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用于溅射压力传感器制造的离子束溅射设备

发布时间:2020-10-14      发布人:泽天科技      点击:

溅射压力传感器的核心部件是其敏感芯体(也称敏感芯片),纳米薄膜压力传感器福彩快三大规模生产首要解决敏感芯片的规模化生产。一个典型的敏感芯片是在金属弹性体上溅射淀积四层或五层的薄膜。其中,关键的是与弹性体金属起隔离的介质绝缘膜和在绝缘膜上的起应变作用的功能材料薄膜。

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离子束溅射技术和设备的这些优点,成为国内外生产溅射薄膜压力传感器的主导技术和设备。这种离子束共溅射薄膜设备除可用于制造高性能薄膜压力传感器的各种薄膜外,还可用于制备集成电路中的高温合金导体薄膜、贵重金属薄膜;用于制备磁性器件、磁光波导、磁存贮器等磁性薄膜;用于制备高质量的光学薄膜,特别是激光高损伤阈值窗口薄膜、各种高反射率、高透射率薄膜等;用于制备磁敏、力敏、温敏、气温、湿敏等薄膜传感器用的纳米和微米薄膜;用于制备光电子器件和金属异质结结构器件、太阳能电池、声表面波器件、高温超导器件等所使用的薄膜;用于制备薄膜集成电路和MEMS系统中的各种薄膜以及材料改性中的各种薄膜;用于制备其它高质量的纳米薄膜或微米薄膜等。本文源自泽天传感福彩快三,转载请保留出处。