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泽天溅射膜压力温度集成变送器项目研制方案

发布时间:2020-8-6      发布人:泽天传感      点击:

一、溅射膜压力温度集成变送器项目研制背景、意义

CHUANGANJISHUSHIXINJISHUGEMINGHEXINXIJISHUDEZHONGYAOJISHUJICHU,SHIXINXIJISHUZHONGCAIJI、CHULI、CHUANBOSANDAGUANJIANJISHUZHIYI,SHEJIGUOMINJINGJI、GUOFANGKEYAN、BUDUIWUQIZHUANGBEIYANZHIHEBAOZHANGDEGEGELINGYU,GEFADAGUOJIADOUJIANGCHUANGANJISHUSHIWEIXIANDAIGAOJISHUFAZHANDEGUANJIAN,JIANGTAZUOWEIBENSHIJIZHONGDIANJISHUJIAYIFAZHAN。CHUANGANQIZAIJUNSHISHANGDEZUOYONGDEDAOSHIJIEGEGUODEZHONGSHI,XUQIUZHUNIANSHANGSHENG,YIMEIGUOWEILI,JUNSHISHANGYONGLAICEWENDU、YALIDENGWUZHONGZHUYAOCHUANGANQINIANPINGJUNZENGZHANGLVDA12%,YUEZHANCHUANGANQISHICHANGZONGEDE15%,1995NIANCHANZHI12.5YIMEIYUAN。QIZHONGWENDUCHUANGANQIYUYALICHUANGANQIDEYONGLIANGZUIDUO。

WENDUYUYALISHICHUANGANQIZHONGYINGYONGZUIGUANGFANDELIANGZHONG,ZAIHANGTIAN、HANGKONG、DAODAN、GELEIWUQIZHUANGBEIZHONGDOUXUYAODUIJIEZHIDEWENDUYUYALIJINXINGCELIANGYUKONGZHI。YIBANCESHIXITONGSHITONGGUOWENDUCHUANGANQIYUYALICHUANGANQILIANGGECHUANGANQIDUIZHEILIANGZHONGCANSHUTONGSHIJINXINGCELIANG。SUIZHEKEXUEJISHUDEFAZHAN,JICHENGHUA、ZHINENGHUASHICELIANGYIBIAOFAZHANDEQUSHI,CHUANGANQIJISHUYEZAIJICHENG、ZHINENGYUSHUZIHUASHANGDALIFAZHAN。YOUYUDUITONGDIANJIEZHIWENDUYUYALITONGSHICELIANGDECHANGHEXIANGDANGDUO,JIANGYALIYUWENDUCELIANGJINXINGJICHENG,YOUTONGYICHUANGANQISHIXIAN,JIANHUAANZHUANGYUDIAOSHI,JUYOUGUANGFANDEJUNSHIYINGYONGQIANJING。

GUOWAINENGTONGSHICELIANGWENDUYALIDECHUANGANQI,BUFENCHANPINDEWENDUSHITONGGUODIANLUZHONGJICHENGXINPIANDUIHUANJINGWENDUDEYIGECELIANG,ZHEIZHONGCELIANGFANGSHIBUNENGZHUNQUEFANYINGYINYADUANJIEZHIDEWENDU,ZHISHIJIYALICHUANGANQITIGONGYIGEWENDUBUCHANGCANKAO;BUFENZAIYALICHUANGANQINEIZHIYIGEREDIANOUHUOBODIANZUWENDUCHUANGANQI,DANSHOUFENGZHUANGDEYINGXIANG,ZUIGAOLIANGCHENGZHINENGZUODAO25MPaZUOYOU,MEIGUOGONGSIDEWENDUYALIJICHENGCHUANGANQICHANPINWAICAIYONGDESHIBODIANZUWENDUCHUANGANQI,SHUCHUBIAOZHUNDIANZUZHI。

