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高温压力传感器与SOI材料产业化可行性研究报告

发布时间:2020-6-8      发布人:泽天传感      点击:

1、项目提出的背景、必要性及意义

YOUYUGUOWAISOICAILIAOJIAGEANGGUI,ERQIEDUIWOGUOFENGSUOJINYUN,GUONEIYANJIUDANWEIHESHENGCHANCHANGJIANANYIKAIZHANYANZHIHESHENGCHANSOIJICHENGDIANLU,ZAI21SHIJICHUGENBENBUKENENGYILAIJINKOUSHIXIANWOGUODIANZI、XINXIDENGGAOKEJIDEFAZHANHEGUOFANGDEXIANDAIHUAJINCHENG。RUGUOWOMENNENGSHIXIANSOICAILIAODEGUOCHANHUA,JIUKEYIPILIANGSHENGCHANGEZHONGXILIEJUNYONGJIXUDESOIKANGFUZHAO、WUSUODING、GAOSUDU、DIGONGHAODEJICHENGDIANLUHEGEZHONGGAOXINGNENGDEGAOWENCHUANGANQI,ZHUANGBEIWOGUODEWEIXING、HUOJIAN、DAODANHEYUZHOUFEICHUANDEDIANZIKONGZHIXITONG,TIGAOZHEIXIEWUQIZHUANGBEIDESHIYONGSHOUMING、KONGZHIJINGDUHEANQUANKEKAOXING,TIGAOWOGUODEGUOFANGSHILI。TONGSHI,WEISOIQIJIANZAIYIDONGTONGXUN、JISUANJI、QICHE、HANGKONGHANGTIAN、HENENGHESHIYOUTILIANDENGMINYONGGAOKEJILINGYUDEDAGUIMOTUIGUANGYINGYONG,TIGONGJISHUHECHANYEHUADEZHICHI。

MUQIAN,MEIGUONENGGOUZHIBEICHUDESHANGYONGSOIGUIPIAN,SUIRANPINZHISHANGWEIWANSHAN,DANQISHOUJIAANGGUI。RUGUOKENENGLVXIANSHIXIANSOICAILIAODECHANYEHUA,BIJIANGJINYIBUTUIJINQUANGUODIANZIXINXICAILIAOLINGYUDEFAZHAN,DAILAIJUDADEJINGJIXIAOYIHESHEHUIXIAOYI。

2、SOI的用途与技术发展现状

SOI材料是21世纪最重要的硅集成电路材料。由于材料的特殊结构,决定了用SOI材料制作的器件具有极低的寄生电容和极低的工作电压,能减少短沟道效应和热电子效应的影响,同时具有无闩锁、低漏电、低功耗、速度快和高驱动能力,耐高温和抗辐照能力强,集成度高和工艺简单等优点。可用于制造低压、低功耗器件和高温器件(工作温度可达300℃,例如高温压力传感器)。在CMOS/SOI电路中,因辐照产生的光电流比体硅CMOS电路小近3个数量级,抗瞬态辐照能力和抗中子辐照的能力远高于体硅CMOS电路。

SOIQIJIANZHUYAOYONGYUJISUANJI、QICHE、HANGKONGHESHIYOUTILIANDENGXUYAODEDIYA、DIGONGHAOHEGAOWENQIJIANYIJIJUNSHIWEIDIANZIHANGKONGHANGTIANZHONGWEIXINGHEDAODANSHANGYONGDEKANGFUZHAODIANLU。YOUYUSOICAILIAO,TEBIESHIBOMOSOIJIEGOUCAILIAOYOUXIAODIKEFULETIGUICAILIAODEBUZU,CHONGFENFAHUILEGUIJICHENGJISHUDEQIANLI,TAZAIGAOXINGNENGDEULSI、GAOYA、GAOWEN、KANGFUZHAO、DIYADIGONGHAOJISANWEIJICHENGDIANLULINGYUZHONG,JUNYOUJIQIGUANGFANDEYINGYONGQIANJING。SOICAILIAOSHIZHIZAOGUOFANGHEJINGJIJIANSHEZHONGXUYAODECHAOGAOSUXINHAOCHULIHEQIANGKANGHEFUSHENENGLIDEJISUANJIJIKONGZHIBUJIANDELIXIANGCAILIAO。SOIJISHUCHENGWEIGUOFANGWEIDIANZIJIANDUANJISHU。ZHIBEISOICAILIAODEJISHUYOUDUOZHONG,LIRUGUIWAIYANHENGXIANGSHENGZHANG、ERYANGHUAGUISHANGDEDUOJINGGUIHUOFEIJINGGUIDEZAIJIEJING、GUIPIANJIANHEJIFUSHIJIANBOJISHU(BESOI,Bond and etch back)、YANGLIZIZHURUGELIJISHUSIMOX(Separation by implanted oxygen)HEZHINENGBOLIJISHU(Smart-cut,JIYONGJIANHEFANGFAJIANGZHANGYOUYANGHUACENGDEGUIPIANHELINGYIGUIPIANHECHENGYUYITI,YUXIANZHURUDEQINGYUANZICENGJIAWENHOUJIANGSHANGCENGBOLI、PAOGUANG)。QIZHONGSIMOXHESmart-cutGENGSHIHEYUDAGUIMOSHENGCHAN。

