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泽天传感爆炸冲击波压力传感器初步研制方案

发布时间:2019-8-21      发布人:泽天传感      点击:

一、项目研制背景和意义

ZHAYAOZAIKONGZHONGBAOZHASHISHENGCHENGDEKONGQIBAOZHADEFENGZHICHAOYAHECHONGLIANGSHIZHAYAONENGLIANGTEXINGDEYIXIANGZHONGYAOCANSHU,YESHIHENGLIANGDANYAOTEBIESHIBAOPOJISHASHANG——BAOPOZHANDOUBUSUNSHANGXIAOGUODEYIXIANGZHONGYAOZHIBIAO,QIZHUNQUECELIANGJUYOUZHONGYAODEYIYI。BAOHONGWULISHIYAN、ZHAYAOHEWUQIXINGNENGPINGJIA、YIWAIBAOZHAZAIHAIPINGGUZHONGDEYIGEZHONGYAOCESHICANSHUJIUSHIBAOZHAYALI。CONG20SHIJI50NIANDAIHE60NIANDAIQI,SUIZHEWUQIDEFAZHANHETAIKONGSHIDAIDEDAOLAI,JIUDUIKECELIANGZHENDONGBO、BAOZHA、HUOJIANRANSHAOBUWENDINGXINGHEDANDAOFASHEDEGAOPINYALICHUANGANQITICHULESHIYONGXUQIU。BENXIANGMUSUOYANZHIDEKONGZHONGBAOZHAYALICHUANGANQIZHUYAOYONGYUBAOZHAZHONGBAOZHAYALIDECELIANG。GUONEIJUNGONGDANWEI,GELEIBAOPOGONGSI1000YUJIA,JIANZHU、TIELU、GONGLUGONGCHENGGONGSIDADUODOUXUYAOJINXINGBAOPOWEILICESHIHEPINGGU,SHICHANGXUQIULIANGDA,CHANPINFUJIAZHIGAO,KAIFABAOZHAYALICHUANGANQIJUYOULIANGHAODEJINGJIXIAOYIHESHEHUIXIAOYI。

冲击波压力传感器

二、项目研制的主要内容

1.CHANPINYAOSHIXIANDEZHUYAOJISHUYAOQIU:CELIANGFANWEI:0~1000MPa;XIEZHENPINLV:≥500KHZ(SUIJISHIYAN);SHANGSHENGSHIJIAN:≤1.5μs(SUIJISHIYAN);LINGMINDU:≥0.02mV/kPa(SUIJISHIYAN);ZHUNQUEDU:≤1.0%FS;GONGZUOWENDUFANWEI:-25~+80℃

2.XIANGMUYANZHIDEZHUYAONEIRONG:CHANPINZHUYAOYONGLAICELIANGBAOZHADEYALI,CELIANGLIANGCHENGDA,LIANGCHENGSHANGXIANWEI1000MPa,BUNENGCAIYONGYINGBIANSHIDEYALIJI,XUYAOGAIWEIYAZUSHIDECHUANGANQI。GONGZUOYUANLIDEGAIBIAN,SHIDECHANPINDEKAIFACONGSHEJI、JIEGOU、GONGYIDENGFANGMIANJUNXUJINXINGYANZHI。ZHENDUICHANPINYANZHIDEJISHUZHIBIAO,BENCHANPINDESHEJIKAIFADEZHONGDIANSHIGONGYIDEYANJIU。

研究爆炸应力效应以及高静水压力,国内外均采用锰铜丝或锰铜箔应变计制成的传感器,锰铜压阻计是目前量程最高的压力传感器。锰铜合金是一种常用的精密电阻合金材料,它具有电阻温度系数小、压阻特性好的特点,它的电阻变化与爆炸压力间呈线性关系,锰铜材料本身到125GPa都不发生相变,原则上可测量100GPa以上的压力,所以,该项目研制采用锰铜压阻传感器来实现爆炸的测量。但锰铜的电阻率低,其压力灵敏系数也仅为2.7%/GPa,要获得0.02mV/kPa以上的灵敏度要求,必须在工艺上进行研究,提高产品的电阻值,尽量提高产品的应变灵敏系数,减小温度及其它环境条件对产品测量的影响。

