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泽天ZPM410压差(差压)传感器研制方案报告

发布时间:2019-1-6      发布人:泽天传感      点击:

1  ZPM410压差传感器主要技术指标

1)CELIANGFANWEI: 0~50KPa;

2)JIBENCANSHU (1) JILIDIANYA:±10V.DC;(2) LINGDIANSHUCHU:≤0.2 mV;(3) LIANGCHENGSHUCHU:≥12mV;(4) JUEYUANDIANZU:≥100MΩ/100V.DC。

3)JINGTAIXINGNENG (1) ZHUNQUEDU:0.2JI;(2) FEIXIANXING:0.2%F.S。

4)HUANJINGXINGNENGZHIBIAOYAOQIU  (1) GONGZUOWENDU:-40℃~100℃;(2) CHUCUNWENDU:-40℃~100℃;(3) LINGDIANPIAOYI:0.05%F.S/h;(4) RELINGDIANPIAOYI:0.02%F.S/℃;(5) RELINGMINDUPIAOYI:0.02%F.S/℃。

2 设计与方案

2.1CHANPINYUANLISHEJI

ZPM410YACHACHUANGANQILIANGCHENGXIAO,WEI50KPaCHAYA,CHANPINLINGDIANSHUCHU≤0.2mV,CHANPINMANLIANGCHENGSHUCHU≥12mV,ZAI-40℃~100℃FANWEINEI,CELIANGJINGDU0.2JI,RELINGDIANPIAOYIHERELINGMINDUPIAOYIJUNXIAOYU0.02%FS/℃,ZHEIDUIGAICHANPINDEZONGHEXINGNENGTICHULEHENGAODEYAOQIU。ZHENDUIGAICHANPINDESHIYONGYAOQIUHEJISHUYAOQIU,TICHUYONGGUIYAZUSHICHUANGANQILAISHIXIANXIAOLIANGCHENGDECHAYACELIANG。GUICHUANGANQIDELINGMINDUXISHUDA,WANQUANNENGMANZUGAICHANPINDELINGMINDUYAOQIU,DANGUIYAZUSHIDEWENDUXINGNENGJIAOCHA,ZAICHANPINDESHEJIGUOCHENGZHONG,ZHONGDIANSHEJILINGDIANBUCHANGYUGAOJINGDUDEWENDUBUCHANG。

TONGGUOGUIPINGMIANJICHENGGONGYIJISHUZAIGUIPIANSHANGZHIZUOSIGEKUOSANDIANZUZUOWEIYINGLIMINGANYUANJIAN,YONGJIXIEYANMOJIAGEXIANGTONGXINGHUAXUEFUSHIFANGFAJIANGGUICHENDIJIAGONGCHENGZHOUBIANGUZHIDEPINGMOPIANDANXINGLIXUEJIEGOU。SIGELIMINDIANZU,LIANCHENGHUISIDUNQUANQIAOYINGBIANDIANLU,ZHEIZHONGDIANLUJUYOUZUIGAODELINGMINDU、ZUIHAODEWENDUBUCHANGXINGNENGHEZUIGAODESHUCHUXIANXINGDU。GUIBEISHOUDAOYIGECHAZHIYALI,LIMINDIANZUDEDIANZULVGAIBIAN,YINQIDIANZUZUZHIGAIBIAN。DIANZULVDEGAIBIANSHIYOUYUGUIMOPIANDEXINGBIANYINQIDE,CESHIDUANP1YUYINYADUANP2DEYALICHAYUGUIMOPIANDEXINGBIANCHENGZHENGBI,YEJIUSHIDIANQIAODESHUCHUYUYALICHACHENGZHENGBI。

