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薄膜高温压力温度一体化传感器的研制方案

发布时间:2018-7-16      发布人:泽天公司      点击:

GUOWAINENGTONGSHICELIANGWENDUYALIDECHUANGANQI,TONGCHANGSHILIYONGDIANLUZHONGJICHENGDEWENDUCHUANGANQILAICEWEN,YOUYUCELIANGJIEZHIHEDIANLUZHIJIANCUNZAIREZHANGBINGQIEYOUYIDINGDEJULI,YINCIYOUJIAODADEWENDUTIDU,BUNENGZHENSHIFANYINGCELIANGJIEZHIDEWENDU,YOUQIZAIWENDUBIANHUAJIAOKUAIDECHANGHE,ZHEIGEWENTIYOUQITUCHU。

Kulite公司的HKL系列微型带螺纹压力传感器,整合了RTD铂温度传感器(PT1000)。压力传感器利用先进的硅叠硅技术,RTD铂电阻温度传感器突出在横隔膜边缘感测介质的温度,压力测量和温度测量是独立的,输出信号是隔离的,该系列产品适应于宇航和战车领域。HKL系列产品的工作温度为-55℃~175℃,但误差补偿温度范围只25℃~85℃,测压的最大量程25MPa。

薄膜温度压力一体传感器

IPTXILIECHANPINNEIZHIWENDUCHUANGANQIZIBUCHANG,ZAI175℃XIAJUYOUYOUYUEDEZHANGQIWENDINGXINGHEGAOJINGDU,GONGZUOWENDU-40℃~175℃,BUCHANGWENDUFANWEI-18℃~175℃。DANWENDUCHUANGANQIZHIYONGLAIJINXINGWENDUBUCHANG,BUNENGZHUNQUEFANYINGJIEZHIDEWENDU。

GUOWAIZUIXINDEWENDUYALIJICHENGCHUANGANQIDEYANJIUZHUYAOSHIJIANGCEYAYUCEWENDEMINGANJIANZAITONGYIGUIBEISHANGJICHENG,LIYONGYAZUSHIHUODIANRONGSHICELIANGYALI,CAIYONGBANDAOTIERJIGUANDENGFANGSHICELIANGWENDU,SHOUGUIBEIDEYINGXIANG,CHANPINBUNENGJINGSHOUGAOQIANGDUDEZHENDONGHECHONGJI,LIANGCHENGYEZHINENGZUODAO25MPaZUOYOU。

国内现有的压力、温度集成的传感器采用热电偶、热电阻测温,采用压阻或应变测量压力,通过两个接口连接,输出信号再接处理电路,处理电路与测量点分开,这种方式的集成度不高,结构不紧凑。

JUNYONGBOMOGAOWENYALIWENDUYITIHUACHUANGANQIDEKANGHUANJINGXINGNENGYAOQIUGAO,DUIGONGZUODEKEKAOXINGYAOQIUGAO,JIEGOUYAOXIAOQIAO,XINHAOBIAOZHUNHUAYIYUCAIJI、KONGZHIYUCHULI。

一)研究目标

BENXIANGMUDEYANJIUMUBIAOSHI:TONGGUOYONGLIZISHUJIANSHEDUMO、LIZISHUKESHIDENGGONGYIYANJIU,JIANGBOMOHEJINYINGBIANDIANZUYUREDIANZUZAITONGYIMINGANXINPIANSHANGJINXINGJICHENG,YANZHIYIZHONGGAOSUFEIJIYONGXINXINGDEBOMOWENDUYALIJICHENGCHUANGANQI,TONGGUOYIGEANZHUANGJIEKOU,TONGSHIZHUNQUECELIANGJIEZHIDEWENDUYUYALI,YIJIANSHAOFEIJIDEKAIKOU。DAPOGUOWAIDEJISHUFENGSUO,MANZUHANGKONGFEIXINGQIYANJIUDESHEJIXUYAOHEZHUANGJIYAOQIU。