福彩快三 Smart- cutSHIWEIKEFUBESOIJISHUZHONGGUIPIANJIANBODEKUNNANERFAZHANQILAIDEXINJISHU,HENYOUQIANJING,YICHENGWEIDANGQIANSOIJISHUDEYANJIUREDIANZHIYI。YONGSmart-CutJISHUZHIBEISOICAILIAO,MUQIANYOUYIXIEBUYIKEFUDEKUNNAN:ZAIZHUQINGBOLISHI,GAOJILIANGZHURUDEQINGCHUYUYIZHONGLISANDENINGJUZHUANGTAI,BUXINGCHENGDAMIANJIDELIANXUCENG,SHIBOLIKUNNAN,BOLIHOUDEDINGBUGUICENGBIAOMIANBIXUJINYIBUCHULI,CAINENGZHIZAOQIJIAN;YOUYUBIAOCENGDEPINGZHENGDUHEZAZHIDENGYUANYIN,JIANHEDEJIEMIANDEWULIXINGNENGBUWANMEI,TONGYANGYINGXIANGDINGCENGGUISHANGDIANLUDEKEKAOXING。

SIMOXJISHUSHIMUQIANSOICAILIAODEZHULIUZHIZAOJISHU,MEIGUOIBISHESPRILGONGSI、FAGUOSOITECGONGSIYIYOUSHANGPINHUADESOICAILIAOCHUSHOU。SUIZHEBOMOQUANHAOJINYAWEIMIJICHENGDIANLUDEFAZHAN,MUQIANSIMOXJISHUSHIXIANGDIZHURUJILIANG、DIZHURUNENGLIANGDEFANGXIANGFAZHAN,MUDESHIZHIZAOCHAOBOGUIMODESOICAILIAO,TONGSHIJIANSHAOZHURUSHIJIAN,JIANSHAOZHANWU,GAISHANDINGBUGUIMODEJINGTIWANZHENGXING,BINGJIANGDICHENGBEN。SIMOXJISHUZAIZHEIFANGMIANGENGJIAXIANSHICHUQIDUTEDEYOUDIAN。

YUGUOJIXIANGBI,WOGUODESIMOXCAILIAOZAICAILIAODEZONGHEXINGNENGZHIBIAOSHANGRENGYOUXIANGDANGDECHAJU。ZHUYAOBIAOXIANZAIDINGBUGUICENGDEDIANZULVJUNYUNXING、WEICUOMIDUHEJINSHUZHANWUZHUANGKUANGBUJIGUOWAIXIANJINSHUIPING,MUQIANBUNENGMANZUJICHENGDIANLUDEYAOQIU。ZHIZAOSHEBEILUOHOU,QUEFAQIANGSHULIU(>1mA)DEZHUANYONGZHUYANGJIHECHAOGAOWENTUIHUOSHEBEI(>1300℃),SHIZAOCHENGWOGUOZAISIMOXCAILIAOZHIZAOJISHUSHANGDEJUDACHAJUDEZHUYAOYUANYIN。MUQIANGUONEIYANJIUHESHENGCHANDANWEISUONENGDEDAODESOICAILIAO,JIBENDOUSHITONGGUOFEIZHENGGUIQUDAOCONGGUOWAIHUODE,SHULIANGHENSHAO,ZHILIANGYEBUNENGBAOZHENG,GENBENWUFAMANZUXUYAO。