2.2YAMINXINPIANDESHEJI

WEISHIYONGCHUANGANQIDEXIANXINGDUMANZU0.02%DEYAOQIU,XIANZHIGUIMOPIANSHANGZUIDAYINGBIAN(50KPaYAQIANGSHI)BUCHAOGUO200μεDEWEIYINGBIAN。ZAIBENXIANGMUZHONG,KAOLVDAOCHUANGANQIYAOQIUZHENG、FANXIANG≥150KPaDEGUOZAI,SHEJIPINGMOPIANSHI,JIANGLIANGCHENGSHEJIWEI100KPa,TONGGUOJIANGLIANGCHENGSHIYONGJINXING50KPaDEYALICELIANG,CONGERQUEBAOCHUANGANQIZAIGAOGUOZAIXIAZHENGCHANGGONGZUO。TONGGUODUIGUANGKEBANTUDEHELISHEJI,JIANG4GEYAMINDIANZUJINXINGHELIBUJU,LIYONGPINGMOPIANZHONGXINHEBIANYUANZUIDADEZHENGFUYINGLIGOUCHENGDIANQIAO,CONGERHUODEGAODELINGMINDU。

2.3CHUANGANQIDEJIEGOUSHEJI

YINWEICHANPINSHIWEILIANGCHENGCHAYACESHI,WEIFANGBIANANZHUANG,CESHIYALIDUANYUWAIYINXIANZAIZHOUXIANFANGXIANG,JIANGCANKAOYALIDUANSHEJIYUCESHIYALIDUANCHUIZHI。YINYADUANKOUANZHUANGCHICUNGENJUYONGHUYAOQIUJINXINGSHEJI。ZAICHUANGANQIDEJIEGOUSHEJISHANGWEIJIANQINGZHONGLIANG,CAIYONGLVCAI。WEIBAOHUCHANPINMANZUGAOQIANGDUDEZHENDONGYAOQIU,ZAICHANPINSHANGJIANGMINGANYUANJIANJINXINGJICHENGFENGZHUANG,RANHOUZAIZAIZHENGTIJIEGOUSHANGJINXINGKANGZHENCHULI。RUTONGGUOLUOWENJIAODUISUOYOULIANJIEBUWEIJINXINGJINGU。

2.4CHUANGANQIDEBUCHANGSHEJI

LILUNSHANG,DIANZUBUJUSHEJI、ZHIZAOGONGYIDOULIQIUBAOZHENGSIGEQIAOBEIDIANZUDEZUZHIPIPEI、ZUZHIDEWENDUXISHUPIPEI,DANYOUYUZHIZAOGONGYIZHONGGUANGKE、ZHIBAN、KUOSANDENGGONGYIDEPIANCHA,SHIJISHANG,TONGYIGONGYIZHIZUOXIADESIGEQIAOBEIDIANZUZUZHIHEWENDUXISHUBUKENENGWANQUANYIZHI,CONGERSHICHUANGANQIYOUYIGECHUSHIDELINGDIANSHUCHUHEYIDINGDEWENDUWUCHA,ZHEIGEWUCHACHAOGUOYAOQIUZHI,JIUBIXUDUIQIJINXINGBUCHANG。BENXIANGMUCHANPINZHONG,CHUANGANQIYAOQIUDECHUSHILINGDIAN≤0.2mV,ERQIEZAI-40℃~100℃DEWENDUFANWEINEIRELINGDIANYURELIANGCHENGPIAOYIJUN≤0.02%FS/℃。DUIGUIYAZUSHICHUANGANQI,BIXUTONGGUOGAOJINGDUDEBUCHANG,CAINENGDADAOZHEIGEYAOQIU。

1)LINGDIANBUCHANG

WULUNSHIHENGYAYUANHAISHIHENGLIUYUANGONGDIAN,CHUANGANQIQIAOLUPINGHENGDETIAOJIANDOUSHIDUIBEIDIANZUDECHENGJIXIANGDENG。CHUANGANQIDELINGDIANBUCHANGJIUSHIBAOZHENGDUIBEIDIANZUDECHENGJIXIANGDENG。CAIYONGZAIQIAOLUZHONGCHUANJIEYIGEJINGMIDIANZU,KEYIJINGQUEBUCHANGCHUANGANQIDELINGDIAN。

