1  ZPM410压差传感器主要技术指标

1)CELIANGFANWEI： 0～50KPa；

2)JIBENCANSHU (1) JILIDIANYA：±10V.DC；(2) LINGDIANSHUCHU：≤0.2 mV；(3) LIANGCHENGSHUCHU：≥12mV；(4) JUEYUANDIANZU：≥100MΩ/100V.DC。

3)JINGTAIXINGNENG (1) ZHUNQUEDU：0.2JI；(2) FEIXIANXING：0.2%F.S。

4)HUANJINGXINGNENGZHIBIAOYAOQIU  (1) GONGZUOWENDU：-40℃～100℃；(2) CHUCUNWENDU：-40℃～100℃；(3) LINGDIANPIAOYI：0.05%F.S/h；(4) RELINGDIANPIAOYI：0.02%F.S/℃；(5) RELINGMINDUPIAOYI：0.02%F.S/℃。

2 设计与方案

2.1CHANPINYUANLISHEJI

ZPM410YACHACHUANGANQILIANGCHENGXIAO，WEI50KPaCHAYA，CHANPINLINGDIANSHUCHU≤0.2mV，CHANPINMANLIANGCHENGSHUCHU≥12mV，ZAI-40℃～100℃FANWEINEI，CELIANGJINGDU0.2JI，RELINGDIANPIAOYIHERELINGMINDUPIAOYIJUNXIAOYU0.02%FS/℃，ZHEIDUIGAICHANPINDEZONGHEXINGNENGTICHULEHENGAODEYAOQIU。ZHENDUIGAICHANPINDESHIYONGYAOQIUHEJISHUYAOQIU，TICHUYONGGUIYAZUSHICHUANGANQILAISHIXIANXIAOLIANGCHENGDECHAYACELIANG。GUICHUANGANQIDELINGMINDUXISHUDA，WANQUANNENGMANZUGAICHANPINDELINGMINDUYAOQIU，DANGUIYAZUSHIDEWENDUXINGNENGJIAOCHA，ZAICHANPINDESHEJIGUOCHENGZHONG，ZHONGDIANSHEJILINGDIANBUCHANGYUGAOJINGDUDEWENDUBUCHANG。

TONGGUOGUIPINGMIANJICHENGGONGYIJISHUZAIGUIPIANSHANGZHIZUOSIGEKUOSANDIANZUZUOWEIYINGLIMINGANYUANJIAN，YONGJIXIEYANMOJIAGEXIANGTONGXINGHUAXUEFUSHIFANGFAJIANGGUICHENDIJIAGONGCHENGZHOUBIANGUZHIDEPINGMOPIANDANXINGLIXUEJIEGOU。SIGELIMINDIANZU，LIANCHENGHUISIDUNQUANQIAOYINGBIANDIANLU，ZHEIZHONGDIANLUJUYOUZUIGAODELINGMINDU、ZUIHAODEWENDUBUCHANGXINGNENGHEZUIGAODESHUCHUXIANXINGDU。GUIBEISHOUDAOYIGECHAZHIYALI，LIMINDIANZUDEDIANZULVGAIBIAN，YINQIDIANZUZUZHIGAIBIAN。DIANZULVDEGAIBIANSHIYOUYUGUIMOPIANDEXINGBIANYINQIDE，CESHIDUANP1YUYINYADUANP2DEYALICHAYUGUIMOPIANDEXINGBIANCHENGZHENGBI，YEJIUSHIDIANQIAODESHUCHUYUYALICHACHENGZHENGBI。

