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合金薄膜压力传感器工艺薄膜制备方法与工艺的发展

发布时间:2019-10-9      发布人:泽天公司      点击:

在各国的国防、航空航天、工业生产与自动控制系统中,例如运载火箭燃料室的压力测量、发动机燃烧室压力监测、供油压力、导弹飞行的平衡控制以及石油工业的井下压力测量等,都需要高精度、高稳定性、耐恶劣环境的压力传感器,而且大多需要金属弹性衬底的薄膜电阻应变式压力传感器,因为金属的机械性能优良,耐高温性能和耐腐蚀性能优越。研制能适应各种恶劣环境下压力测量要求的压阻式薄膜压力传感器,其关键技术在于合金敏感薄膜的制备工艺。高电阻稳定性的合金敏感薄膜的制备是保证薄膜压力传感器在各种恶劣环境下仍具有稳定性能的关键。

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溅射薄膜压力传感器芯体

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相对于丝式与箔式压力传感器,薄膜应变式压力传感器在性能上有很大提高,能适应恶劣的环境。但是直接在金属弹性衬底上溅射或沉积薄膜需要解决几个问题:例如,高质量金属弹性衬底表面的制备、薄膜与衬底间的强粘附性、金属弹性衬底与薄膜电阻间的高绝缘性等关键技术。泽天传感长期从事压力传感器的研究与制造,在薄膜溅射压力采购清单制造工艺上积累了丰富的经验,解决薄膜压力传感器生产制造的关键技术与工艺,产品稳定可靠,应用广泛。本文源自泽天传感,转载请保留。