2)LINGDIANWENPIAOBUCHANG

WULUNSHIHENGYAYUANHAISHIHENGLIUYUANGONGDIAN,YAOJIANXIAOCHUANGANQIRELINGDIANPIAOYI,JIUBIXUSHIDUIBEIDIANZUDECHENGJIXIANGDENGDEQIANTIXIA,DUIBEIDIANZUDEDIANZUWENDUXISHUZHIHEXIANGDENG,HUOZHEDUIBEIDIANZUZHICHENGJIYUQIDIANZUWENDUXISHUZHIHEDECHENGJIYULINGYIDUIBEIDEXIANGDENG。TONGGUOZAIQIAOBEIDIANZUSHANGBINGLIANYIGEZUZHIHENDADANWENDUXISHUBUYIYANGDEBOMODIANZULAIGAIBIANQIAOBEIDIANZUDEWENDUXISHU,CONGERDADAOWENDUXISHUDEPIPEI,SHIXIANDUICHUANGANQIDELINGDIANWENPIAOJINXINGBUCHANG。TONGGUOCESHICHUANGANQIDECHUSHILINGDIANJIQIZAIWENDUSHANGXIAN、XIAXIANSHIDESHUCHU,QIUSUANCHUWENPIAOYULINGDIANDEBUCHANGWEIZHIYUBUCHANGDAXIAO,DUICHUANGANQIDELINGDIANYULINGDIANWENPIAOJINXINGBUCHANG。

2. 5GONGYISHEJI

ZPM410CHAYACHUANGANQIDEGONGYIZHONGDIANZAIMINGANXINPIANDEFENGZHUANGGONGYI,SHEJILEQUANMIFENGFENGZHUANGJIEGOUDUIMINGANXINPIANJINXINGBAOHU。ZPM410XINGYACHACHUANGANQIXINPIANJINXINGDULIFENGZHUANG,JIEGOURUTU1SUOSHI。

TU1  CHUANGANQIXINPIANFENGZHUANGJIEGOUSHIYITU

YAZUSHIYALICHUANGANQIDEFENGZHUANGSHEJIDEZHONGDIANZAIYUBAOZHENGMIFENG、YINGLIXIAO、KANGZHENDENG。FENGZHUANGJIEGOUYUGONGYISHEJISHANGCAIYONGYIXIAJIDIAN:

1)YINWEICESHILIANGCHENGXIAO,CAIYONGZHANJIEJISHU,JIANGGUIBEITONGGUOHUANYANGJIAOYUWAIQIAOGUZHAN,GUIBEIDEZHENGYADUANTONGGUOYIGEΦ2DEXIAOKONGYUCESHIYALIXIANGLIAN。

2)GUIBEIDEFUYADUANQIANRUJINSHUBAOHUCENG,ZHITONGGUOYIGEΦ2mmXIAOKONGYUCANKAODUANYALIXIANGTONG。

3)CAIYONGQIBAOXIANYAHANJISHU,JIANGNEIYINXIANTONGGUOYINXIANZHUWAIYINCHU。

4)YINXIANZHUYUWAIQIAOSHAOJIECHENGYITI,KANGZHENDONGXINGQIANG。

5)GUIBEIDIANZUDUANYUWAIQIAO、YINXIANZHU、JINSHUBAOHUCENGZHIJIANTONGGUOGUANCHONGGUIJIAO,XINGCHENGYITIJIEGOU,TONGSHI,DUIDIANZUQIBAOHUZUOYONG,BAOZHENGCELIANGJINGDU。

2.6FANGANQUEDING

课题组前述的方案设计,泽天传感有关专家对方案进行了评审。评审形成了以下几点主要意见:

1)YONGKUOSANGUIYAZUSHICHUANGANQIJINXINGWEILIANGCHENGCHAYACHANPINSHEJI,TONGGUOGAOJINGDUDELINGDIANBUCHANG、LINGDIANWENPIAOBUCHANG、LIANGCHENGWENPIAOBUCHANGDEZONGTIFANGANKEXING。