二)主要技术指标

1)JIBENXINGNENG YALICELIANGFANWEI:0~60MPa;CELIANGJINGDU:0.1%;YALIGUOZAI:150%;YALISHUCHUXINHAO:0~5V;JUEYUANDIANZU:≥1000MΩ/100VDC;

2)WENDUJIBENXINGNENG CELIANGWENDUFANWEI:-55℃~125℃;WENDUCELIANGJINGDU:0.5%;WENDUXIANGYINGSHIJIAN:τ0.65≤60s;WENDUSHUCHUXINHAO:0~5V;

3)HUANJINGXINGNENGZHIBIAOJIQITA ZHENDONGHECHONGJI:CHONGJIMANZUGJB150.18;ZHENDONGMANZUGJB150.16;DIANCIJIANRONGXING:MANZUGJB151-97HEGJB152-97DEYAOQIU。

SAN)YANJIUNEIRONG

1、MINGANYUANJIANBANTUDESHEJI;2、LIZISHUJIANSHEDUMOYUKESHIGONGYIYANJIU;3、BOMOBOREDIANZUZHIZUOGONGYIYANJIU;4、BOMODIANZUDERECHULIGONGYIYANJIU;5、JIGUANGXIUZHENGGONGYIYANJIU;6、CHUANGANQIDEBUCHANGGONGYIYUXINHAODIAOLI;7、YINXIAN、FENGZHUANGJISHUYANJIU。

四)拟采取的研究技术路线及关键技术难点

(YI)JISHULUXIAN

WENDUYALIYITIHUABIANSONGQISHIZAITONGYIXINPIANSHANGSHIXIANYALIYUWENDUDECELIANG,SHUCHULIANGGEBIAOZHUNXINHAO。YALICELIANGYUANLISHICAIYONGXIANJINDELIZISHUJIANSHEDUMOJISHU,ZAIZHOUBIANGUZHIDEPINGMOPIANDEYINGBIANQUJIANSHESIGEBOMOHEJINDIANZU,LIANJIECHENGHUISIDENGQUANQIAOYINGBIANDIANLU,TONGGUOMOPIANDEXINGBIANJIANGYALIZHUANHUANCHENGHEJINMODIANZUZUZHIDEBIANHUA,CONGERSHUCHUYIGEYUSUOGANSHOUYALIZHICHENGXIANXINGDEBIAOZHUNDIANXINHAO。WENDUCELIANGYUANLISHITONGGUOLIZISHUJIANSHEDUMOJISHUZAIDANXINGTIDEFEIYINGBIANQUJIANSHEYIGEBOREDIANZU,JIANGSUOCEJIEZHIDEWENDUTONGGUODANXINGMOPIANDECHUANDAOZHUANHUANWEIDIANZUZUZHIDEBIANHUA,TONGGUOXINHAODIAOLISHUCHUYIGEYUWENDUCHENGXIANXINGDEBIAOZHUNDIANXINHAO。

其中合金薄膜应变电阻要获得高的应变系数、低的温度敏感性,而热电阻要有高的温度灵敏度但对压力不敏感,这需要结合成膜的工艺参数进行工艺试验,在同一敏感芯片上做出合理的版图设计。在本项目研究中,在同一芯片上刻蚀100Ω热电阻2个,2000Ω镍铬电阻4个。因为热电阻不能感受所测介质的压力,所以热电阻只能处于芯片的非应变区。应变电阻分别分布于正负应变最大区域,即芯片中心2个,外圈2个。综合稳定性要求和工艺中光刻胶保护强度等,电阻薄膜厚度设计为0.4μm。为了保证热电阻阻值的精确与合金电阻桥路的匹配,在版图的设计中还要带入薄膜初步补偿电阻,同时要设计激光调阻的位置。

(ER)GUANJIANJISHUNANDIAN

泽天传感已有成熟的薄膜技术基础上研制本产品,在技术上是可行的。主要的关键技术难点如下:

1、MINGANYUANJIANBANTUDESHEJI,YOUYULIANGZHONGBOMODIANZUDECAILIAOBUTONG,GONGZUOYUANLIBUTONG,DIANZULVDENGXINGNENGCANSHUBUTONG,ZAIBANTUSHEJISHI,YAOZONGHECHUANGANQIDEXINGNENGZHIBIAO、GONGYISHIYANDENGJINXINGSHEJI,TONGGUODIANZUDEHELIBUJU,HUODELIANGZHONGGAOXINGNENGDEMINGANDIANZU。

2、LIZISHUKESHIDEGONGYIYANJIU,WENDUYALIJICHENGCHUANGANQIXUYAOZAITONGYIJIDISHANGJIANSHEERZHONGBUTONGCAIZHIDEJINSHUMO,HUODELIANGZHONGCAILIAODEZHATIAODIANZU。DUIDIANZUZHATIAOCAIYONGFUSHIDESHIFAKESHIGONGYI,HUIYINGONGYIZHONGCAOZUOZHONGDEKEKONGXINGCHAERZAOCHENGZHATIAOGUOFUSHI,YINGXIANGDIANZUQIAOLUDEPIPEIXING。WEIBAOZHENGLIANGZHONGDIANZUMODEZHILIANG,SHEJICAIYONGLIZISHUKESHIJISHUJINXINGGUANGKE。LIZISHUKESHIJINGDUGAO,DUIGEZHONGCAILIAODEMOCENGDOUSHIYONG。WANCHENGDUMOHOU,DUIXIANGYINGDEDIANZUMOJINXINGZHATIAOXINGZHUANGDEPUGUANG、TUJIAO,RANHOUZAICAIYONGLIZISHUKESHIJISHU,DUIBUXUBAOLIUDEDIANZUMOYONGLIZISHUHONGJIDIAO。CAIYONGLIZISHUKESHILAITIGAOKESHIJINGDU,BAOZHENGDIANZUMODEZHILIANGYUZUZHIDEJUNYUNXING。

3、BOMODIANZUDEWENDINGXINGCHULIGONGYI,BOMODIANZUDEWENDINGXINGXINGCHULIBAOHANLIANGGEFANGMIAN,YISHIWENDUXISHUDEWENDINGXING,HAIYOUYIGESHIDIANZUZUZHIDEWENDINGXING。WEIJINGCHULIDEBOMODIANZUXINGNENGBUWENDING,DIANZUZHIRONGYIFASHENGPIAOYI,WENDUXISHUYEBIBIAOCHENGZHIXIAO。DUMOYIHOUDERECHULIGONGYIDUIDIANZUMODEZHILIANGQIZHONGYAOZUOYONG,YOUXIAODERECHULIKEYIJIANSHAOBOMOQUEXIAN、WEICUODENG,CONGERGAISHANBOMODEWENDUXINGNENGHEDIANXINGNENG。SHEJITONGGUOYOUXIAODERECHULIFANGSHI,TIGAOBOMODIANZUDEWENDINGXING。ZAICHUANGANQIDEFENGZHUANGQIAN,ZAIZAIXINPIANBIAOMIANPENTUYICENGJUEYUANBAOHUCENG,DUIBOMODIANZUQISHUANGCENGBAOHUZUOYONG。

4、JIGUANGXIUZHENGGONGYIJISHUYANJIU,YANJIUJIGUANGDIAOZUJISHUDUIBOMODIANQIAODEZUZHIJINXINGXIUZHENG,QUDAIXIANXINGDECHUANLIANDIANZUBUCHANGJISHU,TIGAOCHUANGANQIZAIELIEHUANJINGYINGYONGDEKEKAOXING,TONGSHITIGAOCHANPINPILIANGSHENGCHANSHIDEZHILIANGYIZHIXING。YONGYUBOMOCHUANGANQIDEJIGUANGDIAOZUJISHU,SHISUIZHEBOMOCHUANGANQIZAIWUQIZHUANGBEIZHONGDEYINGYONGJUZENGERTICHUDEXINDEZHONGYAOGONGGUANNEIRONG。