2.2YAMINXINPIANDESHEJI

WEISHIYONGCHUANGANQIDEXIANXINGDUMANZU0.02%DEYAOQIU，XIANZHIGUIMOPIANSHANGZUIDAYINGBIAN（50KPaYAQIANGSHI）BUCHAOGUO200μεDEWEIYINGBIAN。ZAIBENXIANGMUZHONG，KAOLVDAOCHUANGANQIYAOQIUZHENG、FANXIANG≥150KPaDEGUOZAI，SHEJIPINGMOPIANSHI，JIANGLIANGCHENGSHEJIWEI100KPa，TONGGUOJIANGLIANGCHENGSHIYONGJINXING50KPaDEYALICELIANG，CONGERQUEBAOCHUANGANQIZAIGAOGUOZAIXIAZHENGCHANGGONGZUO。TONGGUODUIGUANGKEBANTUDEHELISHEJI，JIANG4GEYAMINDIANZUJINXINGHELIBUJU，LIYONGPINGMOPIANZHONGXINHEBIANYUANZUIDADEZHENGFUYINGLIGOUCHENGDIANQIAO，CONGERHUODEGAODELINGMINDU。

2.3CHUANGANQIDEJIEGOUSHEJI

YINWEICHANPINSHIWEILIANGCHENGCHAYACESHI，WEIFANGBIANANZHUANG，CESHIYALIDUANYUWAIYINXIANZAIZHOUXIANFANGXIANG，JIANGCANKAOYALIDUANSHEJIYUCESHIYALIDUANCHUIZHI。YINYADUANKOUANZHUANGCHICUNGENJUYONGHUYAOQIUJINXINGSHEJI。ZAICHUANGANQIDEJIEGOUSHEJISHANGWEIJIANQINGZHONGLIANG，CAIYONGLVCAI。WEIBAOHUCHANPINMANZUGAOQIANGDUDEZHENDONGYAOQIU，ZAICHANPINSHANGJIANGMINGANYUANJIANJINXINGJICHENGFENGZHUANG，RANHOUZAIZAIZHENGTIJIEGOUSHANGJINXINGKANGZHENCHULI。RUTONGGUOLUOWENJIAODUISUOYOULIANJIEBUWEIJINXINGJINGU。

2.4CHUANGANQIDEBUCHANGSHEJI

LILUNSHANG，DIANZUBUJUSHEJI、ZHIZAOGONGYIDOULIQIUBAOZHENGSIGEQIAOBEIDIANZUDEZUZHIPIPEI、ZUZHIDEWENDUXISHUPIPEI，DANYOUYUZHIZAOGONGYIZHONGGUANGKE、ZHIBAN、KUOSANDENGGONGYIDEPIANCHA，SHIJISHANG，TONGYIGONGYIZHIZUOXIADESIGEQIAOBEIDIANZUZUZHIHEWENDUXISHUBUKENENGWANQUANYIZHI，CONGERSHICHUANGANQIYOUYIGECHUSHIDELINGDIANSHUCHUHEYIDINGDEWENDUWUCHA，ZHEIGEWUCHACHAOGUOYAOQIUZHI，JIUBIXUDUIQIJINXINGBUCHANG。BENXIANGMUCHANPINZHONG，CHUANGANQIYAOQIUDECHUSHILINGDIAN≤0.2mV，ERQIEZAI-40℃～100℃DEWENDUFANWEINEIRELINGDIANYURELIANGCHENGPIAOYIJUN≤0.02%FS/℃。DUIGUIYAZUSHICHUANGANQI，BIXUTONGGUOGAOJINGDUDEBUCHANG，CAINENGDADAOZHEIGEYAOQIU。

1）LINGDIANBUCHANG

WULUNSHIHENGYAYUANHAISHIHENGLIUYUANGONGDIAN，CHUANGANQIQIAOLUPINGHENGDETIAOJIANDOUSHIDUIBEIDIANZUDECHENGJIXIANGDENG。CHUANGANQIDELINGDIANBUCHANGJIUSHIBAOZHENGDUIBEIDIANZUDECHENGJIXIANGDENG。CAIYONGZAIQIAOLUZHONGCHUANJIEYIGEJINGMIDIANZU，KEYIJINGQUEBUCHANGCHUANGANQIDELINGDIAN。