2)MINGANXINPIANDEZHIZUOGONGYISHIZHONGDIAN,YAOJINXINGZHONGDIANSHEJIYUZHILIANGBAGUAN,DUISUOYONGDECAILIAOXINGNENGYAOJINXINGQIANTISHIYAN。

3)DUIYUGUIYAZUSHIWEICHAYACHUANGANQI,WENPIAODEBUCHANGYAOYOUBEIXUANFANGAN。TONGGUODUOZHONGBUCHANGSHOUDUANXIANGJIEHELAIBAOZHENGWENPIAOMANZUSHEJIYAOQIU。

4)ZAIBUCHANGFANGANSHANG,YOUYUWAICHUANLINGDIANBUCHANGDIANZUDEWENDUXISHUYUANXIAOYUKUOSANQIAOBEIDIANZUDEWENDUXISHU,JIANGJIQIAOLUYINRUJIAODADEWENDUXISHU,KAOLVZAIMOPIANDEFEIYINGBIANQUSHEJIYIXIEDIANZUWANGLUO,CHUANRUQIAOBEIDIANZUZHONG,TONGGUODUIBUCHANGDIANZUDEXUANQU,LAIBUCHANGQIAOLUDELINGDIAN。YINWEIBUCHANGDIANZUYUQIAOBEIDIANZUJUYOUXIANGTONGDEWENDUXISHU,JINXINGLINGDIANBUCHANGSHI,BUYINGXIANGWENDUPIAOYI。

5)RANHOUTONGGUODUIGEZHONGGUININGJIAOJINXINGBIDUI,JINLIANGXUANYONGJINKOUSHUANGZUFENGUININGJIAODUIGUIBEIJINXINGFENGZHUANG,BAOZHENGZAIHUANJINGWENDUGAIBIANHENDASHI,NEIYINGLIHENXIAO,BUYINGXIANGYINXIANSIYUGUIBEIXINGNENG。

2.7FANGANDEXIANJINXINGHEZHENGQUEXING、SHISHIDEKEXINGXING

CAIYONGGUIYAZUSHICHUANGANQI,SHIXIANWEILIANGCHENGDECHAYACELIANG,BAOZHENGSHUCHULINGMINDUDASHEJIYAOQIU。ZAITONGGUOXIANJINDECHUANJIEDIANZUWANGLUODUICHUANGANQIJINXINGLINGDIANHELINGDIANWENPIAOBUCHANG。CAIYONGWAICHUANREMINDIANZUDUILINGMINDUWENPIAOJINXINGYOUXIAOBUCHANG。XINPIANDEQUANMIFENGJIEGOUTIGAOKANGZHENXINGNENGYUKEKAOXINGNENG。GAIFANGANZHENGQUEYOUXIAO,JUYOUKEZHIXINGXING。ZETIANCHUANGANYOUXIANJINDECHUANGANQISHENGCHAN、KEYANSHEBEI,YOUDUONIANDECHUANGANQISHEJIYANJIUJICHU,ZAICIJICHUSHANGYANJIUWEILIANGCHENGYACHACHUANGANQI,JIBENWUJISHUFENGXIAN,CHANPINYANJIUSHEJIDECAILIAOKETONGGUOXIEZUOYANJIUHUODINGZHIHUODE,WUQITABUKEYUJIANDEYUANCAILIAOHEGUANJIANJISHUFENGXIAN。