XINWENDUYALIJICHENGCHUANGANQIDEYANJIUZHUYAOSHIJIANGCEYAYUCEWENDEMINGANJIANZAITONGYIGUIBEISHANGJICHENG,LIYONGYAZUSHIHUODIANRONGSHICELIANGYALI,CAIYONGBANDAOTIERJIGUANCELIANGWENDU,ZHEIHAICHUYUYANZHIJIEDUAN。GUONEIXIANYOUDEYALI、WENDUJICHENGDECHUANGANQICAIYONGREDIANOU、REDIANZUCEWEN,CAIYONGYAZUHUOYINGBIANCELIANGYALI,TONGGUOLIANGGEJIEKOULIANJIE,SHUCHUXINHAOZAIJIECHULIDIANLU,CHULIDIANLUYUCELIANGDIANFENKAI,ZHEIZHONGFANGSHIDEJICHENGDUBUGAO,JIEGOUBUJINCOU。

DUIYUYANKUDEZHANCHANGHUANJING,JUNYONGCHUANGANQIDEKANGHUANJINGXINGNENGYAOQIUGAO,DUIGONGZUODEKEKAOXINGYAOQIUGAO,YAOQIUWEIJIEGOU,YAOQIUXINHAOBIAOZHUNHUAYIYUCAIJI、KONGZHIYUCHULI。ZAIGAOZHENDONG、CHONGJI、FENCHEN、SUANJIANDENGELIEHUANJINGXIA,REDIANOU、REDIANZUJIERCIYIBIAOZAICELIANGJINGDUYUCELIANGKEKAOXINGSHANGDOUJIANGSHOUDAOYINGXIANG。

BANDAOTICHUANGANQI,JUYOUTIJIXIAO、ZHONGLIANGQING、GONGYICHENGBENJIAODIDENGTEDIAN,ZAIWUQIZHUANGBEIZHONGYINGYONGGUANGFAN,GUONEIYOUYINJINXINPIANDESHENGCHANCHANG,ZIXINGYANZHIDEGONGYISHUIPINGJIAODI,WUFAPILIANGSHENGCHAN。BANDAOTICHUANGANQIDUIWENDUJIAOMINGAN,BUNAIFUSHI,DADUOSHUCELIANGCHANGSUOYINGYONGDECHANPINMIFENGQIANGHECHONGYOUQIANG,YINCIKANGZHENDONG、CHONGJIHENAIGAO、DIWENXINGNENGYOUXIAN。

ZAI20SHIJI80NIANDAIZHIHOU,DEGUO、ELUOSIDENGGUOYEXIANGJIKAIFACHULIYONGCIKONGJIANSHEDENGFANGFAZHIZAODEJIANSHEMOCHUANGANQI,TADEYOULIANGXINGNENGTUXIANCHULAI,DEDAOLESHIJIYINGYONG。MUQIAN,GAILEICHUANGANQIZHUYAOYONGYUJUNSHI、HEGONGYE、YOUJINGDENGELIEHUANJINGXIADEYALICESHI。LIRUMEIGUOYONGYUABOLUOFEICHUAN、VikingHUOXINGTANCEQI(CECGONGSICHAN1000-02XING),ELUOSIYONGYULIANMENGHAOFEICHUANHEBAOFENGXUE-NENGYUANHAOHANGTIANFEIJI(BENSAYANJIUSUOCHANBT-212XING),FAGUOYONGYUADIYANAⅣHAOHEⅤHAOYUNZAIHUOJIAN(FagorGONGSICHAN27 NXING),JINVikingHUOXINGTANCEQIJIUSHIYONGLECHUANGANQI8000ZHI,QIZHONGWENDUHEYALICELIANGDIANZUIDUO。

