAO。

2、JIANSHEMOYALIWENDUYITIHUABIANSONGQIDECELIANGQIAOLUSHEJI：ZAIBENXIANGMUZHONG，REDIANZUCAILIAOXUANYONG99.9%DEBOJIN，ZAIBANTUSHANGSHEJI2GE1000ΩZUOYOUDEBOJINDIANZU，ZAIYUJINGMIJINSHUMODIANZUPEICHENGSHURUSHUCHUZUKANGWEI2KΩDEDIANQIAOQIAOLU，JIANGWENDUXINHAOZHUANHUANCHENGDIANXINHAOSHUCHU。CELIANGYALIDEJIANSHEMOYINGBIANDIANZUSHIGENJUDIANZUDEXINGBIANLAICELIANGYALIZHI，WEIHUODEJINKENENGGAODEYINGBIANLINGMINDU，YINGBIANDIANZUYAOCHUYUXINPIANDEZUIDAYINGBIANQU，ERQIECAIYONGQUANQIAOYINGBIANDIANLU。ZHEIZHONGQIAOLUZAIBANTUSHEJISHIDAIRUJIANSHEMODIANZUDELINGDIANBUCHANG，JIANSHEMOQIAOLUBENSHENJUYOUWENDUZIBUCHANGXING，CELIANGJIEZHIWENDUYUDIANLUHUANJINGWENDUDUICELIANGYALIJIEGUOYINGXIANGFEICHANGXIAO，BAOZHENGCEYADEZHUNQUEXING。

(ER)JISHUNANDU

1、JIANSHEMODEZHIBEIGONGYI：XINXINGDEJIANSHEMOWENDUYALIJICHENGBIANSONGQI，YAOQIUZAIELIEHUANJINGZHONGZHANGQIWENDINGKEKAOGONGZUO，YINCIZHIBEIGAOWENDINGXINGDEJIANSHEMODIANZUSHIYANJIUDENANDIAN。JIANSHEMODEXINGNENGYAO“ZAIXIAN”YUANCAIDEXINGNENG，HAIYAOJUBEIJIANSHEMOCAILIAODEYOUDIAN。JIANSHEMODIANZUZAIZHIZUOGONGYIGUOCHENGZHONG，YAOJINLIANGQUCHUHUOJIANSHAOCHANZA、WURAN、YANGHUADENGBULIYINSU，YAOBAOZHENGMOCENGDEZHIMIDU，BAOZHENGXIANGTONGGONGYICANSHUXIADIANZUMODEDIANZUXINGNENGYUWENDUXINGNENGDEYIZHIXING，BAOZHENGJIANSHEMODIANZUDEZHANGQIDIANWENDINGXING。

2、DUMO、GUANGKEDEGONGYILIUCHENGSHEJI：ZAIBENXIANGMUDEYANJIUZHONG，YAOQIUZHIBEIDEGONGNENGJIANSHEMODUO，WEILEBAOZHENGCHANPINDEGAOJUEYUANCHENGDUYUNAIYACHENGDU，JUEYUANMOCAIYONGSHUANGCENGJUEYUANMOXINGSHI。DUIREDIANZUMOYUHEJINDIANZUMO，WENDINGXINGCHULIGONGYIYEBUXIANGTONG。MOCENGDUO、KESHIDUO，JICHENGCHUANGANQIGONGYIFUZA，RUHEZAIBAOZHENGZHILIANGDEQIANTIXIA，ZAIGONGYISHANGSHIXIANDUOCENGMODEJIANDU、KESHIYUYOUXIAORECHULI，SHIJIANSHEMOWENDUYALIJICHENGCHUANGANQIDEGONGYINANDIAN。

(SAN)JISHUTUJING

泽天传感已有较成熟的溅射膜制备技术，研制、开发了多种溅射膜压力传感器，对多种金属材料如铜、金、镍等的温度性能有一定的研究，在此基础上进行溅射膜热电阻的研究，实现温度压力的集成测量，在技术上是切实可行的。通过以下技术途径，取得工艺、设计上的突破，实现该项目的目标要求，制作高稳定性的溅射膜温度压力集成变送器。

1．MINGANYUANJIANBANTUDESHEJI：YIBANDEREDIANZUCHUANGANQIDOUZHIZUOBIAOZHUNDEDIANZU，DUIZUZHIDEZHUNQUEXINGYAOQIUGAO，ZHATIAODEXINGZHUANGYAOJIEHEJIANSHEMOHOUDU、DIANZUZHIDAXIAO、GONGYISHANGDEKESHIXIANXINGDENGLAISHEJI。YINGBIANDIANZUFENBIEFENBUYUZHENGFUYINGBIANZUIDAQUYU。WEILEBAOZHENGREDIANZUZUZHIDEJINGQUEYUHEJINDIANZUQIAOLUDEPIPEI，ZAIBANTUDESHEJIZHONGHAIYAODAIRUJIANSHEMOCHUBUBUCHANGDIANZU，TONGSHIYAOSHEJIJIGUANGDIAOZUDEWEIZHI。