2）LINGDIANWENPIAOBUCHANG

WULUNSHIHENGYAYUANHAISHIHENGLIUYUANGONGDIAN，YAOJIANXIAOCHUANGANQIRELINGDIANPIAOYI，JIUBIXUSHIDUIBEIDIANZUDECHENGJIXIANGDENGDEQIANTIXIA，DUIBEIDIANZUDEDIANZUWENDUXISHUZHIHEXIANGDENG，HUOZHEDUIBEIDIANZUZHICHENGJIYUQIDIANZUWENDUXISHUZHIHEDECHENGJIYULINGYIDUIBEIDEXIANGDENG。TONGGUOZAIQIAOBEIDIANZUSHANGBINGLIANYIGEZUZHIHENDADANWENDUXISHUBUYIYANGDEBOMODIANZULAIGAIBIANQIAOBEIDIANZUDEWENDUXISHU，CONGERDADAOWENDUXISHUDEPIPEI，SHIXIANDUICHUANGANQIDELINGDIANWENPIAOJINXINGBUCHANG。TONGGUOCESHICHUANGANQIDECHUSHILINGDIANJIQIZAIWENDUSHANGXIAN、XIAXIANSHIDESHUCHU，QIUSUANCHUWENPIAOYULINGDIANDEBUCHANGWEIZHIYUBUCHANGDAXIAO，DUICHUANGANQIDELINGDIANYULINGDIANWENPIAOJINXINGBUCHANG。

2. 5GONGYISHEJI

ZPM410CHAYACHUANGANQIDEGONGYIZHONGDIANZAIMINGANXINPIANDEFENGZHUANGGONGYI，SHEJILEQUANMIFENGFENGZHUANGJIEGOUDUIMINGANXINPIANJINXINGBAOHU。ZPM410XINGYACHACHUANGANQIXINPIANJINXINGDULIFENGZHUANG，JIEGOURUTU1SUOSHI。

TU1  CHUANGANQIXINPIANFENGZHUANGJIEGOUSHIYITU

YAZUSHIYALICHUANGANQIDEFENGZHUANGSHEJIDEZHONGDIANZAIYUBAOZHENGMIFENG、YINGLIXIAO、KANGZHENDENG。FENGZHUANGJIEGOUYUGONGYISHEJISHANGCAIYONGYIXIAJIDIAN：

1）YINWEICESHILIANGCHENGXIAO，CAIYONGZHANJIEJISHU，JIANGGUIBEITONGGUOHUANYANGJIAOYUWAIQIAOGUZHAN，GUIBEIDEZHENGYADUANTONGGUOYIGEΦ2DEXIAOKONGYUCESHIYALIXIANGLIAN。

2）GUIBEIDEFUYADUANQIANRUJINSHUBAOHUCENG，ZHITONGGUOYIGEΦ2mmXIAOKONGYUCANKAODUANYALIXIANGTONG。

3）CAIYONGQIBAOXIANYAHANJISHU，JIANGNEIYINXIANTONGGUOYINXIANZHUWAIYINCHU。

4）YINXIANZHUYUWAIQIAOSHAOJIECHENGYITI，KANGZHENDONGXINGQIANG。

5）GUIBEIDIANZUDUANYUWAIQIAO、YINXIANZHU、JINSHUBAOHUCENGZHIJIANTONGGUOGUANCHONGGUIJIAO，XINGCHENGYITIJIEGOU，TONGSHI，DUIDIANZUQIBAOHUZUOYONG，BAOZHENGCELIANGJINGDU。

2.6FANGANQUEDING

课题组前述的方案设计，泽天传感有关专家对方案进行了评审。评审形成了以下几点主要意见：

1）YONGKUOSANGUIYAZUSHICHUANGANQIJINXINGWEILIANGCHENGCHAYACHANPINSHEJI，TONGGUOGAOJINGDUDELINGDIANBUCHANG、LINGDIANWENPIAOBUCHANG、LIANGCHENGWENPIAOBUCHANGDEZONGTIFANGANKEXING。

