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化学机械抛光CMP设备行业的国际发展现状

发布时间:2019-9-29      发布人:泽天科技      点击:

ZUIZAODECMPJISHUSHIYOUIBMGONGSIYU80NIANDAIZHONGQILIYONGStrasbaughGONGSIDEPAOGUANGJIZAIEast FishkillGONGCHANGJINXINGGONGYIDEKAIFA。1988NIAN,IBMKAISHIJIANGCMPGONGYIYONGYU4MDRAMQIJIANDEZHIZAO。DAO1990NIAN,IBMGONGSIBIANXIANGMicron TechnologyGONGSICHUSHOULECAIYONGCMPJISHUDE4MDRAMGONGYI。CIHOUBUJIU,YOUYUMotorolaGONGSIHEZUO,GONGTONGJINRUWEIPINGGUOJISUANJIGONGSISHENGCHANPCJIQIJIANDEXINGLIE。CONGCIGEZHONGLUOJIDIANLUHECUNCHUQIBIANYIBUTONGDEFAZHANGUIMOZOUXIANGCMP。DAO1994NIAN,SUIZHE0.5μmQIJIANDEPILIANGSHENGCHANHE0.35μmGONGYIDEKAIFA,CMPGONGYIBIANZHUJIANJINRUSHENGCHANXIAN,SHEBEISHICHANGCHUBUXINGCHENG。

福彩快三 CMPJISHUFAZHANLICHENGKEYIFENWEISANGEJIEDUAN:DIYIJIEDUANWEITONGGONGYIYIQIAN。ZAITONGBUXIANGONGYIZHIQIAN,CMPZHUYAOYANMODECAILIAOWEIWUHEYANGHUAWU;DIERJIEDUANWEI1997NIAN~2000NIAN。ZAIJINRUJINSHUSHUANGQIANGONGYIZHIHOU,YANMOCAILIAOCONGERYANGHUAGUITUOZHANDAOFUGUISUANYANBOLI(FSG),ZHEIGEJIEDUANYEDUIYINGYUCONG0.25μmJINRU0.13μmGONGYI;DISANJIEDUANSHICAIYONGTONGHULIANHEDIKJIEZHISHIQI。CMPYANMODUIXIANGZHUYAOWEINEIBUHULIANCENGHEQIANGOUDAOGELI(STI)CENG。YANMODECAILIAOWEITONGHEJIEZHICAILIAO。MUQIAN,CMPJISHUYIJINGFAZHANCHENGYIHUAXUEJIXIEPAOGUANGWEIZHUTI,JICHENGZAIXIANJIANCE、QINGXI、GANZAODENGJISHUYUYITIDEHUAXUEJIXIEPINGTANHUAJISHU。

GUOWAIZHULIUHUAXUEJIXIEPAOGUANG(CMP)GONGYINGSHANGZHUYAOYOUApplied Material、Peter wolters、Ebara、Novellus、Speedfam-IPECHEDONGJINGJINGMILIUJIA,TUICHUDECMPSHEBEIZHUYAOZHENDUIDACHICUN(200mm~300mm)GUIPIANJIAGONGHEJICHENGDIANLUZHIZAO(90nmJIEDIANYIXIA)TONGHULIANGONGYILINGYU。MUQIAN,GUOJISHANGTUICHUDE300mmCMPCHANPINYOU:Applied materialDEReflexionTMXILIE,Peter woltersDEApollo PM300XING,EbaraDEFREX300XING、NovellusDEXcedaTMXILIEHESpeedfam-IPECDEMomentum 300TMSHEBEI。QIZHONG,Applied material、NovellusDECMPSHEBEIZHUYAOYINGYONGZAIICZHIZAOTONGHULIANGONGYILINGYU。Peter woltersHESpeedfam-IPECDECMPSHEBEIZAIGUIPIANJIAGONGLINGYUYINGYONGJIAOWEIPUBIAN。

美国Applied material

福彩快三 MEIGUOYINGYONGCAILIAOGONGSISHIQUANQIUZUIDADEBANDAOTISHEBEIGONGYINGSHANG,YESHIMUQIANGUOJISHANGZUIDADECMPSHEBEIGONGYINGSHANG,ZHANJUZHEGUOJISHANG60%YISHANGDECMPSHICHANG。Applied MaterialGONGSIYU1997NIANTUICHUQIDIYITAIMirra CMPCHANPIN,ZHIHOUPINGJIEQIQUANQIUFUWUHEXINGNENGBAOZHENGZIYUANYOUSHI,TONGGUOJIANBINGObsidianGONGSI,ZAIDUANDUAN5-6NIANNEI,BIANXIANGSHICHANGCHUSHOULE1000DUOTAICMPSHEBEI,YIYUECHENGWEICMPSHEBEISHICHANGDEBAZHU。Applied MaterialGONGSIZHUANZHUYUXUANZHUANXINGCMPSHEBEI,CHANGCAIYONGYANGHUASHI(Ce)YANMOYE,ZAISTI CMPGONGYIFANGMIANYIJINGCHENGSHU。QIZAIYONGYUICZHIZAODETONGCMPSHICHANGZHONGYIZHANJU80%DEFENE。AMGONGSIZUIXINDEReflexion LKSHIQIDESHENGJICHANPIN,CAIYONGLEZETIANCHUANGANGENGLINGHUODESHEJIPINGTAI,SHIZHENDUI130nm-65nmDELIANGCHANSHEBEI。

