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溅射压力传感器敏感芯体薄膜的结构及技术要求

发布时间:2020-6-18      发布人:泽天传感      点击:

溅射薄膜压力传感器敏感芯体的功能薄膜一般采用多层薄膜结构,这些功能薄膜一般是采用真空离子束溅射工艺生产,由于敏感薄膜厚度一般在100nm以下,因此我们也称其为纳米薄膜,采用离子束溅射工艺生产制造的压力传感器有时称为纳米薄膜压力传感器。泽天传感是这种薄膜压力传感器的专业制造厂家

溅射压力传感器

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根据薄膜压力传感器福彩快三的薄膜所起作用的不同,对各层薄膜的质量要求也不同,对于绝缘薄膜,要求应变电阻与传感器的壳体间的绝缘性电阻为100000MΩ以上,耐压100VDC以上,而绝缘电阻5000MΩ以上。同时,绝缘薄膜与弹性体的表面粘附力高。在量程范围内,弯曲变形超过10000000次循环不失效。要求绝缘薄膜与弹性体的热膨胀系数基本一致,不因它们之间的差异引起内应力,从而造成传感器的输出不稳定,对制成的薄膜压力传感器蠕变要小。除金属弹性体的严格热处理外,要求沉积在其上的介质绝缘薄膜附着力高、致密无针孔、空洞等缺陷。如有蠕变产生,则会增加零点漂移误差,降低传感器的非线性。绝缘薄膜含杂质量少,无吸附气体。这样,能防止使用过程中杂质的迁移和气体释放所造成绝缘性能降低,漏电流增大,甚至绝缘失效。总之,介质绝缘膜层要具有高的电阻系数;高的击穿电压;优良的绝缘性能;对弹性体的良好附着性;良好的弹性变形的传递性;高的热稳定性。

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综上所述,溅射薄膜压力传感器对各层薄膜质量总的要求主要是机械特性与电气特性。机械特性包括:薄膜的附着力,内应力,热应力,受力形变后弹性好,热膨胀系数小等。电气特性主要是介质膜的绝缘性能好,击穿强度高,漏电流小,金属薄膜的方块电阻适中,电阻值的稳定性好。薄膜压力传感器薄膜的机械特性、电特性,主要依赖于薄膜制备设备及制备工艺技术,由于薄膜形成过程非常复杂,即使是同一生产设备制造的薄膜,其质量差异有时也有较大的差异。本文源自泽天传感,福彩快三,转载请保留出处。