福彩快三

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泽天传感高精度薄膜绝压传感器研制方案

发布时间:2019-9-16      发布人:泽天传感      点击:

一、研制目标

ZAIJIANSHEBOMOGONGYIDEJICHUSHANG,WANCHENGGAOJINGDUJUEYACHUANGANQIDEYANZHI,YIDAPOGUOWAIGAOJINGDUJUEYACHUANGANQIDEJISHUFENGSUO,TIANBUGUONEIGAOJINGDUJUEYACHUANGANQIDEKONGBAI。CAIYONGBOMOGONGYIZHIZAODEGAOJINGDUJUEYACHUANGANQIHEPUTONGDEJUEYACHUANGANQIXIANGBIJUYOUFENBIANLVGAO、XIANXINGDUGAO、CHIZHIHEZHONGFUXINGXIAODETEDIAN。XIANGMUCHANPINYANZHIDADAODEXINGNENGZHIBIAORUXIA:CELIANGFANWEI:0~2.5Mpa;ZHUNQUEDU:0.01%;FENBIANLV:1×10-6;LINGDIANWENPIAO:±0.01%FS/℃;LINGMINDUWENPIAO:±0.02%FS/℃;JINGTAIGUOZAI:120%FS;GONGDIANDIANYA:12VDC;SHURUZUKANG:≥3kΩ;JUEYUANDIANZU:500MΩ;JUEYUANQIANGDU:100V.dc;WENDINGXING:LINGDIANJILIANGCHENGPIAOYI≤0.1%/100h;GONGZUOWENDUFANWEI:-50℃~+85℃;ZHUCUNWENDUFANWEI:-50℃~+85℃ 。

二、国内外同类产品比较

目前,压力传感器主要基于电容式、压阻式、应变式(金属应变和半导体应变)和压电式原理。电容式压力传感器由于体积笨重和精度低的缺点,很少在军事领域中使用。比较常见的是压阻式、应变式和压电式。对于高精度绝压传感器数压电式占的市场份额最大,电阻式次之。

YADIANSHIYALICHUANGANQISHICAIYONGSHIYINGJINGTIZUOWEIXIEZHENYUANJIAN,XIEZHENDEPINLVSUIYINGYALIDEBIANHUAERBIANHUA,YOUCILAIHUODEGAOFENBIANLV、GAOJINGDUDEXINGNENG。YADIANSHIYALICHUANGANQISHOUWENDUYINGXIANGDA,DADUOSHUYADIANCAILIAOJUYOURESHIDIANXIAOYING,WENDUBIANHUAHUIDAOZHIYADIANJINGTISHOULIZHUANGTAIFASHENGBIANHUA,CHANSHENGSUOWEIDE“RESHUCHU”。YINGXIANGYADIANSHIYALICHUANGANQICHANSHENGSHUCHUPIAOYIDEZHUYAOYUANYINSHISHUNBIANWENDU,SHUNBIANWENDUDUIJINGTIDEYINGXIANGYAOBIHUANBIANWENDUDADEDUO。YADIANSHIYALICHUANGANDUIZHENDONGMINGAN。LINGWAIRONGYISHOUDAOSHENGCHANG、CICHANG、DIANCHANGDEYINGXIANG。QIYINGYONGCHANGHECHANGSHOUDAOZHOUWEIHUANJINGDEXIANZHI。

金属薄膜压力传感器在结构上通过在弹性材料上镀上金属电阻膜,当弹性材料受到压力发生形变时,电阻膜也跟随着发生形变,最终使电阻阻值发生变化。离子束溅射薄膜压力传感器,应用先进的离子束溅射和离子束刻蚀工艺,将应变电桥直接制作在金属测压膜片上。由于不用传统的胶粘工艺,显著改善了应变式传感器的长期稳定性,无蠕变,使产品工作温度范围大为扩展,在-100℃~+250℃范围内的温度漂移小于50PPM/℃。薄膜传感器的弹性敏感材料可选择具有耐腐蚀性能的不锈钢、石英、蓝宝石、陶瓷等,可直接与腐蚀性介质接触,不需要灌油隔离。由于没有活动部件,抗振动和抗冲的能力很强,可用于恶劣环境。其优良的技术性能和耐恶劣环境能力引起了世界各国的重视,在国内外军事装备中得到广泛应用。

三、本项目研究的高精度绝压传感器的先进性可以总结为一下几点:

