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浅谈应变式溅射压力传感器的补偿电阻及选用

发布时间:2020-6-9      发布人:泽天传感      点击:

高精度溅射传感器在制造中还需要一系列的补偿用来改善传感器的技术参数,主要是灵敏度温度补偿、灵敏度补偿、零点平衡补偿、零点温度补偿。下面主要介绍应变式溅射压力传感器各种补偿的方法及补偿电阻器的选用。

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零点温度补偿原理基本和零点平衡补偿相似,只不过需要在模拟温度场下完成。举例说明,我们设定应变计R1、R3感受亚向应变(负应变)、应变计R2、R4感受拉向应变(正应变)。如果零点输出(以正温为例,正温下的零点输出与常温零点输出差值即为零点温度输出)为正,那么,应该将fg端电阻增大到计算的阻值(即通过打磨的方式将其电阻值增大),然后检测温度零位输出再进行调整,直到零位输出与初始零点一致为止;如果零点输出为负,那么,应该将ef端电阻增大(即通过打磨的方式将其电阻值增大),然后检测温度零位输出再进行调整,直到零位输出与初始零点一致为止。本文源自泽天传感,转载请保留出处。