JIANSHEBOMODEJUNYUNXINGWEI5%,SHEJIQIAOBEIDIANZUZHIWEI2 kΩDEDIANZU,ZHIZAOGONGYIKENENGCHANSHENGDEPIANCHAWEI±100Ω,SUIRANTONGGUOSHEJIXUANZHUANDUMOTAI,SHEJIBOMOBUCHANGDIANZUDENGFANGFA,KEGAISHANQIAOBEIDIANZUDEYIZHIXING,DANBUKEBIMIANRENGYOU1%ZUOYOUDEPIANCHA。CHUANGANQILINGMINDUWEI1.2mV/VSHI,2 kΩDEQIAOBEIDIANZUZAIZUIDALIANGCHENGYALIZUOYONGXIADEBIANHUALIANGJIN2 Ω。KEJIAN,QIAOBEIZUZHIBUPINGHENGPIANCHAWEI20 ΩSHI,LINGDIANSHUCHUJIANGDADAOMANLIANGCHENGSHUCHUDE10BEI。YEJIUSHISHUO,MANLIANGCHENGSHUCHU10 mVDECHUANGANQI,LINGDIANSHUCHUDADAO100 mV,HOUJIFANGDAQIJIANGWUFAGONGZUO,ZHEISHIBUNENGJIESHOUDE,BIXUDUIDIANQIAODELINGDIANJINXINGDIAOZHENG。

YOUYUWAIJIERAOZHIDIANZUZAIELIEHUANJINGXIASHIYOUFASHENGSHIXIAOXIANXIANG,YINCIYANJIUCAIYONGJIGUANGDIAOZUDEFANGANDUIDIANQIAODELINGDIANPINGHENGJINXINGDIAOZHENG,SHIQIAOBEIDIANZUZHIMANZU:R1×R3=R2×R4DEGUANXI。JIGUANGDIAOZUJISHUSHICAIYONGJUJIAOJIGUANGSHU,DUIDUOCENGBOMODEZHONGJIANCENGMOZUZHIJINXINGXIUZHENG。XUANZEZUZHIJIAOXIAODEQIAOBEIJINXINGXIUZHENG,DIANZUTIAOKUAN30~40μm(YUQIAOZUZHISHEJIYOUGUAN),LIYONGSHUJINGXIAOYU20μmDEYAGJIGUANGSHUDUIDIANZUTIAOJINXINGQIEGEHUORONGDUAN,SHIDIANZUZHIZENGJIA。RENGYIBIAOCHENGQIAOBEIDIANZUZHIWEI2 kΩDEDIANQIAOWEILI,LINGDIANBUPINGHENGSHUCHUTONGCHANGYAOQIUXIAOYU2%,JIQIAOBEIDIANZUDESHIHENG≤0.04Ω,WEI2 kΩDESHIWANFENZHIER,JIANSHIYUCELIANGZHUANGZHIDEJINGDUYINGYOUYUSHIWANFENZHIYI。YINCI,YONGYUBOMOCHUANGANQIDEJIGUANGDIAOZUJISHUDEZHUYAOYANJIUNEIRONGBAOKUO:1)CELIANGWUCHAXIAOYUSHIWANFENZHIYIDEBOMODIANZUZHIJIANSHIYUCELIANGZHUANGZHI;2)JINGMIWEIDONGDINGWEIXITONG;3)HESHIDESHUNENGLIANGHEMAIKUAN;4)DIAOZHENGFANWEIKEDA0.04Ω~2ΩDEBANTUSHEJI;5)DIAOZUHOUDEWENDINGXINGCHULIGONGYI。BENWENYUANZIZETIANCHUANGAN,FUCAIKUAISAN,ZHUANZAIQINGBAOLIUCHUCHU。