1)BOMOJISHUDAITIZHANTIESHICHUANGANQIZHONGDEDIANZUZHANTIEJISHU,XIAOCHUJIAODEYINGXIANG,SHICHUANGANQIGONGZUOWENDUFANWEIKUAN,WURUBIANHELAOHUAXIANXIANG。

2) YOUYUCAIYONGLIZISHUJIANSHEGONGYI,DANXINGTIHEYINGBIANDIANZUCAILIAOJIEHEWEIYITI,CHUANGANQIZHENGTIWUKEDONGBUJIAN,TIGAOCHUANGANQIDEWENDUTEXINGHEKANGZHENDONG、KANGCHONGJIDENENGLI。

3) SHEJICHANPINTIJIXIAO、GONGHAODI、XIANGYINGSUDUKUAI。

4)ZAISHUZIYUDUILINGMINDUJINXINGXIUZHENG、WENDUPIAOYIBUCHANG、FEIXIANXINGXIAOZHENGDENGSUANFATIGAOCHUANGANQIDEJINGDU。

目前国内尚没有精度达到0.01%的绝压传感器,而国外生产的精度能够做到0.01%的压力传感器绝大多数基于石英晶体的压电效应,个别厂家基于扩散硅材料的压阻效应。湖南泽天传感科技福彩快三的一种高精度压力传感器如图所示。其最高精度可达0.05%。

CYB350高精度数显压力变送器

日本东京的Epson Toyocom公司是专门从事石英晶体开发和应用的公司,由日本精工株式会社爱普生科技公司的石英晶体业务司和Toyo通信设备公司组合而成。该公司主要生产石英谐振器、定时元件、滤波器、石英传感器、光学设备等产品,其生产的TSU系列高精度石英压力传感器测量范围从0-100kPa到0-1MPa。该公司生产的TSU系列高精度石英晶体绝压传感器。该系列传感器的线性度最大只能达到0.05%,工作温度范围仅限于-10℃~+70℃。

MEIGUOParoscientific(PAIRUOSI)GONGSICHENGLIYU1972NIAN,ZHUYAOZHILIYUGAOJINGDUYALICHUANGANQIDEYANJIU、SHENGCHAN、XIAOSHOU,TONGGUOSHIYONGZHUANMENDESHIYINGJINGTIZUOWEIXIEZHENYUANJIANLAIMINGANWAIBUDEYALIBIANHUA。GAIGONGSISHENGCHANDEJUYOUDAIBIAOXINGDESHIYINGJINGTIJUEYACHUANGANQIYOU2000XILIE,3000XILIE,4000XILIEJI4000KRXILIE,QITAXINGNENGZHIBIAORUXIA:LIANGCHENG:0~0.1MPa、0~3.45MPaZHIJIANRENXUAN;ZHONGFUXING:0.005%;CHIZHI:0.005%;PINLVSHUCHUFANWEI:30KHzDAO42KHz;GONGDIANDIANYA:+5VDC~16VDC;GONGZUOWENDU:-54℃~+107℃。

四、高精度压力产品的应用背景及应用范围

GAOJINGDUJUEYACHUANGANQIKEGUANGFANYINGYONGYUFADONGJITUIJINKONGZHIXITONG、FENGDONGYIQIJIYALIXIAOZHUNXITONG、QIXIANGXUEYANJIU、NENGYUANKAIFADENG。RUKEYIYONGZAIDIQIUTONGBUWEIXINGSHANGDEGAOJINGDUTUIJINCELIANGXITONGWANCHENGWEIXINGGUIDAOJINGQUEDINGWEI,CELIANGGEZHONGRANYOUDEYALI、TUIJINCANGDEYALI;YONGZAIDAODANSHANGCELIANGJINQIKOUWAIBU、NEIBUYIJIPAIQIKOUNEIBU、ZHONGJIANHEWAIBUDEYALI;ZAIRENFEICHUANCANGNEIQIYADECELIANG、FEIJIFEIXINGGAODUCELIANG、DAQICANSHUCELIANG、FEIJIJICANGNEIWAIDEYACHACELIANG。