YOUYUJIANSHEMOCHUANGANQIDEDANXINGMINGANCAILIAOYOUNAIFUSHIBUXIUGANGZHICHENG,KEZHIJIEYUFUSHIXINGJIEZHIJIECHU。JIANSHEMOCHUANGANQIDEMINGANDIANZUSHIHEJINCAILIAO,SHOUWENDUDEYINGXIANGJIXIAO,ZAI-100℃~+250℃FANWEINEIDEWENDUPIAOYIXIAOYU50ppm/℃。TONGGUOXIANJINDELIZISHUDUMOJISHU,ZHIBEIDEJIANSHEMOREDIANZU,NENGZAIZHONG、DIWENQUZHUNQUECELIANG。TONGGUOLIZIJIANSHEYULIZIKESHI,JIANGREDIANZUYUYINGBIANDIANZUZHIBEIZAITONGYIXINPIANSHANG,JINXINGWENDU、YALIDECELIANG,KEYISHIXIANCHUANGANQIDEGAODUJICHENG。ZHEIZHONGYITIHUACHUANGANQITONGGUOYIGEJIEKOUCELIANGLIANGZHONGCANSHU,XINHAOHUBUGANRAO,SHUCHUBIAOZHUNDEXINHAO,WUXUWAIJIEYIBIAO,CELIANGJINGDUGAO,XINGNENGYOUYUE,SHIJUNYONGWENDUYALICHUANGANQIDEFAZHANFANGXIANG。ZIZHUKAIFAHESHENGCHANGAOJINGDUDEJIANSHEMOWENDUYALIJICHENGCHUANGANQI,BAOZHENGJUNSHISHANGDEKEKAOYINGYONG,DAPOGUOWAIJISHUDEFENGSUO,JUYOUZHONGYAOJUNSHIYIYI。

二、项目研制的主要内容

(YI)YANJIUMUBIAO    BENXIANGMUDEYANJIUMUBIAOSHI:TONGGUODUILIZISHUJIANSHEDUMO、LIZISHUJIANSHEKESHIDENGGONGYIJINXINGYANJIU,JIANGJIANSHEMOYINGBIANDIANZUYUREDIANZUZAITONGYIMINGANXINPIANSHANGJINXINGJICHENG,YANZHIYIZHONGXINXINGDEJIANSHEMOYALIWENDUJICHENGCHUANGANQI,TONGSHIZHUNQUECELIANGJIEZHIDEWENDUYUYALI。XINXINGJIANSHEMOWENDUYALIJICHENGCHUANGANQIJUYOUXIANGYINGKUAI、CELIANGJINGDUGAO、WENDINGXINGHAO、KANGZHENDONG、CHONGJINENGLIQIANGDENGYOUDIAN,MANZUHANGKONG、HANGTIAN、JUNSHIZHUANGBEI、ZHANCHANGHUANJINGDENGFANGMIANDEYINGYONG。

(ER)JISHUZHIBIAO   JIANSHEMOWENDUYALIYITIHUABIANSONGQIZHUYAOSHIXIANYIXIAJISHUZHIBIAO;  CELIANGYALIFANWEI:    0~60MPa;  CELIANGWENDUFANWEI:   -50℃~150℃;  WENDUCELIANGJINGDU:    0.1℃;  YALICELIANGJINGDU:     0.1JI。

(SAN)YANJIUNEIRONG    ZHIZUOFUHEJIDINGXINGNENGDEJUNYONGJIANSHEMOWENDUYALIJICHENGCHUANGANQI,ZHONGDIANZAIGONGYIYANJIU,BENXIANGMUZHUYAOYANJIUNEIRONGRUXIA:

1.MINGANYUANJIANBANTUDESHEJI

YAOGENJUDUIWENDUYUYALIDEBUTONGCELIANGYAOQIU,XUANYONGBUTONGCAILIAO,LIYONGBUTONGDEYUANLILAISHIXIANWENDUYUYALIZAITONGYIXINPIANSHANGDEJICHENGCESHI。YINGBIANDIANZUYAOHUODEGAODEYINGBIANXISHU、DIDEWENDUMINGANXING,ERREDIANZUYAOYOUGAODEWENDULINGMINDUDANDUIYALIBUMINGAN,ZHEIXUYAOJIEHECHENGMODEGONGYICANSHUJINXINGGONGYISHIYAN,ZAITONGYIMINGANXINPIANSHANGZUOCHUHELIDEBANTUSHEJI。