3  研制过程

YONGHUZAIYANZHIGUOCHENGZHONG,YAOQIUYACHACHUANGANQIJIEGOUXIAO,CHUANGANXINHAOSHUCHUPEIFANGDADIANLUFANGDADAO0.5V~5VDEBIAOZHUNSHUCHUXINHAO。ZHIBEINENGZAI-40℃~100℃XIAZHUNQUECELIANG50KPaYALIDEMINGANXINPIAN,JINXINGDULIFENGZHUANG,BINGCONGCHUANGANQIJIEGOUSHANGSHIXIANXIAOLIANGCHENG、GAOGUOZAI(ZHENGFANXIANG150KPa)DEYACHACHUANGANQI。ZHENDUIGUIMINGANXINPIANDEZHIZUOYUFENGZHUANG,JINXINGXUANCAISHIYAN、FENGZHUANGCAILIAOYUYINXIANZHUDESHAOJIESHIYANDENG,QUEDINGZUIZHONGDESHEJIFANGAN,ANZHAOSHEJIFANGANCHENGGONGZHIZAOCHUGONGNENGQIQUANDECHANPIN,ZAIZHENDUIJISHUZHIBIAOYAOQIUDECHAJUHEZHUYAOGONGYISHISHIWENTI,FENXIYUANYIN,GAIJINSHEJI。YANZHIFENLIANGFANGMIAN。YIFANGMIANCONGJIEGOU、GONGYI、CAILIAODENGFANGMIANJINXINGSHEJI,HUODE0.2JIJINGDUDEWEICHAYAMINGANXINPIAN。LINGYIFANGMIANJINXINGDIANLUSHEJI,JIANGCHUANGANQISHUCHUXINHAOFANGDADAOBIAOZHUNDE0.5V~5VXINHAO。JINGCESHI,CHANPINDECHANGWENXINGNENGZAI-40℃~100℃MANZUJISHUXIEYIYAOQIUDE0.2JIJINGDU,CHANPINDEWENPIAOYEFUHEJISHUXIEYIYAOQIU。

4  关键工艺技术

4.1TONGCAIZHIBOMOBUCHANGDIANZUDESHEJI

YOUYUZHIZAOGONGYIZHONGGUANGKE、ZHIBAN、KUOSANDENGGONGYIDEPIANCHA,SHIJISHANG,TONGYIGONGYIZHIZUOXIADESIGEQIAOBEIDIANZUZUZHIHEWENDUXISHUBUKENENGWANQUANYIZHI,SHICHUANGANQIYOUYIGECHUSHIDELINGDIANSHUCHUHEYIDINGDEWENDUWUCHA。YOUYUKUOSANDIANZUDUIWENDUHENMINGAN,WENDUXISHUDA,SUIZHEWENDUYUEGAOHUOYUEDI,FEIXIANXINGYEYUEYANZHONG,SUOYI,YIBANCHANPINHENNANBAOZHENGZAI-25℃YIXIAHUO85℃YISHANGDEWENDUXIAYOUGAODECELIANGJINGDUHEXIAODELINGDIANWENPIAOHUOLIANGCHENGWENPIAO。

桥路的初始不平衡可以通过串接或并接外电阻进行补偿。由于串接的电阻为精度合金电阻,温度系数基本为正的,而半导体扩散电阻的温度系数为负的,所以,对桥路进行零点补偿会更加增大传感器的零点温漂。对传感器进行温漂补偿时,不能采用一般的正温度系数的精密合金电阻,只能采用负温度系数的半导体热敏电阻,而这种电阻在宽的环境温度下,温度系数的非线性也很大,对扩散硅传感器进行高精度温漂补偿很难,非线性也较差。