3、SOI材料的需求与供应情况

福彩快三 MUQIAN,GUONEISOIQIJIANZHENGCHUYUYANZHIJIEDUAN,SHICHANGXUQIULIANGYUEWEI1000-2000PIAN/NIAN。JINHOUSANWUNIANNEI,SUIZHESOIQIJIANHEDIANLUZAIGUOFANGZHUANGBEISHANGDEGUANGFANCAIYONG,DUISOICAILIAODEXUQIULIANGHUIDAFUDUSHANGSHENG。RUGUOSOIQIJIANDAGUIMOSHENGCHANBINGGUANGFANYONGYUTONGXUN、DIANZI、JISUANJI、HANGKONGYE、QICHEYEDENGMINYONGLINGYU,DUISOICAILIAODEXUQIULIANGJIANGHUIYIJIHELIANGJIJISUSHANGSHENG。HEBIEDEDIANZILEICHANPINLEISI,CONG1998NIANYIHOU,SUIZHESHENGCHANGUIMODEFAZHANHESHENGCHANCHENGBENDEXIAJIANG,GUOJISHICHANGDESOICAILIAOJIAGEJIBENCHUYUYIZHONGHUANMANXIAJIANGDEQUSHIZHONG,YUJIJINHOUJINIANRENGJIANGBAOCHIZHEIZHONGXIAJIANGQUSHI,DANXIAJIANGFUDUJIANGBUHUITAIDA,YOUQISHIGUONEISHICHANG。

4、SOI制备技术存在的技术难题

尽管SIMOX技术在国外已实现商品化,仍然有三个重要问题没有解决:由于经过高剂量氧离子注入,顶层硅中残存的氧浓度较高,形成较高密度的位错,特别是难以消除的穿通位错,单晶质量差;在二氧化硅埋层中存在着以硅原子为主体的针孔、管道和硅分凝产物;过高的退火温度福彩快三影响了产品的成品率和成本。一般来说高温退火是消除位错的有效途径,为了获得高品质的材料,退火温度高过1300℃,退火时间长达6小时,几乎成为公认的技术方案。如果不是已经非常接近硅的熔点,退火温度可能还会选得更高,而且提高退火温度的方法用到了极限,仍不能完全解决问题。

JINNIANLAIYOUYUSOIBOMOCAILIAODEYANJIUCHENGGONGHEXINGNENGDEGAISHAN,SUIZHESOICAILIAOBIAOMIANGUICENGHOUDUDEJIANBO,KEYISHISOIQIJIANDADAOGENGYOUYUEDEQUANHAOJINZHUANGTAI。ZHEIZHONGSOIBOMOCAILIAOGENGSHIHEYUZHIZAOGAOXINGNENGDESHENYAWEIMIULSIDIANLU。BOMOQUANHAOJINSOIQIJIANJUYOU:SUDUGAO、GONGHAODI(1VDIANYUAN)、KANGFUZHAOTEXINGHAO、JICHENGDUGAO、CHENGBENDIDENGYIXILIEYOUDIAN。YAWEIMICHAOBOSOIJISHUSHISHIXIANGAOSU、GAOTUNTUNENGLIHEKANGFUZHAODIANLUDELIXIANGXUANZE。