2.LIZISHUJIANSHEDUMODEGONGYIYANJIU

ZHIZUOXINXINGDEJIANSHEMOWENDUYALIJICHENGBIANSONGQI,JIANSHEMODEZHILIANGZHIGUANZHONGYAO。CAIYONGXIANJINDELIZISHUDUMOJISHU,KEYIHUODEXINGNENGYOUYUEDEJUEYUANMOYUDIANZUMO。ZAIGONGYIYANJIUZHONG,YAOTONGGUOGONGYISHIYAN,ZHAODAOJIANDUGEZHONGJIANSHEMODEZUIJIAGONGYICANSHU,BAOZHENGJIANSHEMOWENDUYALIJICHENGBIANSONGQIDEJUEYUANXINGNENGYUWENDINGXINGNENGMANZUXIANGMUYAOQIU。

3.LIZISHUKESHIDEGONGYIYANJIU

ZAIJIDICAILIAOSHANGJIANGJIANDUREDIANZUMOYUHEJINDIANZUMOLIANGZHONGBUTONGCAIZHIDEJIANSHEMO,TONGGUOKESHIGONGYIXINGCHENGLIANGZHONGZHATIAODIANZU。CAIYONGXIANJINDELIZISHUJIANSHEKESHIJISHU,BIMIANSHIFAKESHIDEGUYOUQUEXIAN,BAOZHENGJIANSHEMODIANZUDEJUNYUNXING,CONGERBAOZHENGDIANZUMOQIAOLUDEPIPEI。

4.JIANSHEMODIANZUDEWENDINGXINGCHULIGONGYIYANJIU

YAOHUODEGAOKEKAO、GAOJINGDUDECHANPIN,DIANZUDEWENDINGXINGHEKEKAOXINGSHIJICHU。CHULEDUMO、KESHIGONGYIWAI,DUIDIANZUMODEHOUQIWENDINGXINGCHULIYESHIGUANJIAN。TONGGUOCAIQUYIXILIEDEWENDINGXINGCHULICUOSHI,RURECHULI、MOBIAOMIANBAOHUCHULI、LAOHUACHULIDENG,SHIJIANSHEMODIANZUDEWENDUXISHUGENGJIAWENDINGBINGYOUGAODEXIANXINGDU,SHIMODIANZUCAILIAODEZUZHIZAICEWENFANWEINEIJUYOUGAOWENDINGXING。

5.CHUANGANQIDEBUCHANGGONGYIYUXINHAODIAOLI

TONGYICHUANGANQICELIANGWENDUYUYALI,XUYAODUILIANGLUXINHAOJINXINGBUCHANGYUFANGDA。ZAIXIANYOUDEYALICHUANGANQIDEJICHUSHANG,BUCHANGYUXINHAODIAOLIJISHUYICHENGSHU,ZHIYAOZHENDUIWENDUCELIANGDETEDIAN,ZHONGXINSHEJIDIANLUDUIWENDUCHUANGANQIXINHAOJINXINGBUCHANGYUFANGDA。ZAIDIANLUDESHEJIGUOCHENGZHONG,ZHUYAOKAOLVDESHIJIANSHAOHUANJINGWENDUDUICELIANGDEYINGXIANG,BAOZHENGJIEZHIWENDUCELIANGDEZHUNQUEXING。ZHEIXUYAOJIEHEJIEGOUSHEJI、BANTUSHEJIJINXING。