2）MINGANXINPIANDEZHIZUOGONGYISHIZHONGDIAN，YAOJINXINGZHONGDIANSHEJIYUZHILIANGBAGUAN，DUISUOYONGDECAILIAOXINGNENGYAOJINXINGQIANTISHIYAN。

3）DUIYUGUIYAZUSHIWEICHAYACHUANGANQI，WENPIAODEBUCHANGYAOYOUBEIXUANFANGAN。TONGGUODUOZHONGBUCHANGSHOUDUANXIANGJIEHELAIBAOZHENGWENPIAOMANZUSHEJIYAOQIU。

4）ZAIBUCHANGFANGANSHANG，YOUYUWAICHUANLINGDIANBUCHANGDIANZUDEWENDUXISHUYUANXIAOYUKUOSANQIAOBEIDIANZUDEWENDUXISHU，JIANGJIQIAOLUYINRUJIAODADEWENDUXISHU，KAOLVZAIMOPIANDEFEIYINGBIANQUSHEJIYIXIEDIANZUWANGLUO，CHUANRUQIAOBEIDIANZUZHONG，TONGGUODUIBUCHANGDIANZUDEXUANQU，LAIBUCHANGQIAOLUDELINGDIAN。YINWEIBUCHANGDIANZUYUQIAOBEIDIANZUJUYOUXIANGTONGDEWENDUXISHU，JINXINGLINGDIANBUCHANGSHI，BUYINGXIANGWENDUPIAOYI。

5）RANHOUTONGGUODUIGEZHONGGUININGJIAOJINXINGBIDUI，JINLIANGXUANYONGJINKOUSHUANGZUFENGUININGJIAODUIGUIBEIJINXINGFENGZHUANG，BAOZHENGZAIHUANJINGWENDUGAIBIANHENDASHI，NEIYINGLIHENXIAO，BUYINGXIANGYINXIANSIYUGUIBEIXINGNENG。

2.7FANGANDEXIANJINXINGHEZHENGQUEXING、SHISHIDEKEXINGXING

CAIYONGGUIYAZUSHICHUANGANQI，SHIXIANWEILIANGCHENGDECHAYACELIANG，BAOZHENGSHUCHULINGMINDUDASHEJIYAOQIU。ZAITONGGUOXIANJINDECHUANJIEDIANZUWANGLUODUICHUANGANQIJINXINGLINGDIANHELINGDIANWENPIAOBUCHANG。CAIYONGWAICHUANREMINDIANZUDUILINGMINDUWENPIAOJINXINGYOUXIAOBUCHANG。XINPIANDEQUANMIFENGJIEGOUTIGAOKANGZHENXINGNENGYUKEKAOXINGNENG。GAIFANGANZHENGQUEYOUXIAO，JUYOUKEZHIXINGXING。ZETIANCHUANGANYOUXIANJINDECHUANGANQISHENGCHAN、KEYANSHEBEI，YOUDUONIANDECHUANGANQISHEJIYANJIUJICHU，ZAICIJICHUSHANGYANJIUWEILIANGCHENGYACHACHUANGANQI，JIBENWUJISHUFENGXIAN，CHANPINYANJIUSHEJIDECAILIAOKETONGGUOXIEZUOYANJIUHUODINGZHIHUODE，WUQITABUKEYUJIANDEYUANCAILIAOHEGUANJIANJISHUFENGXIAN。