ZHENDUIZHEIZHONGQINGKUANG,ZAIBENXIANGMUZHONG,CONGMINGANXINPIANDEGONGYIYUBANTUSHEJISHANGJIUKAOLVLECHUANGANQIDELINGDIANBUCHANGYUWENPIAOBUCHANG。ZAICHUANGANQIDEFEIYINGBIANQUSHEJIYIXILIEYUQIAOBEIDIANZUTONGCAIZHI、TONGGONGYIDEBUCHANGDIANZUWANGLUO,TONGGUOBUCHANGDIANZUZUZHIDEXUANQU,CHUANJIERUQIAOLUZHONG,DUICHUANGANQIJINXINGLINGDIANBUCHANG。TONGGUOSIGEDIANZUSUODAIBUCHANGDIANZUDEZUHE,NEIZUHUOZHEWAIZUKEYIBUCHANGDEDIANZUFANWEI,SHIQIAOBEIDIANZUDE1.3‰~44‰,ZHEIGEFANWEINENGMANZU90%DECHUANGANQIDELINGDIANBUCHANG,ERQIEBUCHANGDEJINGDUDA0.7‰。JINGSHIYANTONGJI,DUICHUANGANQIYONG10VHENGYAGONGDIANSHI,QIAOLUDELINGDIANSHUCHUJIBENNENGKONGZHIZAI±2000μVFANWEINEI。

4.2JIGUANGXIUZHENGGONGYIDESHEJI

TONGGUOBOMOBUCHANGDIANZUWANGLUODEZUHE,KEYIJIANGCHUANGANQIDELINGDIANKONGZHIZAI±2000μVFANWEINEI,DANCHUANGANQIDELINGDIANSHUCHUYAOQIUMANZU±500μVYAOQIU。ERQIECHUANGANQIJINGGUOGAODIWEN、JIAZAIPILAO、ZHANGQIDELINGDIANSHIPIAOHOU,HAIYAOBAOZHENGSHUCHUZAI±500μVNEI,ZHEIXUYAOZAICHUANGANQIDEZHUANGPEI、DIAOSHIGUOCHENGZHONGFANFUBUCHANG。JINTONGGUODIANZUZUHEHUOWAIBINGDIANZUBUCHANG,GONGYIDIAOSHILIANGDA,YEHENNANZHUNQUEDAOWEI。ZAIBENXIANGMUZHONG,JIARULEXIANJINDEJIGUANGDIAOZUGONGYI,DUIDIANZUTIAODEZUZHIJINXINGXIUZHENG。JIGUANGDIAOZUSHIYITURUTU2。

TU2 JIGUANGDIAOZUSHIYITU

JUJIAODEJIGUANGSHUXIUZHENGDIANZUTIAODEXIANKUAN,DIANZUTONGGUOJIGUANGKEYIDUIDIANZUZHATIAODEKUANDUJINXINGWEILIANGDIAOZHENG,CONGERDIANZUDEZUZHIJINXINGWEILIANGDIAOZHENG,XIUZHENGZHIPIANCHA±0.1Ω,SHIDIANQIAOZUZHIMANZUR1·R3 =R2·R4DEGUANXI(R1、R3WEINEIZU, R2、R4WEIWAIZU)。TONGGUOJIGUANGNENGLIANGDAXIAO、BUJINSUDU、SHUBANDAXIAODENGCANSHUDEDIAOZHENG,KEYIDIAOJIECHUANGANQIDELINGDIANZAI±100μV。JINGGUOGUOCHENGLAOHUAJIHOUQIZHUANGPEI,BAOZHENGCHUANGANQIDEZUIZHONGLINGDIANMANZUXIEYIYAOQIU。

5 结语

通过先进工艺制作的高精度、小量程硅压阻敏感芯片来进行微压差50KPa的测量;通过制作同材质电阻网络进行零点初步补偿,激光调阻工艺进行零点精确修正,保证产品的输出零点为0±0.2mV。通过制作不同温度系数的电阻网络进行零点温漂、灵敏度温漂补偿,保证传感器的温漂≤0.02%FS/℃。通过全封装敏感芯片设计和合理的结构设计,保证传感器有高的抗振性能。ZPM410型压差传感器具有灵敏度高,零点误差与温漂误差小,使用温度范围宽,测量准确等特点,其主要技术指标达到国内先进水平。由于压阻式传感器的温漂补偿难,进一步拓宽传感器的使用温度范围,提高测试精度是今后的工作重点。同时,针对用户要求,保证产品质量与抗高强振动前提下,尽量减小产品的质量。本文源自泽天传感,福彩快三,转载请注明出处。