三、项目研制方案、技术难度、解决途径

(YI)ZONGTISHEJIFANGAN

1、JIANSHEMOYALIWENDUYITIHUABIANSONGQIGONGZUOYUANLISHEJI:WENDUYALIYITIHUABIANSONGQISHIZAITONGYIXINPIANSHANGSHIXIANYALIYUWENDUDETONGSHICELIANG,SHUCHULIANGGEBIAOZHUNXINHAO。YALICELIANGYUANLISHICAIYONGXIANJINDELIZISHUJIANSHEDUMOJISHU,ZAIYUANXINGPINGMOPIANDEYINGBIANQUJIANSHESIGEJIANSHEMOHEJINDIANZU,LIANJIECHENGWheastoneQUANQIAOYINGBIANDIANLU,TONGGUOMOPIANDEXINGBIANJIANGYALIZHUANHUANCHENGHEJINMODIANZUZUZHIDEBIANHUA,CONGERSHUCHUYIGEYUSUOSHOUYALIZHICHENGXIANXINGDEBIAOZHUNDIANXINHAO。WENDUCELIANGYUANLISHITONGGUOLIZISHUJIANSHEDUMOJISHUZAIPINGMOPIANDEFEIYINGBIANQUJIANSHEYIGEBIAOZHUNDEREDIANZU,JIANGSUOCEYETI、QITIDEWENDUTONGGUOPINGMOPIANDECHUANDAOZHUANHUANWEIREDIANZUZUZHIDEBIANHUA,TONGGUOXINHAODIAOLISHUCHUYIGEYUWENDUCHENGXIANXINGDEBIAOZHUNDIANXINHAO。

2、JIANSHEMOYALIWENDUYITIHUABIANSONGQIDECELIANGQIAOLUSHEJI:ZAIBENXIANGMUZHONG,REDIANZUCAILIAOXUANYONG99.9%DEBOJIN,ZAIBANTUSHANGSHEJI2GE1000ΩZUOYOUDEBOJINDIANZU,ZAIYUJINGMIJINSHUMODIANZUPEICHENGSHURUSHUCHUZUKANGWEI2KΩDEDIANQIAOQIAOLU,JIANGWENDUXINHAOZHUANHUANCHENGDIANXINHAOSHUCHU。CELIANGYALIDEJIANSHEMOYINGBIANDIANZUSHIGENJUDIANZUDEXINGBIANLAICELIANGYALIZHI,WEIHUODEJINKENENGGAODEYINGBIANLINGMINDU,YINGBIANDIANZUYAOCHUYUXINPIANDEZUIDAYINGBIANQU,ERQIECAIYONGQUANQIAOYINGBIANDIANLU。ZHEIZHONGQIAOLUZAIBANTUSHEJISHIDAIRUJIANSHEMODIANZUDELINGDIANBUCHANG,JIANSHEMOQIAOLUBENSHENJUYOUWENDUZIBUCHANGXING,CELIANGJIEZHIWENDUYUDIANLUHUANJINGWENDUDUICELIANGYALIJIEGUOYINGXIANGFEICHANGXIAO,BAOZHENGCEYADEZHUNQUEXING。

(ER)JISHUNANDU

1、JIANSHEMODEZHIBEIGONGYI:XINXINGDEJIANSHEMOWENDUYALIJICHENGBIANSONGQI,YAOQIUZAIELIEHUANJINGZHONGZHANGQIWENDINGKEKAOGONGZUO,YINCIZHIBEIGAOWENDINGXINGDEJIANSHEMODIANZUSHIYANJIUDENANDIAN。JIANSHEMODEXINGNENGYAO“ZAIXIAN”YUANCAIDEXINGNENG,HAIYAOJUBEIJIANSHEMOCAILIAODEYOUDIAN。JIANSHEMODIANZUZAIZHIZUOGONGYIGUOCHENGZHONG,YAOJINLIANGQUCHUHUOJIANSHAOCHANZA、WURAN、YANGHUADENGBULIYINSU,YAOBAOZHENGMOCENGDEZHIMIDU,BAOZHENGXIANGTONGGONGYICANSHUXIADIANZUMODEDIANZUXINGNENGYUWENDUXINGNENGDEYIZHIXING,BAOZHENGJIANSHEMODIANZUDEZHANGQIDIANWENDINGXING。

