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蓝宝石高温压力传感器的工作原理与优点

发布时间:2020-9-11      发布人:泽天传感      点击:

蓝宝石是Al₂O3的晶体结构,熔点达到2040℃,具有良好的光学特性、绝缘性,在1500℃时机械性能良好,是制备高温传感器的理想材料。目前基于蓝宝石的高温传感器主要有两大类,下面分类介绍。

1、基于SOS(Silicon on Sapphire)结构的应变式压力传感器

蓝宝石高温压力传感器是一种应变电阻式工作原理,采用硅-蓝宝石作为半导体压力敏感元件,具有较好的的计量特性。蓝宝石是由单晶体绝缘体元素组成,一般不会发生滞后、疲劳和蠕变现象;蓝宝石比硅要坚固,硬度更高,不怕形变;蓝宝石有着非常好的弹性和绝缘特性(1000℃以内),因此,利用硅-蓝宝石制造的半导体压力敏感元件,对温度变化不敏感,即使在高温条件下,压力传感器也有着很好的工作特性;蓝宝石的抗辐射特性比较好;另外,硅-蓝宝石半导体压力敏感元件,无p-n漂移,因此,从根本上简化了制造工艺,提高了重复性,确保了高成品率。

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2、蓝宝石光纤式高温压力传感器

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蓝宝石光纤式高温压力传感器

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