三.项目研制方案、技术难度、解决途径

1.GUANJIANJISHU:CONGYUANLISHANGJINXINGFENXI,BENXIANGMUYAOJIEJUEDEGUANJIANJISHUZHUYAOSHI:GAOLIANGCHENG(0~1000MPa)、GAOLINGMINDU(≥0.02mV/kPa)、GAOPINLV(≥500KHZ)。CHUANGANQIDEJIEGOUCHICUNYAOQIUXIAO。

2.CHUBUZONGTISHEJIFANGAN:CONGYUANLISHANG,BENXIANGMUCAIYONGMENGTONGYAZUCHUANGANQILAISHIXIAN,JITONGGUOMENGTONGDIANZUDEDIANZULVDEBIANHUALAICELIANGYALIBIANHUA。CONGSHEJISHANGZHUYAOSHICAILIAO、JIEGOUHEGONGYISANFANGMIAN。

LIYONGJINSHUDEYAZUXIAOYINGCELIANGYALI,DUIJINSHUCAILIAOYIBANYAOQIUQIYOUYALIYINQIDEDIANZULVDEBIANHUABIYOUWENDUYINQIDEDIANZULVDEBIANHUADADEDUO,CONGERSHIDEYOUWENDUYINQIDEDIANZULVDEBIANHUAKEYIHULVE;WEIBIANYUCELIANGHEFENXI,ZAIDONGTAIYALIZUOYONGXIA,GAICAILIAOBUHUICHUXIANXIANGBIAN;WEILEHUODEDADELINGMINDUSHUCHU,YAOQIUSUIYALIDEBIANHUA,DIANZUZHIDEBIANHUAYAODA。MENGTONGJINGMIDIANZUCAILIAODEWENDUXISHUSHI2×10-5/℃,BIYIBANDAOTIDEWENDUXISHU5×10-3/℃XIAOLIANGGESHULIANGJI,ERQIEZAIDONGTAIYALIXIABUHUIFASHENGXIANGBIAN,SHIFUHEGAOLIANGCHENGYAOQIUDEZUIWEILIXIANGDECAILIAO。ZAIYIWEIYASUOQINGKUANGXIA,MENGTONGDEDIANZULVXIANGDUIBIANHUAHEDIANZUZHIXIANGDUIBIANHUADOUJINJINSHIYALIDEHANSHU,ΔR/R=KP,SHIZHONGKSHIMENGTONGDEYAZUXISHU,TAYUCAILIAOCHENGFENJICHUANGANQIYOUGUAN。ZAIHENGLIUYUANGONGDIANDEQINGKUANGXIA,YAOHUODEDADESHUCHULINGMINDU,JIUBIXUHUODEDADEDIANZUBIANHUA。

GENJUXINGNENGZHIBIAOYAOQIU,YAODAYU0.02mV/kPa,MANLIANGCHENGSHUCHUYAODADAO20V。YONG100mADEHENGLIUYUANGONGDIAN,DIANZUDEBIANHUAZHIYAODADAO200Ω。ERMENGTONGDELINGMINDUXISHUJINWEI2.7%/GPa,ZAI1000MPaDEYALIXIA,DIANZUDEBIANHUAZHIJINWEI2.7%,YAOHUODE200ΩDEBIANHUAZHI,MENGTONGDIANZUYAODADAO7.4KΩ。MENGTONGYAZUCHUANGANQIYIBANWEIBOSHIHESISHILIANGZHONG,ERQIEDIANZUYIBANZHIJISHIDAOJIBAIOU,YAOZUODAOJIQIANOUSHIBUKENENGDE,YEJIUSHISHUO,ZHEILIANGZHONGXINGSHIDEMENGTONGYAZUCHUANGANQIWUFADADAOYAOQIUDELINGMINDU。