2、DUMO、GUANGKEDEGONGYILIUCHENGSHEJI:ZAIBENXIANGMUDEYANJIUZHONG,YAOQIUZHIBEIDEGONGNENGJIANSHEMODUO,WEILEBAOZHENGCHANPINDEGAOJUEYUANCHENGDUYUNAIYACHENGDU,JUEYUANMOCAIYONGSHUANGCENGJUEYUANMOXINGSHI。DUIREDIANZUMOYUHEJINDIANZUMO,WENDINGXINGCHULIGONGYIYEBUXIANGTONG。MOCENGDUO、KESHIDUO,JICHENGCHUANGANQIGONGYIFUZA,RUHEZAIBAOZHENGZHILIANGDEQIANTIXIA,ZAIGONGYISHANGSHIXIANDUOCENGMODEJIANDU、KESHIYUYOUXIAORECHULI,SHIJIANSHEMOWENDUYALIJICHENGCHUANGANQIDEGONGYINANDIAN。

(SAN)JISHUTUJING

泽天传感已有较成熟的溅射膜制备技术,研制、开发了多种溅射膜压力传感器,对多种金属材料如铜、金、镍等的温度性能有一定的研究,在此基础上进行溅射膜热电阻的研究,实现温度压力的集成测量,在技术上是切实可行的。通过以下技术途径,取得工艺、设计上的突破,实现该项目的目标要求,制作高稳定性的溅射膜温度压力集成变送器。

1.MINGANYUANJIANBANTUDESHEJI:YIBANDEREDIANZUCHUANGANQIDOUZHIZUOBIAOZHUNDEDIANZU,DUIZUZHIDEZHUNQUEXINGYAOQIUGAO,ZHATIAODEXINGZHUANGYAOJIEHEJIANSHEMOHOUDU、DIANZUZHIDAXIAO、GONGYISHANGDEKESHIXIANXINGDENGLAISHEJI。YINGBIANDIANZUFENBIEFENBUYUZHENGFUYINGBIANZUIDAQUYU。WEILEBAOZHENGREDIANZUZUZHIDEJINGQUEYUHEJINDIANZUQIAOLUDEPIPEI,ZAIBANTUDESHEJIZHONGHAIYAODAIRUJIANSHEMOCHUBUBUCHANGDIANZU,TONGSHIYAOSHEJIJIGUANGDIAOZUDEWEIZHI。

2.GONGYISHEJI

2.1 GONGYILIUCHENGSHEJI:WENDUYALIJICHENGBIANSONGQIZHONGYOULIANGZHONGDIANZUMO,YAOBAOZHENGGECENGMODEGONGYIZHIJIANBUHUXIANGGANRAO,YAODUIJIANSHEMODECHENGMOGONGYIGUOCHENGJINXINGSHEJI。ZAIQUEDINGHAOGONGYISHUNXUHOU,JIUYAODUIMEIYIBUJUTIDEGONGYIGUOCHENGJINXINGSHIYAN,XUNZHAOZUIJIACANSHUGONGYICANSHU。

2.2 LIZISHUJIANSHEDUMODEGONGYIYANJIU:ZAIBENXIANGMUDEYANJIUZHONG,XUANYONGLIZISHUJIANSHEDUMOJISHULAIJINXINGGEZHONGGONGNENGMODEJIANDU。LIZISHUDUMODEXINGNENGYUJIANSHEBACAIDEXINGNENGJIBENYIZHI,MOCENGDEWENDINGXINGHAO。YAOZHIZAOHAOJIANSHEMOCHUANGANQI,JIUBIXUDUIZHUYAODEGONGNENGMODEGONGYIYIYIJINXINGYANJIU。JIANSHEMOHOUDUBUYIYANG,CHENGMODEJIEJINGGUOCHENGBUYIYANG,MOCENGDEXINGNENGYEJIUYOUCHABIE。MOHOUDADAOYIDINGCHENGDU,JIANSHECAILIAOCHENGFENDEXIWEIBIANHUA、MOCENGZAZHI、GUANGKEFUSHIGUOCHENGZHONGDECHAYIDENGDUIDIANZUZUZHIDEYINGXIANGJIUHUIJIANXIAO,ZHEIXIEDOUYOULIYUJIANSHEMODIANZUWENDUXISHUDEYIZHIXINGYUZUZHIDEJUNYUNXING。