2．GONGYISHEJI

2.1 GONGYILIUCHENGSHEJI：WENDUYALIJICHENGBIANSONGQIZHONGYOULIANGZHONGDIANZUMO，YAOBAOZHENGGECENGMODEGONGYIZHIJIANBUHUXIANGGANRAO，YAODUIJIANSHEMODECHENGMOGONGYIGUOCHENGJINXINGSHEJI。ZAIQUEDINGHAOGONGYISHUNXUHOU，JIUYAODUIMEIYIBUJUTIDEGONGYIGUOCHENGJINXINGSHIYAN，XUNZHAOZUIJIACANSHUGONGYICANSHU。

2.2 LIZISHUJIANSHEDUMODEGONGYIYANJIU：ZAIBENXIANGMUDEYANJIUZHONG，XUANYONGLIZISHUJIANSHEDUMOJISHULAIJINXINGGEZHONGGONGNENGMODEJIANDU。LIZISHUDUMODEXINGNENGYUJIANSHEBACAIDEXINGNENGJIBENYIZHI，MOCENGDEWENDINGXINGHAO。YAOZHIZAOHAOJIANSHEMOCHUANGANQI，JIUBIXUDUIZHUYAODEGONGNENGMODEGONGYIYIYIJINXINGYANJIU。JIANSHEMOHOUDUBUYIYANG，CHENGMODEJIEJINGGUOCHENGBUYIYANG，MOCENGDEXINGNENGYEJIUYOUCHABIE。MOHOUDADAOYIDINGCHENGDU，JIANSHECAILIAOCHENGFENDEXIWEIBIANHUA、MOCENGZAZHI、GUANGKEFUSHIGUOCHENGZHONGDECHAYIDENGDUIDIANZUZUZHIDEYINGXIANGJIUHUIJIANXIAO，ZHEIXIEDOUYOULIYUJIANSHEMODIANZUWENDUXISHUDEYIZHIXINGYUZUZHIDEJUNYUNXING。

2.3LIZISHUKESHIDEGONGYIYANJIU：WENDUYALIJICHENGCHUANGANQIXUYAOZAITONGYIJIDISHANGJIANSHEERZHONGBUTONGCAIZHIDEJINSHUMO，HUODELIANGZHONGCAILIAODEZHATIAODIANZU。LIZISHUKESHIJINGDUGAO，DUIGEZHONGCAILIAODEMOCENGDOUSHIYONG。WANCHENGDUMOHOU，DUIYINGXIANGYINGDEDIANZUMOJINXINGZHATIAOXINGZHUANGDEPUGUANG、TUJIAO，RANHOUZAICAIYONGLIZISHUKESHIJISHU，DUIBUXUBAOLIUDEDIANZUMOYONGLIZISHUHONGJIDIAO。LIZISHUKESHITIGAOLEKESHIJINGDU，BAOZHENGLEDIANZUMODEZHILIANGYUZUZHIDEJUNYUNXING。

2.4 JIANSHEMODIANZUDEWENDINGXINGCHULIGONGYI：JIANSHEMODIANZUDEWENDINGXINGXINGCHULIBAOHANLIANGGEFANGMIAN，YISHIWENDUXISHUDEWENDINGXING，HAIYOUYIGESHIDIANZUZUZHIDEWENDINGXING。WEIJINGCHULIDEJIANSHEMODIANZUXINGNENGBUWENDING，DIANZUZHIRONGYIFASHENGPIAOYI，WENDUXISHUYEBIBIAOCHENGZHIXIAO。

3CHUANGANQIDEBUCHANGGONGYIYUXINHAODIAOLI：YOUYUGONGYIWUCHADECUNZAI，MEICIDUMOREDIANZUZUZHIBUKENENGWANQUANYIZHI，TONGYIXINPIANSHANGDESIGEYINGBIANDIANZUZUCHENGDEQIAOLUYEBUNENGWANQUANPIPEI，ZHEIXUYAODUIJIANSHEMODIANZUZUZHIJINXINGXIUZHENGHEBUCHANGQIAOLU。WEIBAOZHENGQIAOLUDEPIPEIXING，ZAISHEJIZHATIAODIANZUDETONGSHI，DAIRUYIXILIEJIANSHEMOBUCHANGDIANZU，TONGGUOBUCHANGZUZHIDEXUANQULAIDADAOLINGDIANDECHUBUBUCHANG。WEIBAOZHENGXINHAODEYUANJULICHUANSHUHUOSHUZIHUACHULI，SHEJIXINHAODIAOLIDIANLUDUIYINGBIANYALIXINHAOYUREDIANZUWENDUXINHAOJINXINGDIAOLI，ZHUANHUANCHENGBIAOZHUNDE0～5VSHUCHU。ZAIDIANLUDESHEJISHANG，CANKAOLEZETIANCHUANGANYUANYOUDECHENGSHUDIANLU，ZHEZHONGKAOLVKANGGANRAOXINGNENG。

通过以上技术途径进行工艺研究，可以获得高性能的溅射膜，制作出新型的溅射膜温度压力集成传感器。溅射膜温度压力集成传感器响应速度快，测试精度高，稳定性能好，而且抗环境性能强，适合各种恶劣环境领域的压力温度测量。在溅射膜压力传感器与温度传感器的技术基础上，研究开发新型的溅射膜温度压力集成变送器，为军事领域提供高可靠性、高稳定性的军用传感器，对我国国防事业的发展有重大的意义。本文源自泽天传感，福彩快三，转载请保留出处。