福彩快三 TU1 Applied MaterialsGONGSIReflexionTM-LK 300XINGSHEBEIWAIXINGTU

德国Peter wolters

Peter woltersWEIOUZHOUZHIMINGDEBANDAOTISHEBEIZHIZAOSHANG,YIZHIZHUANZHUYUCMPSHEBEIDEYANFA,ZAIGUICAILIAOCMPLINGYUYOUZHEDUTEDESHEJIHELIJIE。Peter woltersGONGSISHENGCHANDECMPSHEBEIZHUYAOYOU:PM200-Apollo、PM 200 GEMINI、PM300-Apollo、HFP 200、HFP 300DENG。JUNWEIXUANZHUANSHICMPSHEBEI,QIZHONGPM300-ApolloXINGWEI300mmGUIPIANCMPJIAGONGSHEBEI,KEGENJUBUTONGPEIZHISHIXIAN“GANJINSHICHU”HUO“GANJINGANCHU”DEGONGNENG。HFP 300WEIPeter woltersKAIFADEZUIXINDE300mmGUIPIANJIAGONGSHEBEI,SHENGCHANXIAOLVGENGGAOYIXIE。

TU2 Peter WoltersGONGSIHFP300XINGSHEBEIWAIXINGTU

日本荏原(Ebara)制造所

RIBENRENYUAN(Ebara)DEXUANZHUANSHICMPPAOGUANGSHEBEIJINJINIANYIZHIBAOCHIZHEQUANQIUDIERDEXIAOSHOULIANG。ZHUYAODESHEBEIXINGHAOYOUF*REX200XING、F*REX300XING。QIZHONGFREX300XINGSHIZHENDUI300mmDEICZHIZAOSHEBEI。TONGSHI,GAIGONGSIZHENGJIANGDIANCHANGYANMOJISHU、SHIKEJISHUHECHAOCHUNSHUIYANMOYEJISHUYONGYU65nmJIEDIANDECu/LKDEDIYAHUAXUEJIXIEPAOGUANGSHEBEIKAIFA。DAOMUQIANWEIZHI,GAIGONGSIYICHUSHOU800DUOTAI200mmYUANPIANCMPSHEBEI,100DUOTAI300mmYUANPIANCMPSHEBEI。

TU3 RIBENRENYUAN(Ebara)ZHIZAODEF*REX300XINGSHEBEIWAIXINGTU

YISHANGSANJIAGUOJIZHULIUSHEBEIXINGNENGPEIZHIJIANBIAO1。CONGBIAOZHONGKEYIFAXIAN,BUTONGGONGSIDECHANPIN,JISHUCANSHUYUPEIZHIDATONGXIAOYI,ZHEISHUOMINGCMPGONGYIYIXIANGDUICHENGSHU,BIJIAOWENDING。

福彩快三 SHEBEIGONGYINGSHANG

Applied material

Peter Wolters

Ebara

型号

Reflexion-LK300

HFP300

PM300 Apollo

F*REX300

晶片直径

300 mm

300 mm

300 mm

300 mm

系统结构

干进干出

4抛光头/3抛光台

干进湿出

4抛光头/2抛光台

干进湿出

2抛光头/4抛光台

干进湿出

2抛光头/2抛光台

晶片传输方式

自动传输

自动传输

自动传输

自动传输

抛光头

转速

30-200 rpm

0-120rpm

0-125rpm

10-120rpm

背压

10-180kPa

0-200kPa

0-200kPa

5-70kPa

下压力

345N-3450N

300-5000N

0-4000N

10-70kPa

抛光台

直径

/

900mm

主抛光台:900mm

次抛光台:430mm

900mm

转速

30-200 rpm

0-125rpm

主抛光台:0-125rpm

次抛光台:0-125rpm

10-150rpm

温度

/

20-60

主抛光台:20-60

次抛光台:20-60

20-60

抛光垫修整盘

下压力

/

0-350N

0-350N

50-300N

直径

/

120mm

120mm

260mm

转速

/

0-80rpm

0-80rpm

10-150rpm

泽天传感

 

 

 

金刚砂盘

控制界面

SECS II / SEMI

SECS II /GEM

SECS II /GEMCIM

SEMI

应用领域

铜互连平坦化

硅片加工

硅片加工

硅片加工