2.3LIZISHUKESHIDEGONGYIYANJIU:WENDUYALIJICHENGCHUANGANQIXUYAOZAITONGYIJIDISHANGJIANSHEERZHONGBUTONGCAIZHIDEJINSHUMO,HUODELIANGZHONGCAILIAODEZHATIAODIANZU。LIZISHUKESHIJINGDUGAO,DUIGEZHONGCAILIAODEMOCENGDOUSHIYONG。WANCHENGDUMOHOU,DUIYINGXIANGYINGDEDIANZUMOJINXINGZHATIAOXINGZHUANGDEPUGUANG、TUJIAO,RANHOUZAICAIYONGLIZISHUKESHIJISHU,DUIBUXUBAOLIUDEDIANZUMOYONGLIZISHUHONGJIDIAO。LIZISHUKESHITIGAOLEKESHIJINGDU,BAOZHENGLEDIANZUMODEZHILIANGYUZUZHIDEJUNYUNXING。

2.4 JIANSHEMODIANZUDEWENDINGXINGCHULIGONGYI:JIANSHEMODIANZUDEWENDINGXINGXINGCHULIBAOHANLIANGGEFANGMIAN,YISHIWENDUXISHUDEWENDINGXING,HAIYOUYIGESHIDIANZUZUZHIDEWENDINGXING。WEIJINGCHULIDEJIANSHEMODIANZUXINGNENGBUWENDING,DIANZUZHIRONGYIFASHENGPIAOYI,WENDUXISHUYEBIBIAOCHENGZHIXIAO。

3CHUANGANQIDEBUCHANGGONGYIYUXINHAODIAOLI:YOUYUGONGYIWUCHADECUNZAI,MEICIDUMOREDIANZUZUZHIBUKENENGWANQUANYIZHI,TONGYIXINPIANSHANGDESIGEYINGBIANDIANZUZUCHENGDEQIAOLUYEBUNENGWANQUANPIPEI,ZHEIXUYAODUIJIANSHEMODIANZUZUZHIJINXINGXIUZHENGHEBUCHANGQIAOLU。WEIBAOZHENGQIAOLUDEPIPEIXING,ZAISHEJIZHATIAODIANZUDETONGSHI,DAIRUYIXILIEJIANSHEMOBUCHANGDIANZU,TONGGUOBUCHANGZUZHIDEXUANQULAIDADAOLINGDIANDECHUBUBUCHANG。WEIBAOZHENGXINHAODEYUANJULICHUANSHUHUOSHUZIHUACHULI,SHEJIXINHAODIAOLIDIANLUDUIYINGBIANYALIXINHAOYUREDIANZUWENDUXINHAOJINXINGDIAOLI,ZHUANHUANCHENGBIAOZHUNDE0~5VSHUCHU。ZAIDIANLUDESHEJISHANG,CANKAOLEZETIANCHUANGANYUANYOUDECHENGSHUDIANLU,ZHEZHONGKAOLVKANGGANRAOXINGNENG。

通过以上技术途径进行工艺研究,可以获得高性能的溅射膜,制作出新型的溅射膜温度压力集成传感器。溅射膜温度压力集成传感器响应速度快,测试精度高,稳定性能好,而且抗环境性能强,适合各种恶劣环境领域的压力温度测量。在溅射膜压力传感器与温度传感器的技术基础上,研究开发新型的溅射膜温度压力集成变送器,为军事领域提供高可靠性、高稳定性的军用传感器,对我国国防事业的发展有重大的意义。本文源自泽天传感,福彩快三,转载请保留出处。