3  研制过程

YONGHUZAIYANZHIGUOCHENGZHONG，YAOQIUYACHACHUANGANQIJIEGOUXIAO，CHUANGANXINHAOSHUCHUPEIFANGDADIANLUFANGDADAO0.5V～5VDEBIAOZHUNSHUCHUXINHAO。ZHIBEINENGZAI-40℃～100℃XIAZHUNQUECELIANG50KPaYALIDEMINGANXINPIAN，JINXINGDULIFENGZHUANG，BINGCONGCHUANGANQIJIEGOUSHANGSHIXIANXIAOLIANGCHENG、GAOGUOZAI（ZHENGFANXIANG150KPa）DEYACHACHUANGANQI。ZHENDUIGUIMINGANXINPIANDEZHIZUOYUFENGZHUANG，JINXINGXUANCAISHIYAN、FENGZHUANGCAILIAOYUYINXIANZHUDESHAOJIESHIYANDENG，QUEDINGZUIZHONGDESHEJIFANGAN，ANZHAOSHEJIFANGANCHENGGONGZHIZAOCHUGONGNENGQIQUANDECHANPIN，ZAIZHENDUIJISHUZHIBIAOYAOQIUDECHAJUHEZHUYAOGONGYISHISHIWENTI，FENXIYUANYIN，GAIJINSHEJI。YANZHIFENLIANGFANGMIAN。YIFANGMIANCONGJIEGOU、GONGYI、CAILIAODENGFANGMIANJINXINGSHEJI，HUODE0.2JIJINGDUDEWEICHAYAMINGANXINPIAN。LINGYIFANGMIANJINXINGDIANLUSHEJI，JIANGCHUANGANQISHUCHUXINHAOFANGDADAOBIAOZHUNDE0.5V～5VXINHAO。JINGCESHI，CHANPINDECHANGWENXINGNENGZAI-40℃～100℃MANZUJISHUXIEYIYAOQIUDE0.2JIJINGDU，CHANPINDEWENPIAOYEFUHEJISHUXIEYIYAOQIU。

4  关键工艺技术

4.1TONGCAIZHIBOMOBUCHANGDIANZUDESHEJI

YOUYUZHIZAOGONGYIZHONGGUANGKE、ZHIBAN、KUOSANDENGGONGYIDEPIANCHA，SHIJISHANG，TONGYIGONGYIZHIZUOXIADESIGEQIAOBEIDIANZUZUZHIHEWENDUXISHUBUKENENGWANQUANYIZHI，SHICHUANGANQIYOUYIGECHUSHIDELINGDIANSHUCHUHEYIDINGDEWENDUWUCHA。YOUYUKUOSANDIANZUDUIWENDUHENMINGAN，WENDUXISHUDA，SUIZHEWENDUYUEGAOHUOYUEDI，FEIXIANXINGYEYUEYANZHONG，SUOYI，YIBANCHANPINHENNANBAOZHENGZAI-25℃YIXIAHUO85℃YISHANGDEWENDUXIAYOUGAODECELIANGJINGDUHEXIAODELINGDIANWENPIAOHUOLIANGCHENGWENPIAO。

桥路的初始不平衡可以通过串接或并接外电阻进行补偿。由于串接的电阻为精度合金电阻，温度系数基本为正的，而半导体扩散电阻的温度系数为负的，所以，对桥路进行零点补偿会更加增大传感器的零点温漂。对传感器进行温漂补偿时，不能采用一般的正温度系数的精密合金电阻，只能采用负温度系数的半导体热敏电阻，而这种电阻在宽的环境温度下，温度系数的非线性也很大，对扩散硅传感器进行高精度温漂补偿很难，非线性也较差。

ZHENDUIZHEIZHONGQINGKUANG，ZAIBENXIANGMUZHONG，CONGMINGANXINPIANDEGONGYIYUBANTUSHEJISHANGJIUKAOLVLECHUANGANQIDELINGDIANBUCHANGYUWENPIAOBUCHANG。ZAICHUANGANQIDEFEIYINGBIANQUSHEJIYIXILIEYUQIAOBEIDIANZUTONGCAIZHI、TONGGONGYIDEBUCHANGDIANZUWANGLUO，TONGGUOBUCHANGDIANZUZUZHIDEXUANQU，CHUANJIERUQIAOLUZHONG，DUICHUANGANQIJINXINGLINGDIANBUCHANG。TONGGUOSIGEDIANZUSUODAIBUCHANGDIANZUDEZUHE，NEIZUHUOZHEWAIZUKEYIBUCHANGDEDIANZUFANWEI，SHIQIAOBEIDIANZUDE1.3‰～44‰，ZHEIGEFANWEINENGMANZU90%DECHUANGANQIDELINGDIANBUCHANG，ERQIEBUCHANGDEJINGDUDA0.7‰。JINGSHIYANTONGJI，DUICHUANGANQIYONG10VHENGYAGONGDIANSHI，QIAOLUDELINGDIANSHUCHUJIBENNENGKONGZHIZAI±2000μVFANWEINEI。

