福彩快三

泽天新闻
联系泽天   Contact

新型薄膜温度、薄膜高温压力传感器的研制

发布时间:2020-1-18      发布人:泽天传感      点击:

被称为“第三代传感器”的薄膜压力传感器,是国外80年代后针对新型武器装备的发展而开发的传感器新品种,其优越的耐恶劣环境性能受到世界各国的重视。

BOMOGAOWENYALICHUANGANQI:ZAICHAOYINSUFEIXINGQIZHONG,YEYAXITONGSHIFEIJIDEGUANJIANXITONGZHIYI,YEYAXITONGCAIYONGYEYAYOUZUOWEIGONGZUOJIEZHI,YIDANYEYAYOUDEYALIXIAOSHI,FEIJIJIANGWUFASHIXIANFEIJIDEKONGZHIHEJIANGLUO。GAIYANZHICHANPINYONGYUCELIANGGAODA200℃DEGAOWENLIUTI。QIZHUYAOYANZHINANDIANSHIHUANJINGWENDUGAO,YALIGAO,ZHENDONGQIANG,DIANCIGANRAODA。YANJIULUXIANSHIZAIXIANYOUDEJISHUJICHUSHANG,YANJIUJIEJUEMINGANCAILIAOHEBOMODENAIGAOWENWENTI,JIEJUEQIANGDIANCIGANRAOWENTI。

薄膜高温压力传感器

BOMOGAOWENRELIUCHUANGANQI:YONGYUCELIANGFEIJIQIAOTIZAIGAOCHAOYINSUFEIXINGZHUANGTAIYUKONGQIMOCASUOCHANSHENGDERELIANG。JIZAISHIYANDAYUEXUYAOSHIYONG300DUOGECHUANGANQIYICELIANGQIAOTIBUTONGXINGZHUANGBUWEIDEREKUANG,DINGXINGFEIJIDEJIANKANGGUANLIXITONGZHONGRENGRANXUYAOSHIYONGDUOGECHUANGANQIJIANCEGUANJIANBUWEIDEFAREZHUANGKUANG。GAIJISHUCHENGGUOHAIKEYONGYUDANTOUCAILIAODESHEJISHIYAN。QIZHUYAOYANZHINANDIANSHIGONGZUOWENDUGAODA1200℃,XIANGYINGSHIJIANXIAOYU100μs,QIEYAOQIUTIJIQINGQIAO,BIANYUYUJIQIAOJINGUANZHUANG。YANJIULUXIANSHICAIYONGLIZISHUJIANSHEHEGANFAKESHIJISHUZAITAOCIJIPIANSHANGZHIZAOREMINDIANZUBOMODIANQIAO,BUTONGQIAOBEISHANGZAIDIANJIBUTONGHOUDUDEZUREBOMO,YIFENBIEGANCEDUIJIRELIANGHESHUNBIANRELIANG,TONGGUODIANQIAOSHUCHUYIDINGMIANJINEIDESHUNBIANWENDU,ZAITONGGUOWEIDIANLUZHUANHUANCHENGRELIANGXINHAOSHUCHU。

福彩快三 BOMOTUILICHUANGANQI:ZAICHAOYINSUFEIXINGQIZHONG,YOUDUOGEFANZUOYONGLIKONGZHIXITONG、KONGZHONGBIANGUIHEZITAIKONGZHIXITONG,ZHEIXIEXITONGDOUSHITONGGUOPENSHEGAOYAQITILAIDIAOJIE、KONGZHIFEIXINGQIDEZITAIHEYUNXINGGUIDAO,BOMOTUILICHUANGANQIYONGYUCELIANGPENSHEQITISHICHANSHENGDEFANTUILI。GAICHUANGANQIDEZHUYAOYANZHINANDIANSHIXIANGYINGSHIJIANYAODADAO2ms,BINGKECELIANGGAOSUMAIDONGQITIERBUCHANSHENGZIZHENXIAOYING。YANJIULUXIANSHISHEJIYIZHONGYIXINGJIEGOUDEYUANZHUXINGZHICHENGYINGBIANTI,ZAIJUXIANYAANBOMOSHANGZHIZUOJINSHUDIANZUYINGBIANBOMODIANQIAO,JIANGYINGBIANDIANQIAOZHANJIEDAOZHUXINGYINGBIANTISHANGXINGCHENGCHUANGANQI,BIMIANCHUANTONGDEXUANBEILIANGCHUANGANQIZAISHOUDAOZHONGFUDEMAICHONGLIZUOYONGSHIFASHENGXIEZHENDEWENTI,TONGSHIYUANZHUTIZHONGXINKEZHIJIECHUANGUOQITIPENGUAN,JIEJUECHUANTONGDECELIANGZHUANGZHIXUYAOJIANGPENGUANWANQUDEWENTI,TIGAOCELIANGDEZHENSHIXINGHEZHUNQUEDU。

福彩快三 BOMOYITIHUAGAOWENYALIWENDUCHUANGANQI:YONGYUCESHIFEIJISHANGRCSXITONGZHONGCHUQIPINGNEIJISHUQIGUANDAONEIDEYALIHEWENDU。RCSXITONGYONGYUFEIJIZITAIDEDIAOZHENG,GAOYACHUQIPINGNEIYALIGAODA60MPa,SHUQIGUANDAONEIDEYALIWEI5MPa,YOUYUZAIGAOYACHUQIPINGSHANGKAIDUOGEJIEKOUHUIYINGXIANGQIPINGDEQIANGDU,YINCIYAOZAIYIGEJIEKOUSHANGSHIXIANYALIHEWENDUDETONGSHICELIANG,SUOXIAOCHANPINTIJI、JIANQINGZHENGJICHANPINZHONGLIANG。MEIJIADAYUEYOU4-8GETONGDAOXUYAOANZHUANGGAICHANPIN。QIZHUYAOYANZHINANDIANSHICELIANGJIEZHIYALIGAO、YAOQIUZHENGTICHICUNXIAO,HUANJINGZHENDONGQIANG、DIANCIGANRAOQIANG。YANJIULUXIANSHICAIYONGLIZISHUJIANSHEHEGANFAKESHIJISHUZAIBUXIUGANGDANXINGJIPIANSHANGTONGSHIZHIZAOYALIMINGANDIANQIAOHEREMINBOMODIANZU,ZAIDANXINGJIPIANSHANGDUZHIDUOCENGWENDINGDEBOMOZUCHENGYALI-WENDUMINGANYUANJIAN,ZAITONGGUOWEIDIANLUZHUANHUANCHENGZHUNQUEDEBIAOZHUNXINHAOSHUCHU。

薄膜快速响应温度传感器:用于飞机液压系统液压油温的测量。该传感器的主要研制难点是,敏感元件要设计在可承受40MPa高压的防护壳内,响应时间要小于100mS。研究路线是采用离子束溅射和干法刻蚀技术在快速传热的基片上制造热敏薄膜电阻。本文源自泽天传感,转载请保留出处。