五、研制方案及技术途径

1)SHEJIYUANLI

LIUTIYALIP1ZUOYONGZAIGAODANXINGMOPIANSHANG,SHIMOPIANCHANSHENGXINGBIAN ,CAIYONGLIZISHUJIANSHEHEKESHIJISHUZAIMOPIANSHANGZHIZUOLEZUCHENGDIANQIAODEBOMODIANZU,TONGGUOHENGDINGDIANLIUYUANDUIDIANQIAOGONGDIAN,DANGMOPIANXINGBIANSHIDIANZUZUZHIFASHENGBIANHUASHI,DIANQIAOSHUCHUYUYALICHENGBILIDEDIANYAXINHAO。TONGGUODIANLUDUIDIANQIAOSHUCHUDEXINHAOJINXINGFANGDA、CHULI、WUCHASHUZIHUAXIUZHENG,ZAIBIANHUANCHENGYUYALICHENGBILIDEPINLVXINHAO。

2)GAOJINGDUSHEJIBAOZHANG

BOMOYALICHUANGANQIDEJINGDUZHUYAOSHOUDAOFEIXIANXINGWU、CHIZHIHEZHONGFUXINGDEYINGXIANG,TONGGUOXUANYONGHESHIDECAILIAO,CHUANGANQIDEZHONGFUXINGHECHIZHIKEYIDEDAOHENHAODEJIEJUE。DANDUIYUFEIXIANXINGWUCHAXUTONGGUOYIXIAJIGEHUANJIEJIAYIJIEJUE:

(1)XUANQUHESHIDEDANXINGCAILIAO。

(2)ZAIDANXINGTIDESHEJISHANG,TONGGUOSHEJIHESHIDEMOPIANHOUDUHEBANJING,BAOZHENGDANXINGTIDEYINGLIDUIXINGBIANDEFEIXIANXINGWUCHAKONGZHIZAI0.085%YINEI。

(3) CAIYONGDIANZIDIANLUDUIFEIXIANXINGJINXINGDIAOZHENG。TONGGUOCAIYANGDAODECHUANGANQIYUANSHISHUJUHUODEYIGEWEIDIAODIANYAXINHAO,QUDIAOZHENGDIANQIAODEJILIYUANLAIGAISHANCHUANGANQISHUCHUDIANYADEFEIXIANXING。

(4)TONGGUOSHANGSHUCUOSHI,CHUANGANQIDEJINGDUYOUXIANZHUDEGAISHAN,DANYAOXIANGDADAO0.01%DEGAOJINGDUYAOQIU,HAIBIXUZAISHUZIYUDUISHUCHUXINHAOJINXINGBUCHANG。ZAISHUZIYUZHUYAODUICHUANGANQIJINXINGFEIXIANXING、LINGDIANPIAOYI、WENDUPIAOYI、LINGMINDUJINXINGXIUZHENG。

3)FEIXIANXINGBUCHANG

TONGGUOXUANZEHESHIDEDANXINGCAILIAOYIJISHEJIGAOLINGMINDU、DIFEIXIANXINGWUCHADEDANXINGYUANJIANJIEGOUTIHOU,BIXUTONGGUOYIDINGDECUOSHIDUICHUANGANQIDIANQIAOJINXINGFEIXIANXINGBUCHANG,YIJINYIBUTIGAOXIANXINGDU,WOMENJIANGTONGGUOJICHENGZAIDIANLUZHUXINPIANNEIDEMONIDIANLUDUIFEIXIANXINGWUCHAJINXINGBUCHANG,CHUCIZHIWAIHAIJIANGZAISHUZIYUDUIFEIXIANXINGZUOJINYIBUXIAOZHENG。TONGGUOJIANCECHUANGANQIDESHUCHUDIANYA,BINGHELIXIANGDEXIANXINGDIANYAXIANGBIJIAO,JISUANCHUYIGE8bitDESHUJU,RANHOUJIANGZHEIGESHUJUJINXINGD/AZHUANHUAN,SHUCHUJIYUNSUANFANGDAQI。YUNSUANFANGDAQIHEMOSGUANGOUCHENGYIGEYAKONGDIANLIUYUAN,BUTONGDED/AZHUANHUANQISHURUSHUJUJIANGDEDAOBUTONGCHUANGANQIJILIDIANLIUYUAN,KEXIAOZHENGBUTONGDEFEIXIANXINGWUCHA。SHIYANYIZHENGMING,DIANLUKEJIANGCHUANGANQI0.09%DEFEIXIANXINGWUCHABUCHANGDAO0.05%YIXIA。DUIYUBUCHANGHOURENGBUNENGDADAOYAOQIUDECHUANGANQI,ZAITONGGUOSHUZIDIANLUXIUZHENG,JIANGFEIXIANXINGKONGZHIZAIYUNXUFANWEI。