本项目中将采用薄膜式锰铜压阻传感器来实现大的灵敏度。压阻传感器的感压面积应尽可能小,由于加工的难度,丝式和箔式的锰铜栅条电阻的大小就受到了限制,无法实现大的灵敏度输出。而通过离子束溅射而成的薄膜电阻,加上光刻工艺,可以制造出几百至几千埃的薄膜电阻,在同样的感压面积上可以获得较大的电阻值,在原理上可以实现大的灵敏度要求。通过这样的方式设计,可以实现1000MPa的爆炸压力的测量。

3.JISHUNANDUYUJIEJUETUJING:ZHENDUIGEXIANGJISHUZHIBIAO,JISHUDENANDUZHUYAOZAIYUGONGYIDESHIXIANYUGAOPINXIANGDESHEJI。WEISHIXIANCHANPINDEJISHUZHIBIAO,ZAIYUANLISHANG,YAOZHONGXINGENJUCHICUNYAOQIUYUXINGNENGYAOQIUDUIZHATIAODEWEIZHIYUXINGZHUANGJINXINGSHEJI,BINGQUEDINGGUANGKEBANTU;ZAIGONGYISHANG,YAOZHONGXINSHIYAN,QUEDINGDUMOCAILIAO、DUMOCANSHU、DUMOSHIJIAN、GUANGKECAILIAOYUCANSHU;ZAIJIEGOUSHANG,YAOJIEHEBOMOXINGNENGYUSHEJIYAOQIU,DUIJIDICAILIAOYUHOUDUJINXINGSHEJI,CONGERHUODEGAOPINXIANGDECHUANGANQI。

BAOZHAYALICHUANGANQISHIYONGYUDONGTAICELIANG,QIDANXINGMINGANYUANJIANDEGUYOUPINLVSHIJIZHONGYAODECANSHU。ZAIBENXIANGMUZHONG,XUANYONGSiO2CAILIAOZUOWEIDANXINGYUANJIAN,SiO2CAILIAOJUEYUANXINGHAO,ZHILIANGJIAOQING,DANDANXINGMOLIANGYUGANGXIANGDANG,SHIHEZHIZUOGAOPINLVXIANGYINGDECHUANGANQI。JINGLILUNJISUAN,DANXINGYUANJIANCHICUNWEI30×10×6mmSHI,WANQUANNENGBAOZHENGCHUANGANQIDEPINLVXIANGYINGGAOYU500kHz。ERQIEZHEIGECHICUNYOULIYUGONGYIZHIZUO。

为了保证足够大的灵敏度输出,在栅条电阻的设计上,设计薄膜总长度为400mm,宽40μm,厚度为0.5μm。经计算,设计的栅条电阻的阻值约10kΩ,能满足灵敏度输出要求。通过材料的选取与结构尺寸、版图的设计,理论上能保证锰铜薄膜压阻传感器能满足预定设计要求。技术上的另一难点就是工艺上的实现。在工艺上,步骤与应变式薄膜压力传感器基本类似。在所镀功能薄膜上,选择在高纯度的SiO2弹性元件上直接沉淀锰铜薄膜,考虑到锰铜的易氧化性,将在锰铜膜上再沉淀SiO2保护膜,在其上喷涂绝缘保护层。在外引导线上,因结构的紧凑,将采取大焊盘,再直接在膜层上外焊导线引出。

要获得0.5μm厚度的锰铜薄膜,溅射的能量参数与溅镀时间均必须经过大量的工艺试验进行确定。而且各种工艺过程参数将影响锰铜薄膜的粘附性能、温度性能、稳定性能、压阻性能等,要获得性能稳定、一致的锰铜薄膜,制造性能可靠、重复性好的锰铜压阻传感器,是研制中的重点与难点。需要大量的工艺摸索。在薄膜压力传感器的技术基础上,进行新工艺研究,从原理、材料、工艺过程参数、结构等方面进行设计与试验,应该可以获得性能优良的锰铜压阻传感器。本文源自泽天传感,福彩快三,转载请保留出处。