4.2JIGUANGXIUZHENGGONGYIDESHEJI

TONGGUOBOMOBUCHANGDIANZUWANGLUODEZUHE，KEYIJIANGCHUANGANQIDELINGDIANKONGZHIZAI±2000μVFANWEINEI，DANCHUANGANQIDELINGDIANSHUCHUYAOQIUMANZU±500μVYAOQIU。ERQIECHUANGANQIJINGGUOGAODIWEN、JIAZAIPILAO、ZHANGQIDELINGDIANSHIPIAOHOU，HAIYAOBAOZHENGSHUCHUZAI±500μVNEI，ZHEIXUYAOZAICHUANGANQIDEZHUANGPEI、DIAOSHIGUOCHENGZHONGFANFUBUCHANG。JINTONGGUODIANZUZUHEHUOWAIBINGDIANZUBUCHANG，GONGYIDIAOSHILIANGDA，YEHENNANZHUNQUEDAOWEI。ZAIBENXIANGMUZHONG，JIARULEXIANJINDEJIGUANGDIAOZUGONGYI，DUIDIANZUTIAODEZUZHIJINXINGXIUZHENG。JIGUANGDIAOZUSHIYITURUTU2。

TU2 JIGUANGDIAOZUSHIYITU

JUJIAODEJIGUANGSHUXIUZHENGDIANZUTIAODEXIANKUAN，DIANZUTONGGUOJIGUANGKEYIDUIDIANZUZHATIAODEKUANDUJINXINGWEILIANGDIAOZHENG，CONGERDIANZUDEZUZHIJINXINGWEILIANGDIAOZHENG，XIUZHENGZHIPIANCHA±0.1Ω，SHIDIANQIAOZUZHIMANZUR1·R3 =R2·R4DEGUANXI（R1、R3WEINEIZU， R2、R4WEIWAIZU）。TONGGUOJIGUANGNENGLIANGDAXIAO、BUJINSUDU、SHUBANDAXIAODENGCANSHUDEDIAOZHENG，KEYIDIAOJIECHUANGANQIDELINGDIANZAI±100μV。JINGGUOGUOCHENGLAOHUAJIHOUQIZHUANGPEI，BAOZHENGCHUANGANQIDEZUIZHONGLINGDIANMANZUXIEYIYAOQIU。

5 结语

通过先进工艺制作的高精度、小量程硅压阻敏感芯片来进行微压差50KPa的测量；通过制作同材质电阻网络进行零点初步补偿，激光调阻工艺进行零点精确修正，保证产品的输出零点为0±0.2mV。通过制作不同温度系数的电阻网络进行零点温漂、灵敏度温漂补偿，保证传感器的温漂≤0.02%FS/℃。通过全封装敏感芯片设计和合理的结构设计，保证传感器有高的抗振性能。ZPM410型压差传感器具有灵敏度高，零点误差与温漂误差小，使用温度范围宽，测量准确等特点，其主要技术指标达到国内先进水平。由于压阻式传感器的温漂补偿难，进一步拓宽传感器的使用温度范围，提高测试精度是今后的工作重点。同时，针对用户要求，保证产品质量与抗高强振动前提下，尽量减小产品的质量。本文源自泽天传感，福彩快三，转载请注明出处。