4)SHUZIXIAOZHENG

ZAIMINGANYUANJIANFENGZHUANG,WENDINGXINGCHULIHOU,BIXUDUICHUANGANQIZAISHUZIYUDUILINGDIANPIANYI、FEIXIANXING、LINGMINDU、WENDUJINXINGBUCHANGCAINENGDADAO0.01%DEGAOJINGDUYAOQIU。RUTUSHISHUZIXIAOZHENGYUANLITU,YALIXINHAOHEWENDUXINHAOJINGGUOFANGDA,PIANYIDIAOZHENG,TONGGUODUOLUZHUANHUANKAIGUANSHURUDAOA/DZHUANHUANDUANKOU,ZHUANHUANHOUDESHUZIXINHAOBEICPUTONGGUOXIAOZHENGSUANFAXIAOZHENG,CPUJIANGXIAOZHENGHOUDE16WEISHUZIXINHAOSONGDAOD/AZHUANHUANQI,ZUIZHONGYIDIANLIUHUODIANYADEXINGSHISHUCHU,HUOZHIJIEYIPINLVXINHAOSHUCHU。

LINGDIANHEMANLIANGCHENGWENPIAOCAIYONGCHABIAOBUCHANGFA,BUCHANGYUANLIRUXIA,ZAIYIGEHENGDINGDEWENDUDIAN,TONGGUOJISUANJIHUOSHOUCAOQIDEANJIANJIANGDUIYINGWENDUDIANDELINGDIANWUCHAXIANGDUIZHIHEMANLIANGCHENGWENPIAOJUEDUIZHI,JILUDAODANPIANJIDEFLASHZHONG,DANGDANPIANJIZHENGCHANGGONGZUOSHI,GENJUCAIYANGDEWENDUZHI,CHABIAODEGAIWENDUDIANDELINGDIANWUCHAHEFANGDABEISHU,ANZHAOXIALIEGONGSHIJISUANCHUANGANQIWEIJINGXIANXINGBUCHANGDESHUCHUZHI。

D3=(D1+D2)*S

SHIZHONG:D3——CHUANGANQIWEIJINGXIANXINGBUCHANGDESHUCHUZHI;D1——DANPIANJIJINGA/DZHUANHUANDEDAODESHIJIZHI;D2——CHABIAODEDAODELINGDIANWUCHAZHI,YOUZHENGFUHAO;S ——CHABIAODEDAODEJUEDUIFANGDAXISHU。

DANGCHUANGANQIDELINGDIANXUYAOGAIBIANSHI,TONGGUOJISUANJIHUOSHOUCAOQIJIANGFLASHZHONGDELINGDIANWUCHAZHITONGYIJIAMOUYIXUYAODEDINGZHI,JIBAOCHICHUANGANQIDELINGDIANWENBUTEXINGBUBIAN,SHIXIANLINGDIANPINGYI。XIANXINGBUCHANG,CHUANGANQIDEXIANXINGBUCHANGCAIYONGCHABIAOFENDUANXIANXINGHUACHULI,JIYONGDEDAODECHUANGANQIWEIJINGXIANXINGBUCHANGDESHUCHUZHID3,JIASHANGGAIYALIDIANTONGGUOJISUANDEDAODEXIANXINGPIANYILIANG,ZUIHOUDEDAOJINGWENDU、XIANXINGBUCHANGDESHIJIYALIZHI。

例如5MPa传感器五点线性补偿的具体方法为:将压力点分为五个等分点,然后逐点加压,在1MPa点将D3记录到FLASH的内存对应区,通过手动调节将压力变送器调到理想输出值,计算出D3与理想输出的差值,依次记录2MPa、3MPa、4MPa、5MPa的对应值。通过下列计算公式计算出线性补偿后的值D4。

D4=D3+△L

SHIZHONG:D4——XIANXINGBUCHANGHOUDEZHI;D3——WENDUBUCHANGHOUDEZHI;L——XIANXINGCHAZHI,TONGGUOD3CHABIAOJIFENDUANXIANXINGHUADEDAO。BENWENYUANZIZETIANCHUANGAN,FUCAIKUAISAN,ZHUANZAIQINGBAOLIUCHUCHU。