5、项目技术工艺路线

福彩快三 YANGLIZIZHURUDANJINGGUIGUIPIAN:KONGZHIZHURUDEJILIANGHENENGLIANG,DADAOYUDINGDESHENDUHENONGDU,YEYAODADAOBIAOMIANGUICENGHEYANGHUAGUICENGDEDIANTEXINGYAOQIU。TONGSHIKONGZHIZHURUSHIGUIPIANDEWENDU,YIBAOCHIDINGBUGUICENGDEDANJINGZHUANGTAI。GAOWENTUIHUO:CHEDIDIQINGXIYIHOU,ZAIGUIPIANBIAOMIANSHENGZHANGYICENGBAOHUZUOYONGDEYANGHUAGUIMO。KONGZHITUIHUOWENDU、SHIJIANHEBAOHUQIFEN,SHIGUIPIANXINGCHENGYUDINGCHICUN、DIANXINGNENGDESANCENGJIEGOU。YAOQIUGONGYIGUOCHENGZAOCHENGDEJINSHUZHANWU、SUNSHANGHEJIEMIANBUPINGZHENGKONGZHIZAIYUNXUFANWEIZHINEI。FEIJINGHUAJISHUGAISHANCHANPINZHILIANG:JIEHEGUIZIZHURUFEIJINGHUAHEKUAISURETUIHUOJISHU,KONGZHIGONGYITIAOJIAN,ZHUYAOJIEJUESIMOXJISHUZHONGDEBIAOMIANGUICENGDEDANJINGHEYANGHUAGUICENGDEWANZHENGJUNYUNXINGDECHANPINZHILIANGWENTI,YEYAOYOUHUAZHURUHETUIHUODEGONGYIJISHU,YIJIANGDICHENGBENHETIGAOSHENGCHANLV。

6、项目实施对环境影响及拟采取的措施

BANDAOTICAILIAOZHIZAOGUOCHENGZHONG,XUYAOQINGCHUGUIPIANBIAOMIANSHANGDEGEZHONGZAZHI,BAOKUOZHIZUOGUOCHENGZHONGCHANSHENGDEBIAOMIANCENG、JINSHUZHANWU、CANYUDEYOUJIRONGJIHEHUAXUESHIJI。GAOCHUNSHUI(UPDISHUI)DEZHUYAOYONGTUSHIQUCHUGUIPIANBIAOMIANDEGEZHONGHUAXUEZAZHI。CHULEQINGXIGUIPIANGUOCHENGZHONGPAICHUDEHUAXUEZAZHI,ZAIQINGSAOJIWEIXIUSHOUWURANDEZHUANYONGZHIZAOSHEBEI,TEBIESHIZHISHUISHEBEIHUILIUCHUFEIQIHEFEIYE。FUCHANWUJISUOYOUSHOUWURANWULIAO,BIXUZUOWEIWEIXIANPINJINXINGGUANLI,JIETESHUFEILIAOCHULI(BAOKUOGUTIFEIZHA、SHOUWURANDEYIFU、SHOUWURANDEZHENKONGBENGYOU、SHUILINXITONGDEFEIYE、GANSHIXIFUQIDEGUTIFEILIAODENG)。BIXUCAIQUSHIDANGDEYUFANGCUOSHI,LIRUCHUANDAIYICIXINGWAITAO、YICIXINGSHOUTAOJIKOUZHAO。XIANGGONGZUOFU、JINGHUAQIMINZHEILEIYAOZHONGFUSHIYONGDESHOUWURANWULIAO,BIXUJINGGUOTEBIECHULIYIFANGYUANGONGSHOUWURANWUDEYINGXIANG。

7、项目实施的社会效益评价

福彩快三 GUOWAIDESOICAILIAOJIAGEANGGUI,JISHIDUIWOGUOJIECHUJINYUN,HUOZHAODAOBANFAJINKOU,QIJIAGERENGSHIGUONEIYONGHUSUOWUFACHENGSHOUDE。DUIGUOJIAERYANJIUYAOHUAFEIDALIANGBAOGUIDEWAIHUI。ZAIGUONEISHIXIANSOICAILIAODECHANYEHUA,QIXIANGDUIDILIANDEJIAGEBIJIANGSHOUDAOGUONEIYONGHUDEFUCAIKUAISAN,YIFANGMIANKEYIDALIANGMANZUGUONEIYONGHUDEXUYAO,LINGYIFANGMIANYEKEYISHIGUOJIAJIANSHAOSHENZHIBUYONGJINKOU,WEIGUOJIAJIEYUEDALIANGWAIHUI。DANGGUOCHANSOICAILIAOJINJUNGUOJISHICHANGHOU,HAIKEYIWEIGUOJIADALIANGCHUANGHUI。

到目前为止,国内尚无一家企业具备SOI材料产业化的能力。如果能够在国内实现SOI材料的大规模生产,建立起具有我国自主知识产权的并具备消化吸收及创新能力的新材料产业体系,这将是我国高新材料制造技术的一个里程碑,必将影响和带动国内相关科学技术领域的进一步发展。本文源自泽天传感福彩快三,转载请保留出处。