福彩快三

泽天新闻
联系泽天   Contact

在溅射压力传感器芯片上制作零补电阻的必要性分析

发布时间:2020-5-14      发布人:泽天传感      点击:

当压力传感器没有承受压力时,其输出电压应为零。采用离子束溅射成膜和光刻工艺制成的溅射薄膜压力传感器,工艺上不能保证惠斯登电桥四个桥臂电阻均匀一致,电桥的平衡条件不能满足,故传感器即使没有承受压力,处于运行状态下的传感器也会有输出讯号。

薄膜压力传感器

WEILEJIANG“LINGDIANSHUCHU”KONGZHIZAIYIDINGFANWEIZHINEI,ZHIZUOCHUANGANQISHI,BIANYAOYINRU“LINGDIANBUCHANG”,JIWAIJIEYIGEDIANZUSHIHUISIDENGDIANQIAOJINKENENGDADAOPINGHENGZHUANGTAI,KESHI,YOUYUWAIJIEDIANZUCAILIAOHEXINGCHENGBOMODIANZUERZHEDEDIANZUWENDUXISHUBUYIZHI,BIANDAOZHICHUANGANQIDEWENDUPIAOYIFASHENGBIANHUA。WAIJIEDIANZUDEZUZHIYUEDA,DUIWENPIAODEYINGXIANGYEYUEDA。WEILERANGWENPIAOMANZUYAOQIU,BUDEYIYOUYAOTONGGUOWAIJIEDIANZULAIJINXINGWENDUBUCHANG。WENBUDIANZUDEJIERUYOUHUIYINGXIANGLINGBUDIANZUDESHIPEI,ERZHEHUWEIYINGXIANG,BIXUFANFUJINXINGDIAOZHENG,YIQIULINGDIANSHUCHUHEWENDUPIAOYIJUNMANZUYAOQIU。YOUCIKEJIAN,ZAICHUANGANQIDEZHIZUOGUOCHENGZHONG,“LINGBU”HE“WENBU”FEISHIFEILI,BUDANZENGJIALECHENGBENDETOURU,DUICHUANGANQIDEZHILIANGHEWENDINGXINGYIYOUFUMIANYINGXIANG。YOUWENZHANGZHICHU:“CHUANGANQIZAIZHIZAOZHONGBIXUJINXINGLINGDIANHEWENDUBUCHANG,DUIYALICHUANGANQILAISHUO,WAIJIADEPINGHENGHEBUCHANGDIANZU,KENENGSHIGAIXITONGZHONGZUIBUWENDINGDEYINSU。”

RUGUONENGJIANGJUEDABUFENLINGBUDIANZUZHIJIEZUOZAIYALIXINPIANSHANG,KENDINGYOULIYUCHUANGANQIGONGYIDEGAIJINHEZHILIANGDETIGAO。ZAIFENXILEZHEIZHONGXIANGFADEKENENGXINGZHIHOU,BIANBAZAIYALIXINPIANSHANGZHIZUOLINGBUDIANZUDANGZUOYALIXINPIANGONGYIYANJIUDEGUANJIANJISHUZHIYI。BENWENYUANZIZETIANCHUANGAN,ZHUANZAIQINGBAOLIUCHUCHU。